• Tribology and Lubricants
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• v.38 no.4
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• pp.152-161
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• 2022

Chemical mechanical planarization (CMP) is a technology that planarizes the surfaces of semiconductor devices using chemical reaction and mechanical material removal, and it is an essential process in manufacturing highly integrated semiconductors. In the CMP process, a conditioning process using a diamond conditioner is applied to remove by-products generated during processing and ensure the surface roughness of the CMP pad. In previous studies, prediction of pad wear by CMP conditioning has depended on numerical analysis studies based on mathematical simulation. In this study, using an artificial neural network, the ratio of conditioner coverage to the distance between centers in the conditioning system is input, and the average conditioning density, standard deviation, nonuniformity (NU), and conditioning density distribution are trained as targets. The result of training seems to predict the target data well, although the average conditioning density, standard deviation, and NU in the contact area of wafer and pad and all areas of the pad have some errors. In addition, in the case of NU, the prediction calculated from the training results of the average conditioning density and standard deviation can reduce the error of training compared with the results predicted through training. The results of training on the conditioning density profile generally follow the target data well, confirming that the shape of the conditioning density profile can be predicted.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.31 no.1
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• pp.23-29
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• 2018

In knee implants, contact pressure has a significant effect on wear. In this study, finite element analysis is performed using the knee implant model developed in the previous research. The contact pressures for a total of 10 knee implant materials combinations were analyzed using the combinations actually used in research and industry. In order to calculate the contact pressure, The load was applied when the flection angle of knee was $30^{\circ}$, $45^{\circ}$ and $60^{\circ}$. The result of contact pressure revealed the smallest contact pressure in the titanium alloy-UHMWPE combination. In the case of UHMWPE, contact pressure did not change much with any material used in the femur. Compared the combination with the largest contact pressure and the smallest contact pressure, the difference was 0.77%. On the other hand, Carbon / PEEK composites showed 5.3% difference when the contact pressure was the largest and the smallest. It can be seen that when the Carbon / PEEK composite material is used as the bearing part, the material of the femoral part affects the wear. This study will contribute to the prediction of knee implant wear and minimization of wear.

• Transactions of Materials Processing
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• v.12 no.2
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• pp.102-109
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• 2003

In the manufacturing process of metal matrix composites parts, thixoforging is one of the most effective forming processes. The major purpose of the current study is to provide the proper conditions such as the die shape, the forging velocity, the forging time, the forging pressure and reinforcement injection velocity and pressure on various defects in thixoforged cylinder liner, filling tests were performed by MAGMA S/W. In order to evaluate the effectiveness of the calculated conditions which is given by computer aided engineering, A357, A380 and SiC$_{p}$/A380 cylind~5$mu extrm{m}$r liner were fabricated under the calculated conditions. SiC$_{p}$/A380 composite billets were fabricated by both the mechanical stirring and electrical magnetic stirring process. Incase fo SiC$_{p}$/A380 composite cylinder liner, reinforcement distribution and effect of reinforcement(SiC$_{p}$) content(10~20 vol. %)and size(5.5~14${\mu}{\textrm}{m}$) on the mechanical properties were investigatedstigated.

• Journal of Applied Reliability
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• v.11 no.4
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• pp.387-398
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• 2011

$217Plus^{TM}$, a newly developed as a surrogate of the MIL-HDBK-217, may be widely applied for reliability predictions of electronic systems. In this study, we performed sensitivity study of the $217Plus^{TM}$ system model to various parameters. Specific attention was put to logistics model and its behavior has been examined in terms of non-component failure causes. We first briefly explained the $217Plus^{TM}$ methodology with system level failure rate evaluation. We then applied experimental designs with several failure causes as factors. We used an orthogonal array with three levels of each parameter. Our results indicate that cannot duplicate, induced, and wear-out causes have dominant effects on the system failures and design, parts, and system management have much less but a little strong effects. The results in this study not only figure out the behavior of the predicted failure rate as functions of failure causes but provide meaningful guidelines for practical applications.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.4
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• pp.36-43
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• 1998

