• 제목/요약/키워드: Vibration frequency

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반도체·디스플레이 장비용 바닥 환경진동허용규제치의 실험적 평가방법 고찰 (A Review of Experimental Evaluation Method to Floor Environment Vibration Criteria for Semiconductor and Display Equipment)

  • 안채헌;최정희;박준순;박민수
    • 반도체디스플레이기술학회지
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    • 제20권1호
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    • pp.25-31
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    • 2021
  • The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

스펙트럼 해석에 의한 자탈형 콤바인의 진동 특성 고찰 (A Study on the Vibration Characteristics of a Head-Feeding Combine by Spectral Analysis)

  • 최중섭
    • Journal of Biosystems Engineering
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    • 제26권1호
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    • pp.11-20
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    • 2001
  • Experiments under the stationary and harvesting condition, were performed in order to investigate the vibration characteristics of a head-feeding combine. 6 degrees of freedom components of acceleration at the location of the center of the gravity, and 3 degrees of freedom components of acceleration at the location of the operator seat were measured independently. The vibration characteristics of the combine were estimated with the power spectral density of the time series data of accelerations. From this research, the following results were obtained. 1. Vibration of a head-feeding combine under the stationary condition(engine, thresher and cutter are driven without harvesting) is mainly influenced by the engine. Further, 1/3, 1/2 (sub-harmonic) frequency components of the engine are observed besides engine driving frequency component(45Hz). 2. Vibration of a head-feeding combine under the harvesting condition is influenced by the engine, threshing unit and driving unit. Namely, some kinds of vibration frequency components in harvesting are observed compared with stationary condition. Further, sub-harmonic frequency components of the engine are observed besides engine driving frequency component as same as stationary condition. From these results, it may be concluded that vibration of a head-feeding combine is characteristics of semi-periodic and nonlinear vibration.

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An Efficient Model to Calculate Axial Natural Vibration Frequency of Power Transformer Winding

  • Li, Kaiqi;Guo, Jian;Liu, Jun;Zhang, Anhong;Yu, Shaojia
    • Journal of Magnetics
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    • 제21권3호
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    • pp.431-436
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    • 2016
  • In the design of transformer winding, natural vibration frequency is an important parameter. This paper presents a 2D model to calculate axial vibration natural frequency of power transformer winding based on the elastic dynamics theory, and according to the elastic support equivalent principle of radial pressboards. The 3D model to calculate natural vibration frequency can be simplified as a 2D one as the support of pressboards on the winding is same. It is verified that results of the 2D model are consistent with those of 3D one, but the former can achieve much higher calculation efficiency. It shows that increasing the width and number of pressboards can improve axial natural frequency through formula analysis and simulation, and also the relations between the changes of axial pre-compression and axial natural vibration frequency on the windings are investigated. Finally, the proposed 2D model's effectiveness is proved when compared with tested ones.

75MW 급 발전용 보일러 관군에서의 음향공진에 의한 진동/소음 사례연구 (A Case Study on the vibration and noise by acoustic resonance in the tube bank of a boiler of 75MW power plant)

  • 김철홍;방경보;주영호;변형현
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2000년도 추계학술대회논문집
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    • pp.150-155
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    • 2000
  • This paper presents phenomena of vibration and noise due to acoustic resonance in tube bank of a power plant. Acoustic resonance is may arise when the vortex shedding frequency coincides with the acoustic natural frequency. At the resonance, the value of vibration in this system was 595 ${\mu}m$, p-p and the sound pressure level was maximum 103 dBA. And the resonance frequency was found to be 35 Hz. When the difference of vortex shedding frequency and acoustic natural frequency is within ${\pm}20%$, acoustic resonance is possible. In this system, the difference of these frequencies was 1.8%. We can evaluate the possibility of acoustic resonance by using damping parameter. We did eliminate acoustic resonance by installing baffle in tube bank. After installing baffle, the level of vibration and noise was reduced dramatically.

