• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.6
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• pp.1286-1292
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• 2011

The paper deals with the vibration isolation of a large structure using an experimental technology. In the case of vibration isolation for the vicinity of a subway or a railroad station, most of vibration isolation techniques using isolation materials with high isolation efficiency only, have been applied. Therefore, the quantitative evaluation and design technologies are required for a vibration isolation of large structures. In this study, firstly, vibration characteristics due to train or subway are analyzed. Secondly, the performance of existing vibration isolation materials such as precision isolation material, elastomer is estimated through the experiments. Thirdly, the performance of a tire isolation material and its frame is tested and evaluated. Finally, it is shown that tire isolation materials can be applied to the vibration isolation or vibration reduction of large structures.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.537-542
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• 2006

This paper deals with the vibration isolation techniques for a large structure using experimental research. In the case of vibration isolation for the vicinity of a subway or a railroad station, most of vibration isolation techniques using isolation materials with high isolation efficiency only, have been applied. Therefore, the quantitative evaluation and design technologies are required for a vibration isolation of large structures. In this study, firstly, vibration characteristics due to train or subway are analyzed. Secondly, the performance of existing vibration isolation materials such as precision isolation material, elastomer is estimated through the experiments. Thirdly the performance of tire isolation material and its frame is tested and evaluated.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.41-45
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.329-334
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• 2001

Recently, the high precision technology can not be developed continuously if we don't have anti vibration technology. Vibration isolation technology using an air spring and laminated robber bearing is widely used because it has excellent vibration isolation characteristics. We developed high precision vibration table with two good element(air spring and LRB) for semiconductor factory. Air Spring is used for isolating the vertical vibration and LRB is used for isolating the horizontal Vibration. As a result, It has D-Class degree in BBR-Criteria. In this paper, we talk about orifice characteristics in the self-damped air spring and design flow of the laminated robber bearing. The orifice characteristics is delicate shade of length and diameter. When we do experimentation to find orifice characteristics, length is fixed and diameter is changed. The orifice diameter is the wider and the air spring stiffness is the softer.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.150-153
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• 2006

Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system as analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.176-179
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• 2005

To control the vibration transmitted to the precision instruments from ground has always been of great interest among the researchers. This paper proposes a single axis vibration isolation system which can be used as a module far a table top six axis isolator for highly precise measurement and actuation system. The combined active-passive isolation principle is used for vertical vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in series which consists of very stiff piezo actuator. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator. The active stage is isolated from the payload disturbance through the Passive stage and thus modularity in control is achieved. This made the control algorithm much easier as it does not need to be tuned to specific payload.

• Journal of the Semiconductor & Display Technology
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• v.6 no.4
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• pp.17-22
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation equipments, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, we used Takagi-Sugeno fuzzy method to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.227-232
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• 2003

As the most precision equipment requiring very strict vibration environment are vulnerable to the surrounding vibration condition, they adapt the passive or active vibration isolation system. When it comes to the passive isolation system, the resonance of the isolation system causes excessive resonance response, and finally results in the degrade the equipment performance. This paper deals with the active control method to control this resonance induced response, and includes the experiment on the active control for controlling the resonance response on the table against the excitation of the same frequency with the natural frequency of the isolation system. The electromagnetic actuator was designed and the control effect was verified by the experiment. The experiment showed that the electromagnetic actuator is effective for controlling the low frequency isolation resonance response of the precision equipment.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.10
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• pp.3079-3094
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• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.184-189
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.