• Transactions on Electrical and Electronic Materials
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• 제13권3호
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• pp.139-143
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• 2012

Optical emission spectroscopy (OES) is often used for real-time analysis of the plasma processes. OES has been suggested as a primary plasma process monitoring tool. It has the advantage of non-invasive in-situ monitoring capability but selecting the proper wavelengths for the analysis of OES data generally relies on empirically established methods. In this paper, we propose a practical method for the selection of OES wavelength peaks for the analysis of plasma etch process and this is done by investigating reactants and by-product gas species that reside in the plasma etch chamber. Wavelength selection criteria are based on the standard deviation and correlation coefficients. Moreover, chemical actinometry is employed for the normalization of the selected wavelengths. We also present the importance of chemical actinometry of OES data for quantitative analysis of plasma. Then, the suggested OES peak selection method is employed.. This method is used to find out the reason behind abnormal etching of PR erosion during a series of $SiO_2$ etch processes using the same recipe. From the experimental verification, we convinced that OES is not only capable for real-time detection of abnormal plasma process but it is also useful for the analysis of suspicious plasma behavior.

• 한국레이저가공학회지
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• 제2권2호
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• pp.18-26
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• 1999

An innovative real-time weld monitoring technique using chromatic filtering of the thermal radiation from a weld pool is developed. The thermal radiation from the weld pool is focused on an aperture and the transmitted thermal radiation is monitored at two wavelengths with high-speed single-element detectors. Due to the chromatic aberration introduced in the focusing optics, the transmittance curve of thermal radiation varies by the wavelength. Owing to this difference in the transmittance, the local variation of thermal radiation from the weld pool can be monitored by processing the two spectroscopic signals from two detectors. In this paper, the algorithms to monitor the laser power on the weld specimen and the focus shift we investigated and the performances of laser power and focus monitoring are shown for a pulsed Nd:YAG laser welding. The monitoring of the weld pool size variation is also discussed.

• Journal of Advanced Marine Engineering and Technology
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• 제33권8호
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• pp.1220-1225
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• 2009

본 논문에서는 사냑 루프 필터와 광섬유 격자 기반의 파장가변 궤환 레이저를 제안하고 있다. 다중파장을 제공하기 위하여 복굴절을 이용한 사냑 루프를 적용하였고 0.33nm의 인접 채널간격을 가지도록 제작하였다. 광섬유 격자의 열 광학 효과에 의한 파장가변을 유도하기 위하여 니크롬선을 격자위에 감았다. 파장가변과 분리에 대한 특성을 측정하기 위하여 길이가 다른 니크롬선으로 두 종류의 광섬유 격자 소자를 제작하였으며, 열 저항으로 파장가변이 되게 하였다. 광섬유격자의 반사파장이 사냑루프 다중파장의 특정 파장과 일치하면 모드 잠김현상에 의해서 공진하고 발진하게 된다. 공진파장의 이동도는 1.75pm/mW이다. 이 시스템은 전력 시스템의 전력 변동을 모니터링하는 분야에 적용할 수 있다.

• 센서학회지
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• 제26권1호
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• pp.44-49
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• 2017

In this paper, the automatic sweep flattening for wavelength swept laser of SS-OCT has implemented. Through its performance test applied to the laser, 50 nm flat sweeping range, ${\pm}0.5dB$ fluctuation range, 22 sec the time required, and 10 mW average optical power were obtained. This shows that the realized automatic process can replace the inconvenient manual operation used for polarization control of current sweeping laser. Additionally it cuts costs for optical spectrum analyzer necessary to sweep monitoring.

• Journal of Advanced Marine Engineering and Technology
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• 제33권2호
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• pp.330-335
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• 2009

A fiber-optic liquid level sensor based on bending cantilever beam has been proposed. A fiber Bragg grating(FBG) embedded in the cantilever beam is used to sensing elements. The basic concept is elongation and constriction of the FBG corresponding to the liquid level variation. The best FBG position on the cantilever for obtaining the high sensitivity was 4 cm from the fixing point. When the liquid level moves up and down vertically, the Bragg wavelength is linearly shifted. But, the wavelength sensitivity of the FBG installed on the upper side of cantilever was four times better than that of the FBG equipped in the lateral side due to the difference of unit strain applied to the FBG. Intensity demodulation using the low-cost edge filter is used to interrogate the Bragg wavelength through converting the wavelength signals into the optical intensity ones. Experiment results show that the electrical output is exponentially proportional to the liquid level. But, it should be overcome for applying to the ships.

