• Title/Summary/Keyword: Wet Process

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A Study on a Wet etching of ILD (Interlayer Dielectric) Film Wafer (습식 에칭에 의한 웨이퍼의 층간 절연막 가공 특성에 관한 연구)

  • 김도윤;김형재;정해도;이은상
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.935-938
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    • 1997
  • Recently, the minimum line width shows a tendency to decrease and the multi-level increase in semiconductor. Therefore, a planarization technique is needed and chemical mechanical polishing(CMP) is considered as one of the most suitable process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as micro-scratches, abrasive contaminations, and non-uniformity of polished wafer edges. Wet etching include of Spin-etching can improve he defects of CMP. It uses abrasive-free chemical solution instead of slurry. On this study, ILD(INterlayer-Dielectric) was removed by CMP and wet-etching methods in order to investigate the superiority of wet etching mechanism. In the thin film wafer, the results were evaluated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU). And pattern step height was also compared for planarization characteristics of the patterned wafer.

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Fabrication of gate electrode for OTFT using screen-printing and wet-etching with nano-silver ink

  • Lee, Mi-Young;Song, Chung-Kun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.889-892
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    • 2009
  • We have developed a practical printing technology for the gate electrode of organic thin film transistors(OTFTs) by combining screen-printing with wet-etching process using nano-silver ink as a conducting material. The screen-printed and wet-etched Ag electrode exhibited a minimum line width of ~5 um, the thickness of ~65 nm, and a resistivity of ${\sim}10^{-6}{\Omega}{\cdot}cm$, producing good geometrical and electrical characteristics for gate electrode. The OTFTs with the screen-printed and wet-etched Ag electrode produced the saturation mobility of $0.13cm^2$/Vs and current on/off ratio of $1.79{\times}10^6$, being comparable to those of OTFT with the thermally evaporated Al gate electrode.

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Inverted White OLEDs Fabricated by Full Wet-Processes

  • Lee, Dong-Hyun;Zhu, Xun;Seo, Seung-Woo;Ryu, Ji-Chang;Cho, Sung-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.683-686
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    • 2009
  • We report inverted white OLEDs fabricated by full wet processes. We utilized inverted structure OLEDs since the structure was better for the realization of full wet fabrication of OLEDs. It was found that the performance of inverted OLEDs is comparable to that of conventional OLEDs. In this presentation, we will discuss in detail a few important issues on the full wet fabrication of OLEDs.

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Effect of Oxygen Partial Pressure on Tungsten-Alumina Bonding Behavior (텅스텐-알루미나 접합거동에 미치는 산소분압의 영향)

  • 박정현;이상진
    • Journal of the Korean Ceramic Society
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    • v.27 no.6
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    • pp.755-762
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    • 1990
  • The tungsten paste was printed on the surface of 92% alumina sheet which was made by type casting process. The printed tungsten was bonded on the Al2O3 by co-firing in reducing atmosphere. During the co-firing, the binder burn-out was easier in wet H2 atmosphere than in dry H2, which affected sintered density. In practically, the use of wet H2 above 100$0^{\circ}C$ was beneficial for density of alumina and bond strength. This phenomena occured more distinctly when atmosphere varied from dry H2 to wet H2 than varied dew point in wet H2. In wet H2, the improvement in bonding strength can be attributed to good glass migration into the metal layer due to inhibition of the tungsten particle growth, with increase of alumina density, at the temperatrue higher than 100$0^{\circ}C$.