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Fundamental vibration frequency prediction of historical masonry bridges

  • Onat, Onur
    • Structural Engineering and Mechanics
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    • 제69권2호
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    • pp.155-162
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    • 2019
  • It is very common to find an empirical formulation in an earthquake design code to calculate fundamental vibration period of a structural system. Fundamental vibration period or frequency is a key parameter to provide adequate information pertinent to dynamic characteristics and performance assessment of a structure. This parameter enables to assess seismic demand of a structure. It is possible to find an empirical formulation related to reinforced concrete structures, masonry towers and slender masonry structures. Calculated natural vibration frequencies suggested by empirical formulation in the literatures has not suits in a high accuracy to the case of rest of the historical masonry bridges due to different construction techniques and wide variety of material properties. For the listed reasons, estimation of fundamental frequency gets harder. This paper aims to present an empirical formulation through Mean Square Error study to find ambient vibration frequency of historical masonry bridges by using a non-linear regression model. For this purpose, a series of data collected from literature especially focused on the finite element models of historical masonry bridges modelled in a full scale to get first global natural frequency, unit weight and elasticity modulus of used dominant material based on homogenization approach, length, height and width of the masonry bridge and main span length were considered to predict natural vibration frequency. An empirical formulation is proposed with 81% accuracy. Also, this study draw attention that this accuracy decreases to 35%, if the modulus of elasticity and unit weight are ignored.

가진주파수 이동현상을 이용한 저주파 가진기의 개발 (Development of a Low Frequency Vibration Shaker Using Force Frequency Shifting)

  • 이건명;;이정수
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2002년도 추계학술대회논문집
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    • pp.182-186
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    • 2002
  • If a sinusoidal excitation force moves back and forth along a structure with a certain frequency, the structure will be excited with the difference frequency of these two frequencies. A low frequency vibration shaker has been developed using this force frequency shifting without actually moving a shaker. The shaker consists of an ordinary eccentric mass shaker, a plate, constant springs, and time varying dampers. The dampers are turned on and off in a sequential manner to simulate a traveling slide of an excitation force. The operation of the shaker is simulated by solving the equations of motion of the shaker. Characteristics of the shaker have been found and they will be utilized to design efficient low frequency shakers.

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Frequency analysis of the tonic vibration reflex of the hand flexor muscles

  • 박희석
    • 대한인간공학회:학술대회논문집
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    • 대한인간공학회 1994년도 춘계학술대회논문집
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    • pp.49-51
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    • 1994
  • The aims of this study were first to determine the influence of vibration displacement amplitude $(200{\mu}m, 300{\mu}m peak-to-peak)$ at selected frequencies (40-200Hz) on a commonly observed but often undesired motor response elicited bylocal vibratory stimulation, the Tonic Vibration Reflex (TVR). Second, to determine the degree of synchronization of motor unit (MU) activity with vibratory stimuli. Vibration was applied to the distal tendons of the hand flexor muscles. Changes in root- mean-square electromyographic (EMG) activity of the finger and wrist flexor muscles were analyzed both as a function of their initial contraction level (0%, 10%, 20% of the maximal voluntarycontraction: MVC) and as a function of the vibration parameters. The results indicate that the TVR increased with the initial muscle contraction up to 10% MVC: The TVR increased with vibration frequency up to 100-150 Hz and decreases beyond; A significant increase of the TVR with vibration displacement amplitude was observed only for the wrist flexor muscle; MU synchronization at vibration frequency (VF) was found more often in the low frequency range $(f{\leq}100 Hz)$ and tended todecrease beyond; In the high frequency range $(f{\geq}120 Hz)$, MU activity at subharmonic frequency was predominant; The "cut-off" frequency of the synchronization with VF was neither affected by the vibration displacement amplitude nor initial muscle contraction level. The surface EMG turned out to be a useful means to analyze MU synchronization since it is noninvasive, and it can be easily used for analysis of different muscle contraction levels, while single MU technique might have some difficulties at high muscle contraction levels. Furthermore, these results indicate that high frequencyvibration (f>150 Hz) tends to induce less muscle/tendon stress and MU synchronization. Such remarks are of importance for the design of hand-held vibrating tools.ing tools.