• 한국전기전자재료학회논문지
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• 제22권3호
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• pp.218-221
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• 2009

This paper reports on measurement method for the fiber optic strain monitoring of overhead contact line systems of trains, We used FBG (Fiber Bragg Grating) sensors to measure the strain variation of overhead contact line. FBG sensors can sensitively measure the variation of strain and! or temperature by the shift wavelength of reflected wave according to the lattice variation during the measurement. FBG sensor were attached on the contact line and connected to the monitoring system with optical fibers. The monitering system with FBG sensors showed very good sensitivity to measuring strain variation and this system could be applied to the overhead contact line of KTX (Korea Train eXpress).

• 한국광학회:학술대회논문집
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• 한국광학회 2004년도 하계학술발표회
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• pp.132-133
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• 2004

• Journal of Welding and Joining
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• 제33권4호
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• pp.7-16
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• 2015

New lasers such as high power, high brightness and short wavelength laser are using diverse industry. Also new technologies are developing actively to solve various issues such as spattering, process monitoring, deep penetration and key-hole stability. ICALEO is the international congress where recent technology for laser material processing and laser system are present. At 2014, it was held at San Diego in USA and more than 260 papers were presented from 28 country. The effect of the laser beam shape such as Gaussian like and top-hat was investigated on acoustic emission signal and pore formation in welding. Inline penetration depth was measured with ICI(Inline Coherent Imaging) technique and the data was verified with real time X-ray image on laser welding. The laser welding performance at low pressure environment was evaluated for the thick plate alloy steel. UV laser was used to weld various metals such as Cu, Aluminum, steel and stainless steel. The effect of the wavelength of the laser on the formation of the wave at the wall of the key-hole front and the absorptivity was investigated.

• 조명전기설비학회논문지
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• 제24권2호
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• pp.86-91
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• 2010

광섬유 격자를 이용한 센서 네트워크를 이용하여 준분배형 전력설비 안전진단 시스템을 구성하였다. FBG를 이용한 센서는 한 개의 라인에 복수의 센서가 설치가능하며, 전자기 노이즈에 영향을 받지 않는 특성을 가진다. 광섬유 격자에서 반사되는 파장의 신호를 분석하기 위하여 InGaAs PD 어레이와 홀로그램 회절격자를 이용하여 구조가 간단하면서도 고속의 파장복조가 가능하도록 하였다. 제안한 시스템의 정확도를 개선하기 위해 가우시안 라인피팅을 적용하였고, 높은 파장 정밀도(4[pm])와 동작 안정성을 얻을 수 있음을 확인하였다.

• 한국통신학회논문지
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• 제25권3B호
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• pp.504-509
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• 2000

This paper presents a noble operation and maintenance system for the optical subscriber loops and its feasibility through several experiments. In this system, a broadband CW (Continuous Wave) light source I used as monitoring of testing signals. and a FGF(Fiber Grating Filter) of which reflective wavelength is independent, is inserted somewhere in each subscriber loop for the reflection of monitoring of testing signals. The propose of the system is quick decision. whether the loop is just fault or not. rather than detailed information of loop state. At present, most of operation and maintenance system for the optical subscriber loops adopts OTDR(optical time domain reflectometer) for testing function. the OTDR is useful for detailed test, but not adequate for simple test because of long testing time . And it is difficult to test PON network by using general OTDR that has a single-wavelength light source. Compared to using OTDR, the proposed system can afford to shorten testing time and to test PON network. Moreover, we can cut down the system cost by simplifying circuits of the optical light sources. Our results show that the proposed system operates well according to the purpose mentioned above.