• JSTS:Journal of Semiconductor Technology and Science
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• 제13권4호
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• 열처리공학회지
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• 제25권5호
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• pp.227-232
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• 2012

Magnesium alloy have good physical properties such as good castability, good vibration absorption, high strength/weight ratios. Despite the desirable properties, the poor resistance of Mg alloy impedes their use in many various applications. Therefore, magnesium alloy require surface treatment to improve hardness, corrosion and wear resistance. Plasma Electrolytic Oxidation (PEO) is one the surface treatment methods to form oxide layer on Mg alloy in alkali electrolyte. In comparison with Anodizing, there is environmental process having higher hardness and faster deposition rate. In this study, the characteristics of oxide film were examined after coating the AZ31 Mg alloy through the PEO process. We changed concentration of sodium aluminate into $K_2ZrF_6$, KF base electrolyte. The morphologies of the coating layer were characterized by using scanning electron microscopy (SEM). Corrosion resistance also investigated by potentiodynamic polarization analysis. As a result, propertiy of oxide layer were changed by concentration of sodium aluminate. Increasing with concentration of sodium aluminate in electrolyte, the oxidation layer was denser and the pore size was smaller on the surface.

• 동력기계공학회지
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• 제18권5호
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• pp.94-99
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• 2014

In this study, AISI M2 powder was selected primarily through various literature in order to improve the hardness and wear resistance. Among the laser metal deposition parameters, laser power was studied to improve the deposition efficiency in the laser metal deposition using a diode pumped disk laser. SKD61 hot work steel plate and AISI M2 powder were used as a substrate and powder for laser metal deposition, respectively. Fixed parameters are CTWD, focal position, travel speed, powder feed rate, etc. Experiments for the laser metal deposition were carried out by changing laser power. Through optical micrographs analysis of cross-section in LMD track, effect of the major parameters were predicted by track pitch. As the track pitch increased, so the reheated zone width, the overlap width and the minimum thickness was decreased. The hardness was decreased in the HAZ area, the hardness in the reheated HAZ area was decreased significantly and regularly in particular.

• Tribology and Lubricants
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• 제34권3호
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• pp.115-122
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• 2018

Chemical mechanical polishing (CMP) is a hybrid processing method in which the surface of a wafer is planarized by chemical and mechanical material removal. Since mechanical material removal in CMP is caused by the rolling or sliding of abrasive particles, interfacial friction during processing greatly influences the CMP results. In this paper, the trend of tribology research on CMP process is discussed. First, various friction force monitoring methods are introduced, and three elements in the CMP tribo-system are defined based on the material removal mechanism of the CMP process. Tribological studies on the CMP process include studies of interfacial friction due to changes in consumables such as slurry and polishing pad, modeling of material removal rate using contact mechanics, and stick-slip friction and scratches. The real area of contact (RCA) between the polishing pad and wafer also has a significant influence on the polishing result in the CMP process, and many researchers have studied RCA control and prediction. Despite the fact that the CMP process is a hybrid process using chemical reactions and mechanical material removal, tribological studies to date have yet to clarify the effects of chemical reactions on interfacial friction. In addition, it is necessary to clarify the relationship between the interface friction phenomenon and physical surface defects in CMP, and the cause of their occurrence.

• Weed & Turfgrass Science
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• 제3권2호
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• pp.130-136
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• 2014

Tall fescue is commonly well-adapted for low maintain area because of its wear resistance, deep root system, and drought tolerances. Deep and infrequent irrigation refers to applying large amounts of irrigation, 1.3 to 2.5 cm or more, in a single irrigation event. Light and frequent irrigation is commonly used with small amounts of water, 0.3 to 0.6 cm, every day or every other day. N use for turfgrass management is often unnoticed for water management. The objective of this field study was to evaluate the effects of irrigation frequency and N rates for tall fescue growth. The three irrigation treatments were no irrigation (precipitation only), 0.5 cm applied every other day, and 1.8 cm applied once a week at one irrigation event. The nitrogen (N) treatments were the low, medium, and high N rate treatments. The low, medium, and high N treatments were applied over 2, 4, and 6 applications, respectively. If high main maintenance of tall fescue is not important and water source is limited, irrigation is not necessary and, the $9.8gNm^{-2}yr^{-1}$ of two applications can be recommended for tall fescue under the weather condition of the study.

