• 마이크로전자및패키징학회지
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• 제24권4호
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• pp.79-84
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• 2017

태양전지와 같은 광전소자의 특성 및 신뢰성 유지하기 위해서는 수분과 산소 등으로 부터 소자 내부가 보호되어야 한다. 본 연구는 여러 연성(flexible) 플라스틱 기판위에 유 무기 복합 보호막을 스프레이코팅 방법으로 형성하여 공정조건(노즐 위치, 박막 두께, 기판 구성)에 따른 소자의 보호특성을 연구하였다. 사용된 복합 보호막 재료로서 PVA (polyvinyl alcohol)와 SA(sodium alginate) 혼합 유기 물질(P.S)에 $Al_2O_3$($P.S+Al_2O_3$)과 $SiO_2$($P.S+SiO_2$) 나노 분말을 혼합하여 유 무기 복합 보호막 용액을 합성하였다. 플라스틱 기판 위에 코팅한 보호막의 두께가 $5{\mu}m$에서 91%의 투과율을 나타내었으며 $78{\mu}m$에서 $178{\mu}m$로 두께가 증가할 경우 광 투과율은 81.6%에서 73.6%으로 감소하였다. 또한 합성한 $P.S+Al_2O_3$ 복합재료를 사용하여 PEN(polyethylene naphthalate), PC(polycarbonate) 단일 플라스틱 기판과 Acrylate film과 PC 이중막(Acrylate film/PC double layer) 구조와 $Al_2O_3$ 무기박막과 PEN 이중막($Al_2O_3$ film/PEN double layer) 구조의 기판 위에 $P.S+Al_2O_3$ 용액을 사용하여 수분투과도(water vapor transmission rate, WVTR)와 표면형상 등을 측정하여 최적의 보호막 구조를 확인하였다. 즉, $Al_2O_3$ film/PEN 이중막 기판위에 형성한 보호막의 수분투과 값은 $0.004gm/m^2-day$로 가장 우수한 내 투습 특성을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.186-186
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• 2015

We have introduced multifunctional ITO single thin films formed by normal sputtering system equipped with a plasma limiter which effectively blocks the bombardment of energetic negative oxygen ions. MFSS ITO also possesses high gas diffusion barrier properties simultaneously low resistivity even it deposited at room temperature without post annealing on plastic substrate. Nano-crystalline enhancement by Ar energy has energy window from 20 to 30 eV under blocking NOI condition. Effect of blocking NOI and optimal Ar energy window enhancement facilitate that resistivity is minimized to $3.61{\times}10^{-4}{\Omega}cm$ and the WVTR of 100 nm thick MFSS ITO is $3.9{\times}10^{-3}g/(m^2day)$ which is measured under environmental conditions of 90% relative humidity and 50oC that corresponds to a value of ${\sim}10^{-5}g/(m^2day)$ at room temperature. The multifunctional MFSS ITO with low resistivity, and low gas permeability will be highly valuable for plastic electronics applications.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.657-659
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• 2008

Barrier coating properties of PVA/$SiO_2$ on the flexible substrates (PEN) have been investigated. Thin layer of PVA/$SiO_2$ organic-inorganic hybrid materials were deposited on PEN substrate by the spin-coating. The optical properties and surface roughness of barrier layer on flexible substrate were characterized by AFM, UV-Vis and WVTR/ OTR.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.617-619
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• 2008

Inorganic-organic hybrid multilayers were formed on the plastic substrate to enhance the barrier properties of substrate to water vapor and oxygen transport. Plasma pretreatment of substrate with $Ar/O_2$ lead to adhesion improvement and the densification of inorganic layer on the substrates. Combination of $SiO_xN_y$ layer and silanenanoclay composite layer offered quite good barrier properties (WVTR and OTR) to PES substrate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.357-358
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• 2011

Dichloro-(2,2)-paracyclophane을 출발 물질로 하여 화학기상증착법(CVD)을 이용해 우수한 투명성과 수분 투과성을 갖는 poly(p-xylylene) 코팅 막을 얻었다. 상기 코팅 막을 얻기 위한 최적의 공정 조건은 Deposition Pressure 0.02~0.04Torr, Vaporization temperature $110{\sim}150^{\circ}C$으로 확인 되었다. 이러한 공정 조건으로 500 mm*500 mm size의 PET bare film을 코팅 기재로 사용하여 $10{\mu}m$, $20{\mu}m$의 parylene 코팅 막을 얻었고 이를 특성 분석해 보았다. 상기 코팅 막은 전체적으로 ${\pm}1{\mu}m$의 thickness uniformity가 관찰 되었고 투과율은 90% 이상을 보였으며 수분 투과율은 기재 대비 상대적으로 40%의 향상이 기대 되었다. 또한 우수한 내식성, 내염기성, 내용제성을 갖고 있었으며 PET 기재에 대해 우수한 부착력을 가지고 있었다. surface morphology는 AFM을 통해 분석하였으며 Ra가 15.123, Rq가 22.859로 측정 되었다.

