• Journal of the Korean Society for Precision Engineering
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• v.31 no.8
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• pp.697-703
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• 2014

This paper is study of solving vibration problem occurred in moving hand of wafer transfer robot in semiconductor manufacturing line. Long settling time for decreasing vibration makes low production rate, and moreover the excessive vibration of hand sometimes breaks the wafer in a cassette. The ways of reducing the moving speed and changing the type of motion profile did not help for lessening vibration. Therefore, we analyzed the mechanical property of the hand such as natural frequency, and frequency component of the motion profile currently used in the manufacturing line. In several conditions of motion profile, we found the best condition of which the frequency component in near of natural frequency of the hand is minimal and this induced small vibration in moving hand. The results were verified theoretically and experimentally using frequency analysis.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.337-338
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• 2008

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.10a
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• pp.272-273
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• 2012

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.10a
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• pp.270-271
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• 2012

• Journal of Sensor Science and Technology
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• v.26 no.2
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• pp.107-113
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• 2017

Energy source of a piezo-electric harvester is vibration. Sources of vibration are machineries operated with high frequencies, constructions and people operated with low frequencies and etc. In this study, we tried to figure out power generation properties over vibrations upon angles of a piezo-cantilever for applying them to movements of the construction and/or people, which are vibration sources at low frequencies. A uni-morph cantilever with a $59mm{\times}29mm{\times}0.2mm$ piezo-electric element attached on a $71mm{\times}46mm{\times}0.25mm$ copperplate was used. A spring was attached to the lower side of the cantilever and a mass was attached on the opposite side. Also, a structure with a specific angle which is an angle in between the ground and the cantilever was prepared and then, connected to a spring or the cantilever. Then, this structure was divided into the A-type and B-type and excited in the direction of z- axis. After that, the angle between the ground and the cantilever was changed and excited by 1 to 10 Hz upon the existence of a spring and/or a mass to compare power generation properties.

• Plant Journal
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• v.4 no.3
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• pp.66-72
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• 2008

The vibration of steam turbine is caused by Mass unbalance, Shaft misalignment, Oil whip and rubbing etc. But in turbine which is normally operated and maintained, the Mass unbalance component possesses the greatest portion. Our power plant has two steam turbines in capacity of 200 MW and 135 MW respectively and each turbine is supported by 6 journal bearings. However, we had many difficulties because the vibration amplitude of #3 and #4 Bearings was high during the start-up and operation mode change of steam turbine. But, with this study, we completely solved the vibration problem caused by the mass unbalance of #1 steam turbine. Until a recent date, #3 and #4 bearings which support high pressure turbine for #1 steam turbine had shown about $135{\mu}m$ in vibration amplitude (sometimes it increased to $221{\mu}m$ maximum. alarm: 6 mils, trip: 9 mils) at base load. After applying the study, they decreased to about $45{\mu}m$ maximum. It is a result from that we did not change the setting value of bearing alignment and only changed the assembly position of internal parts in Synchro clutch coupling rachet wheel which links between high pressure turbine and low pressure turbine, and increased the internal gap and machining of the Pawl cage surface. In the operation of steam turbine, if the vibration value increases by 1X, we should reduce the vibration of bearing by weight balancing. However, unless the vibration of bearing is declined by the balancing, we will have to disassemble and check the component and find the cause. In this study, we researched the way to lower mass unbalance that is 1X vibration component which has the greatest portion of vibration generated by steam turbine and we got good result by applying the findings of this study.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.232-235
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• 2008

The vibration of steam turbine is caused by Mass Unbalance, Shaft Misalignment, Oil Whip and Rubbing etc. but in turbine which is normally operated and maintained, the Mass Unbalance component possesses the greatest portion. Our power plant has two steam turbines in capacity of 200MW and 135MW respectively and each turbine is supported by 6 journal bearings. However, we had many difficulties because the vibration amplitude of No 3 and 4 Bearings was high during the start-up and operation mode change of steam turbine. But, with this study, we completely solved the vibration problem caused by the mass unbalance of No 1 steam turbine. Until a recent date, No 3 and 4 bearings which support high pressure turbine for No 1 steam turbine had shown about 135${\mu}$m in vibration amplitude (sometimes it increased to 221${\mu}$m maximum. alarm: 6mils, trip: 9mils) at base load. After applying the study, they decreased to about 40${\mu}$m maximum. It is a result from that we did not change the setting value of Bearing Alignment and only changed the assembly position of internal parts in Synchro Clutch Coupling Rachet Wheel which links between high pressure turbine and low pressure turbine, and increased the internal gap and machining of the Pawl stopper surface. In the operation of steam turbine, if the vibration value increases by 1X, we should reduce the vibration of bearing by weight balancing. However, unless the vibration of bearing is declined by the balancing, we will have to disassemble and check the component and find the cause. In this study, We researched the way to lower mass unbalance that is 1X vibration component which has the greatest portion of vibration generated by steam turbine and We got good result by applying the findings of this study.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 1997.04a
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• pp.177-184
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• 1997

The Component Mode Synthesis Method for the -vibration analysis can be applied to the large-scaled structures, which have difficulty in modeling because of their intricate shapes and boundary conditions and need much time in computational calculations. This paper uses the Component Mode Synthesis Method to analyze the free vibration for the steel box bridge having the large number of D.O.F as an example of the large structural system. By comparing the CMS method to the other method (FEM), this paper proves the accuracy of the solution in techniques and the efficiency in time.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.416-421
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• 2001

It was firstly issued that frequently broken of Encoder installed at travelling motor during RTGC operation. Estimated as broken due to excessive vibration of traveling and motor manufacturer claimed it as resonance of motor base. The principal vibration of Encoder was caused by the rotating vibration component of motor and by traveling wheel. The component transmitted from the wheel didn't have great vibration by the resonance with motor and other parts. Therefore, the plans was tried to add the support point to prevent the Encoder shaft vibrated greatly and inhibit the vibration. These showed good results.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.11 s.104
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• pp.1268-1275
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• 2005

Vibration in Engine module could be reduced by introducing a balance shaft module which has one or more unbalanced rotors. Since the unbalanced rotor is installed in an opposite direction of the free force or unbalance moment by engine component, the unexpected vibration could be decreased kinematically. The essential equation of the unbalanced rotor was Presented for two cases, 3 in-line and 4 in-line cylinder engine type, And the efficiency of the balance shaft is investigated by the vehicle testing that is focused on measuring the reduced vibration level when adapting a balancing module. With the signal processing of measured signals, some important issues on design the balancing shaft could be derived and the overall design process is explained in the final part including the peripheral component, i.e. housing and bush.