• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.245-245
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• 2012

Syntheses of oxide supported metal catalysts by wet-chemical routes have been well known for their use in heterogeneous catalysis. However, uniform deposition of metal nanoparticles with controlled size and shape on the support with high reproducibility is still a challenge for catalyst preparation. Among various synthesis methods, arc plasma deposition (APD) of metal nanoparticles or thin films on oxide supports has received great interest recently, due to its high reproducibility and large-scale production, and used for their application in catalysis. In this work, Au and Pt nanoparticles with size of 1-2 nm have been deposited on titania powder by APD. The size of metal nanoparticles was controlled by number of shots of metal deposition and APD conditions. These catalytic materials were characterized by x-ray diffraction (XRD), inductively coupled plasma (ICP-AES), CO-chemisorption and transmission electron microscopy (TEM). Catalytic activity of the materials was measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. We found that Au/$TiO_2$ is reactive, showing 100% conversion at $110^{\circ}C$, while Pt/$TiO_2$ shows 100% conversion at $200^{\circ}C$. High activity of metal nanoparticles suggests that APD can be used for large scale synthesis of active nanocatalysts. We will discuss the effect of the structure and metal-oxide interactions of the catalysts on catalytic activity.

• Current Photovoltaic Research
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• 제3권3호
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• pp.85-90
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• 2015

Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.

• 공업화학
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• 제28권1호
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• pp.64-72
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• 2017

본 연구에서는 다양한 증진제에 따른 $CH_4-SCR$ 반응특성을 확인하기 위하여 $Pt/Al_2O_3$를 기본으로 한 촉매에 알칼리, 알칼리 토류 금속을 담지하여 습식함침법으로 제조한다. 본 연구를 통해 $Pt/Al_2O_3$ 촉매에 Na를 담지시킬 경우 Pt와 Na 원자간 electronegative gap의 발생으로 Pt의 valence state 변화를 일으키며, 금속상 Pt의 비율이 증가됨을 확인할 수 있다. 또한 Na 첨가를 최적화시켜 제조한 촉매의 금속상 Pt종은 촉매표면에서 NO species 흡착 증진과 환원제로 사용되는 $CH_4$의 $CO_2$로의 산화를 억제시킨다. 이때, Na/Pt의 mole ratio는 4.0이 최적화이며, $CH_4-SCR$ 효율이 가장 우수하다.

• Bulletin of the Korean Chemical Society
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• 제31권4호
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• pp.808-814
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• 2010

Activities of nanostructure HZSM-5 and Co-ZSM-5 catalysts (with different Co-loading) for catalytic conversion of ethyl acetate and toluene were studied. The catalysts were prepared by wet impregnation method and were characterized by XRD, BET, SEM, TEM and ICP-AES techniques. Catalytic studies were carried out inside a U-shaped fixed bed reactor under atmospheric pressure and different temperatures. Toluene showed lower reactivity than ethyl acetate for conversion on Co-ZSM-5 catalysts. The effect of Co loading on conversion was prominent at temperatures below $400^{\circ}C$ and $450^{\circ}C$ for ethyl acetate and toluene respectively. In a binary mixture of organic compounds, toluene and ethyl acetate showed an inhibition and promotional behaviors respectively, in which the conversion of toluene was decreased at temperatures above $350^{\circ}C$. Inhibition effect of water vapor was negligible at temperatures above $400^{\circ}C$. An artificial neural networks model was developed to predict the conversion efficiency of ethyl acetate on Co-ZSM-5 catalysts based on experimental data. Predicted results showed a good agreement with experimental results. ANN modeling predicted the order of studied variable effects on ethyl acetate conversion, which was as follows: reaction temperature (50%) > ethyl acetate inlet concentration (25.085%) > content of Co loading (24.915%).

• 자원환경지질
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• 제8권4호
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• pp.175-182
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• 1975

본 연구는 양양(襄陽) 철광산(鐵鑛山) 의 철(鐵)을 부존(賦存)하고 있는 각섬석질암(角閃石質岩)의 성인(成因) 규명을 목적으로, 습식(濕式) 및 방출분광분석적(方出分光分析的) 방법을 통하여 얻은 18개의 주성분(主成分) 및 희유성분(稀有成分)의 data를 각종 Niggli 도표에 적용시키고 variaticn trend를 검토한 결과이다. 지금까지의 각 대륙(大陸)에 분포하는 각섬석질암(角閃石質岩)의 화학적(化學的)인 연구결과로는 거의 모든 각섬석질암이 변성퇴적암류(變成堆積岩類)의 형태로 산출될지라도 화성기원(火成起源)으로 밝혀져 왔으나 양양(襄陽) 철광산(鐵鑛山)의 함철(含鐵) 각섬석질암(角閃石質岩)은 준일각섬석질암(準一角閃石質岩), 특히 pelite-carbonate mixture의 특성(特性)을 뚜렷하게 보여준다. 즉 Niggli 값을 사용한 각 도면에서 본 연구의 대상이 된 시료들은 분산(分散)된 분포(分布) 및 퇴적(堆積)영역, 특히 pelite-carbonate mixture의 trend를 잘 따르고, Cr, Co 및 Ni의 함량이 매우 낮으며 Cr/mg, Co/mg 도포에서퇴적기원(堆積起源)의 특정인 negative trend를 뚜렷하게 나타낸다. 한편 높은 oxidation ratio의 값(>30)은 상기(上記) 결과를 더욱 뒷바침해준다. 이러한 모든 현상은 경기변성대(京畿變成帶)에서 퇴적기원(堆積起源)으로 판명된 준일각섬석질암(準一角閃石質岩)(소칠섭(蘇七燮), 1974) 이 갖는 특성과 유사하다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.77.2-77.2
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• 2013