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Tuned liquid column dampers with adaptive tuning capacity for structural vibration control

  • Shum, K.M.;Xu, Y.L.
    • Structural Engineering and Mechanics
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    • 제20권5호
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    • pp.543-558
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    • 2005
  • The natural frequencies of a long span bridge vary during its construction and it is thus difficult to apply traditional tuned liquid column dampers (TLCD) with a fixed configuration to reduce bridge vibration. The restriction of TLCD imposed by frequency tuning requirement also make it difficult to be applied to structure with either very low or high natural frequency. A semi-active tuned liquid column damper (SATLCD), whose natural frequency can be altered by active control of liquid column pressure, is studied in this paper. The principle of SATLCD with adaptive tuning capacity is first introduced. The analytical models are then developed for lateral vibration of a structure with SATLCD and torsional vibration of a structure with SATLCD, respectively, under either harmonic or white noise excitation. The non-linear damping property of SATLCD is linearized by an equivalent linearization technique. Extensive parametric studies are finally carried out in the frequency domain to find the beneficial parameters by which the maximum vibration reduction can be achieved. The key parameters investigated include the distance from the centre line of SATLCD to the rotational axis of a structure, the ratio of horizontal length to the total length of liquid column, head loss coefficient, and frequency offset ratio. The investigations demonstrate that SATLCD can provide a greater flexibility for its application in practice and achieve a high degree of vibration reduction. The sensitivity of SATLCD to the frequency offset between the damper and structure can be improved by adapting its frequency precisely to the measured structural frequency.

발전용 보일러 후부 전열면 소음진동 저감에 관한 연구 (A Case Study on the Reduction of Noise and Vibration at the Backpass Heat Surface in the Power Plant Boiler)

  • 이경순;이태구;문승재;이재헌
    • 플랜트 저널
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    • 제4권3호
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    • pp.54-59
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    • 2008
  • The resonance of boiler is caused by exciting force in the gas path and it generates the vibration by the harmony of boiler's dimensional factor. According to trending toward the boiler of increasing capacity and a bigger size, it has a problem of the vibration at back-pass heating surfaces. We can predict such vibrations as comparison between vortex frequency and gas column's natural frequency. We can't rely on the method for the past decades because of changing parameters, such as an allowable error, gas temperature, gas velocity, Strouhal number. We can reduce the vibration to use the seasoning effect and change the operating condition in coal fired boiler but it's not essential solution. When the vibration occurred in the model boiler, we must measures the acoustic pressure and frequency of places for considering the means. So far, we confirmed the problem from field measures and theoretical analysis about the acoustic vibration of boiler. We installed anti-acoustic baffle in a existing boiler to change the acoustic natural frequency at the cavity, which results in reducing the acoustic vibration. The first, we prove that the acoustic resonance is caused by harmonizing vortex shedding frequency of tube heat surface with acoustic natural frequency of cavity in the range of 650~750 MW loads. The second, the acoustic resonance at the back-pass heating surface has the third order of acoustic natural frequency at the second economizer. We install five anti-acoustic baffles at the second economizer to reducing the resonance. We confirm considerably reducing the acoustic vibration of boiler during the commercial boiler.

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Experimental Investigation of the Effect of Lead Errors on Helical Gear and Bearing Vibration Transmission Characteristics

  • Park, Chan-Il;Lee, Jang-Moo
    • Journal of Mechanical Science and Technology
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    • 제16권11호
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    • pp.1395-1403
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    • 2002
  • The characteristics of gear meshing vibration undesgo change as the vibration is transmitted from the gear to the housing. Therefore, vibration transmission characteristics of helical gear systems must be understood before the effective methods of reducing gear noise can be found. In this work, using a helical gear with different lead errors, the gear vibration in the rotational direction and the bearing vibration are measured. The frequency characteristics of gear and bearing vibration are investigated and a comparson is also provided.