• 반도체디스플레이기술학회지
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• 제19권1호
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• pp.93-96
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• 2020

Polyimide thin film was prepared by annealing the polyamic acid that was synthesized through co-deposition of diamine and dianhydride. The polyamic acid and polyimide thin film were characterized with FT-IR and HR FE-SEM. The average roughness of the film surface, evaluated with AFM, were 0.385 nm and 0.299 nm after co-deposition, and annealing at 120 ℃ respectively. OLED was passivated with the polyimide layer of 200 nm thickness. While the inorganic passivation layer enhances the WVTR of OLED, the organic passivation layer gives flexibility to the OLED. The in-situ passivation of OLED with organic thin film layer provides the leading technique to develop flexible OLED Display.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.39-43
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• 2022

In this paper, a study was conducted on encapsulation technology for high mechanical stability of flexible displays. First, unlike conventional encapsulation barrier that exclude cracks as much as possible for low water vapor transmission rate (WVTR), mechanical properties were improved by using a defect suppression mechanism introduced with crack arresters. The zero-stress encapsulation barrier optimizes the residual stress of the thin film based to improve the internal mechanical stability. The zero-stress encapsulation barrier was applied to the organic light emitting diodes (OLEDs) to confirm its characteristics and lifetime. Due to improved internal mechanical stability, it has a longer lifetime more than 35% compared to conventional encapsulation technologies. As the zero-stress encapsulation barrier proposed in this study does not require additional deposition process, it is not difficult to apply it. Based on various advantages, it is expected to play an important role in flexible displays.

• Journal of Biosystems Engineering
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• 제41권2호
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• pp.98-107
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• 2016

Purpose: The aim of this study was to find an appropriate polymer film, which could reduce the water condensation for pallet-size modified atmosphere packaging (MAP). Methods: Five different types of films were selected from several commercialized films. Prior to the real food storage test, plastic boxes with wetted plastic balls were used to simulate the high humidity conditions of real food storage. The initial MAP condition was 5% oxygen and 95% nitrogen, and the $O_2$ concentration, the relative humidity and water condensation inside the films were checked on a daily basis. The MAP test for tomatoes was conducted by using the most appropriate film from the five films examined in this study. Results: Every film except Mosspack(R) indicated a similar variation in the $O_2$ concentration over the course of time. The relative humidity near the surfaces of all the films except nylon-6 approached saturation conditions over time. For three kinds of films, namely, low-density polyethylene (LDPE) film, anti-fogging oriented polypropylene (AFOPP) film, and Mosspack(R), the inner surfaces of the films were fully covered with dew after a storage period of a day. Conversely, an area of 4.5% was covered with dew in the case of the poly lactic acid (PLA) film, and there was no dew inside the nylon-6 film. The pallet-size MAP test for tomatoes was conducted by using the nylon-6 film and there was no water condensation inside the nylon-6 film over three weeks of storage. Conclusions: During the pallet scale MAP, water condensation could cause severe fungal infection and wetting of the corrugated box. Hence, it was important to minimize water condensation. This study showed that the MAP films with high WVTR such as nylon-6 and PLA could reduce the water condensation inside the pallet scale MAP.

• 공업화학
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• 제23권2호
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• pp.217-221
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• 2012

에틸렌-아크릴산 공중합체(EAA)를 물에 분산시킨 후, 폴리(비닐 알코올) (PVA) 수용액과 블렌딩하여 내수성 및 차단성이 향상된 필름을 제조하였다. EAA의 함량에 따라 제조된 필름으로 열적-기계적 성질, 접촉각, 수분 투과율, 산소 투과율을 측정하였고 내수성에 대한 평가 실험도 진행하였다. 필름의 인장강도는 $9.16{\sim}11.75\;kg/mm^2$으로 PVA와 큰 차이가 없었으며, 경도의 경우는 EAA 함량에 따라 값이 점점 증가하였다. 유리전이 온도와 용융 온도는 약간 향상되었다. PVA/EAA의 비율이 90/10인 블렌딩 필름의 경우 Swelling 109%, Solubility 0%로 측정되어 PVA에 비하여 내수성이 개선되었음을 확인할 수 있었다. 또한, PVA/EAA의 비율이 90/10인 블렌딩 필름(두께 $2.5\;{\mu}m$)을 PET 필름(두께 $50\;{\mu}m$) 위에 코팅하여 제조된 필름의 수분투과율과 산소 투과율은 각각 $9.1\;g/m^2/day$과 $2.0\;cc/m^2/day$으로 측정되었다.