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Evaluation of Autoheated Thermophilic Aerobic Digestion Process for the Treatment of Pig Manure Wastewater (돈사폐수의 고온 호기성 소화공정 적용 타당성 평가)

  • Chung, Yoon-Jin;Cho, Jong-Bok;Lee, Jin-Yong;Lee, Jong-Hyoung
    • Journal of the Korea Organic Resources Recycling Association
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    • v.3 no.2
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    • pp.103-114
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    • 1995
  • Since autoheated thermophilic aerobic digestion (ATAD) process has various advantages for the treatment of high-strength organic wastewater, active research and field application has been applied in U.S.A. and Canada, recently and the interest in ATAD process has been elevated for treating high-strength organic wastewater efficiently in Korea. Therefore, various experiments were carried out to evaluate the feasibility of ATAD process for the treatment of pig manure wastewater. The results of this study showed possibility to reuse pig manure wastewater as wet fodder or liquid compost, since ATAD process led excellent stabilization on the basis of odor and putrefaction. However. digested sludge can not be provided as wet fodder to most of hog farms without changing dry feeder system into wet system and as liquid compost to hog farms not having their own grass land. Since the results showed that the increase of temperature in reactor was resulted not from energy by biological activity. but from mechanical mixing energy. the reactor investigated in this study was against the principle of ATAD process. Therefore. if pig manure wastewater treated by ATAD can not be utilized as wet fodder. it is not economical to adopt ATAD process only for the treatment of wastewater.

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Effect of Wet and Dry Thermal Setting Conditions of Stretch Fabric to Fabric Mechanical Property and Garment Formability (습·건열 열고정 조건이 스트레치 직물의 역학특성과 의류형성성능에 미치는 영향)

  • Kim, Hyun-Ah;Kim, Seung-Jin
    • Fashion & Textile Research Journal
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    • v.20 no.1
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    • pp.83-92
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    • 2018
  • This paper investigated garment formability and fabric mechanical properties of one-way and two-way stretch fabrics according to the thermal treatment methods. One-way and two-way stretch fabrics were woven using 75d and 150d PET/spandex covering yarns and then these were wet thermal treated with four kinds of finishing machines. The fabric mechanical properties of these stretch fabrics specimens were measured and compared with the regular PET fabrics. The stretch ratio of one-way stretch fabric was ranged 12 to 26 percentage, 15 to 45 percentage for 2-way stretch fabrics and 4 to 10 percentage for regular fabrics. Garment formability of stretch fabric was superior than that of regular fabrics, in addition, 2-way stretch fabric was better than one-way. The garment formability of the stretch fabrics treated with CPB and Lava wet thermal machines showed the highest values, and the stretch ratio of these 2-way stretch fabrics was also the highest, which was ranged 20 to 45 percentage. This phenomenon was assumed to be due to high extensibility and bending rigidity with low shear modulus of the 2-way stretch fabric treated with CPB and Lava wet thermal machines. It was shown that the garment formability of stretch fabrics treated without dry thermal treatment was higher than that of dry thermal treated fabrics. It revealed that high stretch fabric was available under the condition of low process tension in the wet and dry thermal treatments of the finishing process, which makes high garment formability.

SOx and NOx removal performance by a wet-pulse discharge complex system (습식-펄스방전 복합시스템의 황산화물 및 질소산화물 제거성능 특성)

  • Park, Hyunjin;Lee, Whanyoung;Park, Munlye;Noh, Hakjae;You, Junggu;Han, Bangwoo;Hong, Keejung
    • Particle and aerosol research
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    • v.15 no.1
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    • pp.1-13
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    • 2019
  • Current desulfurization and denitrification technologies have reached a considerable level in terms of reduction efficiency. However, when compared with the simultaneous reduction technology, the individual reduction technologies have issues such as economic disadvantages due to the difficulty to scale-up apparatus, secondary pollution from wastewater/waste during the treatment process, requirement of large facilities for post-treatment, and increased installation costs. Therefore, it is necessary to enable practical application of simultaneous SOx and NOx treatment technologies to remove two or more contaminants in one process. The present study analyzes a technology capable of maintaining simultaneous treatment of SOx and NOx even at low temperatures due to the electrochemically generated strong oxidation of the wet-pulse complex system. This system also reduces unreacted residual gas and secondary products through the wet scrubbing process. It addresses common problems of the existing fuel gas treatment methods such as SDR, SCR, and activated carbon adsorption (i.e., low treatment efficiency, expensive maintenance cost, large installation area, and energy loss). Experiments were performed with varying variables such as pulse voltage, reaction temperature, chemicals and additives ratios, liquid/gas ratio, structure of the aeration cleaning nozzle, and gas inlet concentration. The performance of individual and complex processes using the wet-pulse discharge reaction were analyzed and compared.

