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Flow simulations of the wet station dryer module for the solar cell manufacturing  

Hong, Joo-Pyo (Korea University of Technology and Education)
Lim, Ki-Sup (Korea University of Technology and Education)
Yoon, Jong-Kook (EM-POWER Co., Ltd.)
Publication Information
Journal of the Semiconductor & Display Technology / v.10, no.2, 2011 , pp. 109-113 More about this Journal
Abstract
Hot air flow simulations of the wet station dryer module for the solar cell cleaning were conducted. Air incident angles such as to the substrates ($45^{\circ}$), to the bottom ($90^{\circ}$), and to the wall ($135^{\circ}$) were considered. Based on the simulated velocity and temperature profiles, appropriate incident angle was proposed, and it was well matched to experimental results. Additionally, uniform and non-uniform air hole sizes of the tube were compared for the uniform air flow distribution through the batch.
Keywords
fluid flow simulation; air incident angle; air hole size; hot air dryer; wet station; solar cell manufacturing equipment;
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1 홍주표, 김구경, 최현철, 김영균, "태양전지 세정모듈 유동해석", 한국반도체디스플레이기술학회 춘계학술대회, p.199, 2011.
2 이준신, 김경해, 태양전지공학, 도서출판 그린, p.114, 2009.
3 R. Payri, X. Margot, and F.J. Salvador, "A Numerical Study of the Influence of Diesel Nozzle Geometry on the Inner Cavitating Flow," SAE 2002 World Congress and Exhibition, 2002-01-0215.
4 A. Tomiyama and N. Shimada, "A Numerical Method for Bubbly Flow Simulation Based on a Multi-Fluid Model," J. Pressure Vessel Technol., Vol.123, No.4, pp.510-516, 2001.   DOI   ScienceOn
5 S. Roy, R. Raju, H.F.Chuang, B.A.Cruden, and M. Meyyappan, "Modeling gas flow through microchannels and nanopores," J. Applied Physics, Vol.93, pp.4870-4879, 2003.   DOI   ScienceOn
6 Solidworks Flow Simulation 2010 Technical Reference.