In this talk, I will briefly review recent results of my group related to application of atomic layer deposition (ALD) for fabricating environmental catalysts and organic solar cells. ALD was used for preparing thin films of TiO2 and NiO on mesporous silica with a mean pore size of 15 nm. Upon depositing TiO2 thin films of TiO2 using ALD, the mesoporous structure of the silica substrate was preserved to some extent. We show that efficiency for removing toluene by adsorption and catalytic oxidation is dependent of mean thickness of TiO2 deposited on silica, i.e., fine tuning of the thickness of thin film using ALD can be beneficial for preparing high-performing adsorbents and oxidation catalysts of volatile organic compound. NiO/silica system prepared by ALD was used for catalysts of chemical conversion of CO2. Here, NiO nanoparticles are well dispersed on silica and confiend in the pore, showing high catalytic activity and stability at 800oC for CO2 reforming of methane reaction. We also used ALD for surface modulation of buffer layers of organic solar cell. TiO2 and ZnO thin films were deposited on wet-chemically prepared ZnO ripple structures, and thin films with mean thickness of ~2 nm showed highest power conversion efficiency of organic solar cell. Moreover, performance of ALD-prepared organic solar cells were shown to be more stable than those without ALD. Thin films of oxides deposited on ZnO ripple buffer layer could heal defect sites of ZnO, which can act as recombination center of electrons and holes.

• 공업화학
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• 제31권2호
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• pp.200-207
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• 2020

본 연구에서는, NH₃-SCO (selective catalytic oxidation) 반응에서 RuTi 촉매 제조 시 소성온도에 따른 영향을 확인하였다. RuTi 촉매는 습윤 함침법을 이용하여 제조되었고, 공기 분위기에서 400~600 ℃로 4 h 동안 소성되었다. 촉매는 RuTi x00로 표기되었으며, x00는 소성온도를 의미한다. XRD, TEM, H₂-TPR 분석에 따르면, RuTi x00 촉매는 소성온도가 증가할수록 활성금속의 분산도가 감소하는 것을 나타내었다. XPS, NH₃-TPD 분석을 통하여, 낮은 분산도를 갖는 촉매는 표면 흡착 산소 종(O_β) 및 NH₃ 흡착량이 감소하는 특성을 나타내었다. 따라서 RuTi 400 촉매는 TiO₂ 표면에 활성금속이 가장 잘 분산되었으며, NH₃ 제거 효율이 가장 우수하였다.

• 전기전자학회논문지
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• 제22권4호
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• pp.1234-1237
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• 2018

본 논문에서는 planar MOSFET 대비 on 저항 감소 및 스위칭 속도 개선의 장점이 있는 4H-SiC trench MOSFET응용을 위하여 trench MOSFET 중요 이슈 중 하나인 sub-trench의 개선연구를 수행하였다. sub-trench의 제거를 위하여 Ar reshape 공정을 수행하였고, 온도와 공정시간을 변화해가며 trench 형태의 변화를 관찰하였다. 그 결과 $1500^{\circ}C$, 20분 조건에서 가장 적절한 sub-trench 완화를 확인하였다. 또한 Ar reshape 공정 이후 건식/습식 산화공정을 진행하여 결정방향에 따른 산화막 두께변화에 대해 확인하였다.

• Journal of Forest and Environmental Science
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• 제33권1호
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• pp.33-38
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• 2017

In this study, spray-drying yield and morphological characterization of spray-dried cellulose nanofibril (CNF) and TEMPO-oxidized nanocellulose (TONC) depending on spray-drying condition and surfactant addition was investigated. As spray-drying temperature increased, the yield of spray-dried CNF was increased. The highest spray-drying yields in both nanocelluloses were found at didecyl dimethyl ammonium chloride (DDAC) addition of 2.5 phr at all investigated temperatures. The spray-dried CNF was the sphere-like particle, but the spray-dried TONC showed both rod and sphere-like morphology. The average diameter of spray-dried CNF was decreased with increasing DDAC addition amount, resulting in the increase of specific surface area.

• JSTS:Journal of Semiconductor Technology and Science
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• 제8권2호
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• pp.121-127
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• 2008

This paper presents design and fabrication of optimized geometry structure of electrostatic inkjet head. In order to verify effect of geometry shape, we simulate electric field intensity according to the head structure. The electric field strength increases linearly with increasing height of the micro nozzle. As the nozzle diameter decreases, the electric field along the periphery of the meniscus can be more concentrated. We design and fabricate the electrostatic inkjet heads, hole type and pole type, with optimized structure. It was fabricated using thick-thermal oxidation and silicon micromachining technique such as the deep reactive ion etching (DRIE) and chemical wet etching process. It is verified experimentally that the use of the MEMS inkjet head allows a stable and sustainable micro-dripping mode of droplet ejection. A stable micro dripping mode of ejection is observed under the voltages 2.5 kV and droplet diameter is $10\;{\mu}m$.