Effect of inlet structure of filtration system on the removal characteristics of iron particles by ceramic candle filters (집진장치의 유입구조에 따른 세라믹필터의 철입자 제거특성에 미치는 영향)

  • Park, Young-Ok;Jeong, Ju-Yeong;Seo, Yong-Chil
    • Particle and aerosol research
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    • v.5 no.4
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    • pp.189-197
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    • 2009
  • Wet-type particulate removal system is employed in most of ironmaking processes. These de-dusting systems require additional downstream aggregates for treatment of water and for drying of the collected slurry. Thus dried slurry can be pressed in shape of briquettes and recycled in the steelmaking process. Different from the wet-type, the dry-type particulate removal systems generate no slurry. A high-temperature, high-pressure de-dusting system with inertial inlet was developed. The target application of this system was to remove particulate matter generated from the novel ironmaking process and other steelmaking processes. In this study we conducted tests with this newly developed system to evaluate the performance of the silica-carbide (SiC) ceramic filters. In addition, for purpose of comparison, we also conducted tests with a unit which has conventional direct inlet. Fe-Particles collected from the novel ironmaking process were used in our tests as test dusts. The temperature and the pressure were kept constant at their respective values $800^{\circ}C$ and $3kg_f/cm^2$.

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The Origin of the Residual Carbon in LiFePO4 Synthesized by Wet Milling

  • Park, Sung-Bin;Park, Chang-Kyoo;Hwang, Jin-Tae;Cho, Won-Il;Jang, Ho
    • Bulletin of the Korean Chemical Society
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    • v.32 no.2
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    • pp.536-540
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    • 2011
  • This study reports the origin of the electrochemical improvement of $LiFePO_4$ when synthesized by wet milling using acetone without conventional carbon coating. The wet milled $LiFePO_4$ delivers 149 $mAhg^{-1}$ at 0.1 C, which is comparable to carbon coated $LiFePO_4$ and approximately 74% higher than that of dry milled $LiFePO_4$, suggesting that the wet milling process can increase the capacity in addition to conventional carbon coating methods. UV spectroscopy, elemental microanalysis, and evolved gas analysis are used to find the root cause of the capacity improvement during the mechanochemical reaction in acetone. The analytical results show that the improvement is attributed to the conductive residual carbon on the surface of the wet milled $LiFePO_4$ particles, which is produced by the reaction of $FeC_2O_4{\cdot}2H_2O$ with acetone during wet milling through oxygen deficiency in the precursor.

A Study on the Quality Improvement of Recycled Fine Aggregates with Production Methods (생산 방식별 재생 잔골재의 품질에 대한 기초적 연구)

  • Shim, Jong-Woo;Lee, Sea-Hyun;Yu, Myoung-Youl;Lee, Mun-Hwan;Song, Tae-Hyeob
    • Proceedings of the Korea Concrete Institute Conference
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    • 2004.05a
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    • pp.368-371
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    • 2004
  • It analyzes the quality of the fine aggregate which is reproduced through a dry production process with cyclone and a wet production process. The conclusions of the study are as follows. 1. The recycled fine aggregate through the dry production process with cyclone shows the low rate of absorption and impurity content after the cyclone process. It shows that its density is 2.37, absorption rate is 4.8 and stability is $5.1\%$ and less. Therefore, it satisfies the standards of KS F 2573(recycled aggregate for concrete) as the first grade. 2. The recycled fine aggregate through the wet production process shows the low rate of absorption and foreign substance content after the process of wash and dehydration. It shows that its density is 2.40, absorption rate is 3.12 and stability is $3.2\%$ and less. Therefore, it satisfies the standards of KS F 2573(recycled aggregate for concrete) as the first grade.

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