• Proceedings of the KAIS Fall Conference
• /
• 2004.11a
• /
• pp.111-113
• /
• 2004

최근 반도체 제조공정의 많은 부분이 트랙(Track)장비 형태로 구성되어져있다. 이러한 복합제조 장비들은 각 모듈간의 상호 작용이 복잡하고 체제 가능시간도 엄격히 제안되고 있어 각각의 모듈들을 효율적으로 운용하기 위해서 반드시 스케줄러가 필요 되어 진다. 하지만 우리나라에서 대표적 트랙장비로 달수 있는 Wet Station에 대한 스케줄링 분야에 대한 연구는 미약한 편이며 앞으로 많은 연구와 개발이 필요한 시점이다. 본 논문은 Wet Station 장비의 운용 효율성을 극대화할 수 있는 Wet Station 장비 운용방법을 제안하고 평가하는데 그 목적이 있다. 관련 소프트웨어기술은 향후 핵심적인 기술로 대두 대고 있을 뿐만 아니라 다른 LCD공정의 트랙장비, 인라인(In-Line) 장비, 클러스터 툴(Cluster Tool) 효율적 운용면에서 큰 도움이 될 것으로 기대 된다.

• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.1309-1312
• /
• 2005

A multi-chemical supply system is developed and applied to a wet station, which uses the multi-chemical process in one bath. To control the concentration of two chemicals, control logic of a supply pump is programmed using the programable logic controller (PLC). By using the multi-chemical supply system, wet station with single bath is applied to cleaning process using multi chemicals such as buffed oxide etchant (BOE) and standard clean 1 (SC-1). The concentration of each chemical is measured in the bath to verify the multi-chemical supply system. The control range in the each chemical concentration is measured to 1.33weight% in NH4OH and 0.23weight% in H2O2. The multi-chemical supply system can be movable and usable as an independent module of fixed wet station. By simply midifying the PLC, a multi-chemical supply system can be developed for a wet station.

• The Transactions of the Korea Information Processing Society
• /
• v.5 no.7
• /
• pp.1813-1828
• /
• 1998

본 논문에서는 기능별로 태스크를 설계하고 프로세스간 통신을 위하여 공유 메모리를 사용하여 wet station 모니터링 시스템을 구현한다. 롯트라는 반도체 웨이퍼 단위를 처리하기 위하여 레시피 명령을 설계하고 이 레시피에 의한 롯트의 배치 처리 과정을 모니터링하는 방법에 대하여 논한다. 설계된 태스크 및 레시피, 공유 메모리를 구현하여 실제 장비에 적용한 결과 각 태스크들이 레시피 명령에 따라 공유 메모리를 매개로 하여 배치 작업을 진행하였고 그 과정을 그래픽 화면을 통해 시각적으로 모니터링 할 수 있었다.

• The Transactions of the Korea Information Processing Society
• /
• v.6 no.5
• /
• pp.1385-1392
• /
• 1999

This paper describes the design of the monitoring system for monitoring the current status and indirect controlling of the Wet Station Equipment which is used for cleaning the wafer. Most of the conventional monitoring system depend on the special hardware and software. Basic design goal of monitoring system is provide the convenience for the use and the portability for the system. In order for the system to fulfil its requirements, it was designed using GUI (Graphical User Interface) facility based on the windows NT environment of IBM PC compatible and EtherNet board based on the TCP/IP protocol.

• Journal of Applied Biological Chemistry
• /
• v.42 no.4
• /
• pp.175-179
• /
• 1999

Grape seed oil was extracted using different preparatory treatments as follows: (1) grinding, (2) grinding and roasting, (3) grinding and wet- roasting, (4) grinding, roasting, and wet-roasting, and (5) grinding, wet-roasting, and wet-roasting. The highest antioxidant activity was obtained from the sample with the method (2). Initial states of oxidation were similar except method (1) that showed more oxidized state, being P.O.V.8. Acid values were observed in the range from 1.42 to 1.89. The lowest acid value was found as 1.42 in method (1) and those of others were somewhat higher, indicating that heating process of roasting produced some free fatty acids. From the results of sensory evaluation, the best odor and taste were obtained from the methods (2) and (3). Repetitive procedure of wet-roasting, like method 5, caused some loss of flavor components and decrease in the sensory evaluation score. Addition of grape seed oil (method 2) to soybean and perilla oil at the level of 20% retained considerable antioxidant activities as much as 4.3 and 5 times, respectively, than 100% soybean or perilla oil stored for 12 weeks. When soybean or perilla oil was mixed with 20% grape seed oils, P.O.V. decreased to half of that of unmixed oils.