We experimented turning SCM440, called difficult-to-cut materials in general, using tungsten carbon tool(PIO) in order to elevate machinability by a new cutting method. The cutting tool designed and made to study was cooled to -17$0^{\circ}C$ in about 1 minute by liquid nitrogen. Then, we operated cryogenic cutting by cooling tool with liquid nitrogen and stuided the effect about cutting force, chip thickness, surface roughness, behavior of tool wear and cutting temperature. In addition, we investigated the possibility that sur face roughness of workpiece can be predicted analyzing cutting characteristics.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.836-842
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• 2001

The more sophisticated patterns of propagation model is presented in this paper, which includes three different source characteristics. The spherical, cosine and dipole radiation characteristics compared and sound event level and the maximum sound level are calculated by experiment and calculation. It is shown that patterns of propagation has dipole characteristics for low speed range(below about 150km/h) at electric multiple system. We know that push-pull high speed system(maximum speed: 300km/h) has cosine characteristics of noise propagation. For this purpose, We conduct the experiment of noise and know the empirical formula of noise level and radiation coefficient K. This model of simulation is conducted through point source array model at wheel/rail contact point by using program and experimental formula. We can guess prediction of profile, flat and wear of wheel by above modeling in near field.

• Proceedings of the Korean Reliability Society Conference
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• 2011.06a
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• pp.257-264
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• 2011

In this study, we performed sensitivity study of the $217Plus^{TM}$ system model to various parameters. Specific attention was put to logistics model and its behavior has been examined in terms of non-component failure causes. We first briefly explained the $217Plus^{TM}$ methodology with system level failure rate evaluation. We then applied experimental designs with several failure causes as factors. We used an orthogonal array with three levels of each parameter. Our results indicate that cannot duplicate, induced, and wear-out causes have dominant effects on the system failures and design, parts, and system management have much less but a little strong effects. The results in this study not only figure out the behavior of the predicted failure rate as functions of failure causes but provide meaningful guidelines for practical applications.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.10a
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• pp.251-256
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• 1999

"Ploughing" on the flank face of the tool in the metal cutting process is due to the tool in the metal cutting process is due to the finite edge radius of the tool and due to the development of flank wear. Because of the high stresses near the cutting edge, elastic-plastic deformation would be caused between the tool and the machined surface over a small area of the tool flank. The deformation would affect the roughness of the machined surface. Recently, some attempts have been made to predict the surface roughness, but elastic-plastic effect due to ploughing in the cutting process has not been considered. The research has analyzed mechanism of the ploughing of the cutting process using contact mechanics. Tool and workpiece material properties have been taken into account in the prediction of the surface roughness. The surface roughness has been simulated by the surface-shaping system. The results between experiment and simulation have been compared and analyzed. analyzed.

• Corrosion Science and Technology
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• v.15 no.1
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• pp.6-12
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• 2016

Flow-Accelerated Corrosion (FAC) is a well-known degradation mechanism that attacks the secondary piping in nuclear power plants. Since the Surry Unit 2 event in 1986, most nuclear power plants have implemented management programs to deal with damages in carbon and low-alloy steel piping. Despite the utmost efforts, damage induced by FAC still occurs in power plants around the world. In order to predict FAC wear, some computer programs were developed such as CHECWORKS, CICERO, and COMSY. Various data need to be input to these programs; the chemical composition of secondary piping, flow operating conditions and piping geometries. CHECWORKS, developed by the Electric Power Research Institute (EPRI), uses a geometry code to calculate geometry effects. Such a relatively simple geometry code is limited in acquiring the accuracy of FAC prediction. Recently, EPRI revisited the geometry code with the intention of updating it. In this study, numerical simulations were performed for two adjacent $90^{\circ}$ elbows and the results were analysed in terms of the proximity effect between the two adjacent elbows.

• Proceedings of the KSR Conference
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• 2005.11a
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• pp.152-157
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• 2005

Recently, higher speeds have been promoted in old overhead-lines. For high-speed operation in electric railways, increasing contact loss of the pantograph is one of the most important subjects. The contact loss causes power interruption and increases wear of contact strips and contact wires. In order to investigate the causes of contact loss and to work out effective improvement methods, theoretical analyses, experiments have been carried out. First of all, the wave propagating velocity (phase velocity) and characteristics of contact wire are one of the important indices for the current collecting performance. In this paper, mathematical formula arc derived for the prediction of the traveling wave velocity. The measured values in the experiment agree well with the theoretical predictions.