• 한국의류산업학회지
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• 제16권5호
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• pp.766-775
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• 2014

This study is aimed to research the actual wearing condition of ballet dancewear of girls aged between 2 and 6 years on its design, size and fit. Survey data were collected from 171 mothers who have a girl learning ballet dance. The questionnaire was composed with ballet education, ballet dancewear purchasing, preference on design, size selection, and fitting. The collected data were analyzed with frequencies statistics, ${\chi}^2$-test, ANOVA using the SPSS WIN 20.0. The results are as follows; High rate of respondents said that the purpose of ballet education was for good body balance, leisure activity, and height growth. The main method of purchase was online shopping. The design, price, size and fit were identified as important ballet dancewear attributes for girls. The most preferred style of ballet dancewear were 'short sleeve skirted leotard' and 'camisole skirted leotard' which look like dress. The respondents reported slight satisfaction with size and fit, price, convenience in action, sewing and durability. The most preferred sizing system was code by height but any ballet dancewear makers don't use code by height. Therefore it is difficult for consumers to select size. Retailers and manufacturers could potentially use the results of this study to improve the sizing system and fit for children's ballet dancewear.

• 한국항행학회논문지
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• 제12권6호
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• pp.653-658
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• 2008

자동차에 적용되는 각종 전자 부품의 복잡도는 21세기를 맞이하면서 급속도로 변화하고 있다. 특히, 각종 전기, 전자 시스템의 급증은 자동차의 안전과 직결되는 문제로 인식되고 있다. 차량의 전장 및 전자부품을 연결해주는 커넥터는 인간의 신경망과 같아서 조그마한 접촉 불량도 차량의 운전에 심각한 영향을 미칠 수 있다. 차량의 진동과 커넥터 단자의 열 변형으로 인한 프레팅 부식은 산화막을 형성하여 접촉저항을 증가시키고 특히 산화층은 진접촉면적의 감소와 상승저항 등 터널 효과에서 급격한 상승을 보이는 결과로 제어신호를 왜곡하여 작동기의 동작오류를 초례한다. 본 논문에서는 이러한 프레팅 부식 현상을 검증하기 위한 주석으로 도금된 구리 커넥터에 스텝핑 모터를 사용하여 일정한 변위를 갖는 미세 진동을 유발하여 프레핑 부식의 진행과 접촉저항의 변화를 고찰하여 이에 대한 대비책을 강구하고자 한다.

• 복식
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• 제53권6호
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• pp.117-130
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• 2003

The purpose of this study is to provide the basic data on the development of ready-to-wear clothing for the elderly women as the population of the elderly has been constantly increasing as well as the purchasing power of the aged. The body measurements of 318 elderly women were taken. whose ages were over 60 years and enrolled in colleges for the elderly. sports centers. or business sites in Seoul and the neighboring districts. A total of 39 features in the lower body were used for the anthropometric measurement and analysis. The results of the study are as follows: 1. Indices of height and weight were used for factor analysis. cluster analysis, and discriminant analysis in order to 'classify lower body somatotype according to shape, excluding size factors. From the results of the factor analysis. the 5 factors showed the cumulative sum of square at 75.63%. 2. Somatotype were classified into two types according to a cluster analysis using height and weight dices. Type 1 is the group is relatively tall and has somewhat fat lower limbs. Type 2 is considered fat and has obesity factors around waist and abdomen area. The hit rate for the classified two groups showed the result at 95.9%.

• 한국산학기술학회논문지
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• 제6권2호
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• pp.110-115
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• 2005

표면 경화가 요구되는 소재에 코발트계 합금 분말을 용사 소모재로 하고 플라즈마 트랜스퍼드 아크(PTA) 용사 공정을 이용하여 표면 개질부를 제조하였다. 표면 개질부는 다른 용사 변수는 일정하게 유지한 상태에서 용사 전류만을 변화하여 제조하였다. 용사 전류를 80에서 140 amp까지 20 amp씩 증가하면서 개질층을 제조하였다. 두께가 일정한 모재에 전류를 변화하여 표면 개질층을 제조하는 경우 용사후 모재에서 발생하는 냉각 효과가 다르게 되고 이는 개질층의 폭과 두께 등의 기하학적 형상과 미세 조직, 그리고 미세경도 등의 특성에 영향을 미치는 것으로 나타났다. 용사 전류를 120amp로 사용한 경우 미세조직이 조밀하고 미세경도 값이 가장 높은 값을 나타내는 개질층을 얻을 수 있었다. 전류를 증가함에 따라 개질층의 폭은 증가하지만 높이는 큰 변화가 없는 것으로 나타났다.

• 한국압력기기공학회 논문집
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• 제11권2호
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• pp.68-74
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• 2015

Time domain response analysis for vibro-impact nonlinear behavior of multi-span tube with loose supports was performed using commercial FEA code and user subroutine. Support geometry of multi-span tube with a finite gap is realistically modeled by analytical rigid surface. Model of hydrodynamic force is based on the Qusai-steady model which accounts for the inclined angle of relative flow velocity and time delay between flow force and resulting tube motion. During tube vibration from flow loading, impact and friction at the support location is simulated using commercial FEA code with master slave contact algorithm. Analysis results has reasonable agreement with those of references and test experience. Plan of further refinement of analysis model and future test verification is briefly introduced.