• Journal of the Semiconductor & Display Technology
• /
• v.4 no.3 s.12
• /
• pp.29-33
• /
• 2005

As the integrated devices become more and more sophistcated, the diameter of wafers increased up to 300 mm and strict level of cleaning is necessary to remove the particulates on the surface of wafer. Therefore we need a new type of wet-station which can reduce DI water and chemical in the cleaning process. Moreover, it is important to control the temperature and the concentration of chemical in the wet-station. In the conventional chemical supply system, it is difficult not only to fit the mixing rate of chemicals in cleaning process, but also to fit the quantity and temperature. Thus, we propose a new chemicals supply system, which overcomes above problems by the analysis of fluid and thermal transfer on chemical supply system.

• Journal of the Korean Society of Tobacco Science
• /
• v.20 no.1
• /
• pp.13-18
• /
• 1998

In the flue curing process, the wet bulb temperature is usually controlled at a constant level. To improve the quality of flue cured leaves, we studied the effect of the cyclic change of wet bulb temperature at the yellowing stage of flue curing on physical properties of cured leaves. The wet bulb temperature was automatically controlled between preset high (38℃) and low point (35℃) every one hour cyclically. As a result, the acceleration of the increase in the physical properties of cured leaves were observed. The leaves cured by this method were more or less orange in color, better bodied, and less brittle compared with the leaves produced by conventional curing. However, the leaves cured by this method had a little sharpness and harshness. As to the physical properties, there was decreased in occurrence of flat leaves than that of conventional ones. On the other hand, in case of cyclic curing method, increase of price per kg reached to 2-3% compared with those of conventional ones.

• Journal of the Semiconductor & Display Technology
• /
• v.10 no.2
• /
• pp.109-113
• /
• 2011

Hot air flow simulations of the wet station dryer module for the solar cell cleaning were conducted. Air incident angles such as to the substrates ($45^{\circ}$), to the bottom ($90^{\circ}$), and to the wall ($135^{\circ}$) were considered. Based on the simulated velocity and temperature profiles, appropriate incident angle was proposed, and it was well matched to experimental results. Additionally, uniform and non-uniform air hole sizes of the tube were compared for the uniform air flow distribution through the batch.

• Journal of the Korean Society of Tobacco Science
• /
• v.20 no.1
• /
• pp.19-25
• /
• 1998

The bulk curing experiment to the improve the quality of flue-cured leaves were carried out to evaluate relationship between cyclic curing and conventional curing method. We studied the effect of the cyclic change of wet bulb temperature at the yellowing stage of flue curing on chemical properties of cured leaves. The wet bulb temperature was automatically controlled between preset high($38^{\circ}C$) and low point ($35^{\circ}C$) everyone hour cyclically during 12 hours after starting luring. As a result, the acceleration of the increase in the chemical properties of cured leaves were observed. As to the chemical properties, there was decreased in citric acid, increased in malic acid of the nonvolatile organic acids and all higher fatty acids content of leaves cured by this method compared with in that of conventional curing method, while a major chemical compounds in relation to aromatic essence of cigarette smoke in essential oil components of lured leaves was mostly higher in this method than those of conventional ones, and it was evaluated that there was decreased in CO, TPM, Tar, and $CO_2$ content of the cigarette smoke comparing to the conventional luring method.

• KOREAN JOURNAL OF CROP SCIENCE
• /
• v.46 no.1
• /
• pp.47-52
• /
• 2001

In order to develop more stable seedling stand method in wet direct rice seeding culture, the effect of making the drainage ditches was studied in both methods of broadcast seeding on floody paddy surface and puddled-soil drill seeding. In a broadcast seeding on floody paddy surface, the ditching after seeding using a tractor or small ditch maker improved the seedling stand, and reduced the floating seedling and herbicide injury by accelerating the drainage. Suitable ditching time was at 2 days after seeding (DAS) for the tractor and at 3 DAS for the ditch maker. In the puddled-soil drill rice seeding culture, the ditching before seeding with a ditch maker at 3 days after draining effectively improved the seedling stand due to quick draining through well formed the seeding furrows. In the puddled-soil drill seeding, seedling stand number showed higher in both ditching plots synchronized with seeding compared with both only draining treatment at 1 DAS without ditching and the flooding plot condition for 6 DAS. And the suitable ditching depth was 6 cm, as considered the ditching status and drained status. These results suggest that the ditching in wet direct rice seeding is an resonable practice for improving the seedling stand through the accelerating drainage of field.