• Journal of the Korea Institute of Information and Communication Engineering
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• v.3 no.3
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• pp.661-669
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• 1999

A probe card is one of the most important pan of test systems as testing IC(integrated circuit) chips. This work was related to bump-type silicon vertical probe card which enabled simultaneous tests for multiple semiconductor chips. The probe consists of silicon cantilever with bump tip. In order to obtain optimum size of the cantilever, the dimensions were determined by FEM(finite element method) analysis. The probe was fabricated by RIE(reactive ion etching), isotropic etching, and bulk-micromachining using SDB(silicon direct bonding) wafer. The optimum height of the bump of the probe detemimed by FEM simulation was 30um. The optimum thickness, width, and length of the cantilever were 20 $\mum$, 100 $\mum$,and 400 $\mum$,respectively. Contact resistance of the fabricated probe card measured at contact resistance testing was less than $2\Omega$. It was also confirmed that its life time was more than 20,000 contacts because there was no change of contact resistance after 20,000 contacts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.1023-1027
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• 2000

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.4
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• Journal of the Korean Society of Visualization
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• v.11 no.1
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• pp.34-40
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• 2013

Gas/liquid two-phase ejector is a device without moving parts, in which liquid is used to drive gas of a low-pressure source. In this paper, the hydrodynamic characteristics of a vertical down type two-phase ejector were studied using an air-water loop system. Entrained air flow rates were measured with inlet and outlet pressures of the ejector with varying water flow rate. Homogeneous bubbly flows in the discharge pipe were confirmed by the high speed flow visualization method. Quantitative measurements of void fraction were made using a newly developed fiber optic probe system.

• The Journal of the Society of Korean Medicine Diagnostics
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• v.15 no.2
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• pp.203-214
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• 2011

Objectives: The objective of the current study is to determine whether an ultrasound device system is adequate for measuring distance from the abdominal surface of Sangwan (CV13) to peritoneum in front of anterior surface of liver. Methods: We recruited 3 healthy young male subjects and 2 sonographers. The each sonographer measured vertical shortest distance from the abdominal surface of Sangwan (CV13) to peritoneum in front of anterior surface of liver with a ultrasound device with three methods of 3.5 MHz convex probe and gel, 9 MHz linear probe and gel, and 9 MHz linear probe and solid gel pad, three times in random order. Because the total variation could be divided into repeatability, reproducibility and subject-to-subject variation in Gage R&R method, we compared the sources of variation associated with the measurement system with an analysis of variance model. Results & Conclusions: Number of distinct categories is calculated on the basis of standard deviation of subject-to-subject divided by standard deviation of total Gage R&R. If the number of categories is five or more, the measurement system may be acceptable for the analysis of the process. The number of distinct categories of the ultrasound device system for measuring distance from the abdominal surface of Sangwan (CV13) to peritoneum in front of anterior surface of liver were 9.20 (9 MHz linear probe and gel), 14.70 (9 MHz linear probe and solid gel pad). So we concluded that repeatabilities and reproducibilities of the ultrasound device system for measuring distance from the abdominal surface of Sangwan (CV13) to peritoneum in front of anterior surface of liver with the methods of 9 MHz linear probe and gel, and 9 MHz linear probe and solid gel pad were acceptable.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.8
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• pp.851-856
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• 2012

The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process. A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and $100{\mu}m$(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1~2 gf(Contact Force) and $100{\mu}m$(Over drive).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4121-4128
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• 2010

A probe card is used in testing semiconductor wafers. It must maintain a precise location tolerance for a fine pitch due to highly densified chips. However, high heat transferred from its lower chuck causes thermal deformations of the probe card. Vertical deformation due to the heat will bring contact problems to the pins in the probe card, while horizontal deformation will cause positional inaccuracies. Therefore, probe cards must be designed with proper materials and structures so that the thermal deformations are within allowable tolerances. In this paper, heat transfer analyses under realistic loading conditions are simulated using ANSYS$^{TM}$ finite element analysis program. Thermal deformations are calculated based on steady-state temperature gradients, and an optimal structure of the probe card is proposed by adjusting a set of relevant design parameters so that the deformations are minimized.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.845-852
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• 2012

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.466-469
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• 1995

This paper presents a design and performance of the 6 D.O.F linear motion table with a magnetic bearing suspension. The linear positioning of the table with a 150mm stroke is driven by a brushless DC Linear motor and the other attitudes of the stage are controlled by the analog PD controller with magnetic bearing actuators. Each magnetic bearing unit which consists of 3 electromagnets, 3 capacitance probes and 3 backup bearings affords controlled forces by detecting the air gap between the probes and guideways. An integral type capacitance probe amplifier is equipped on the upper plate of the table so that the probe line to the probe amplifier can be shorter therefore the problems due to the stray capacitance and noise can be reduced. Form the pitch-yaw errormeasured by the autocollimator, the vertical and horizont straightness errors of the table are derived that they are maintained below 1.mu. m over 100mm stroke. The positioning accuracy of the linear motion is maintained below 2 .mu. m and the repeatability error is below 1 .mu. m

• Journal of Welding and Joining
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• v.16 no.3
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• pp.64-73
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• 1998

This paper is concerned with defects detection and evaluation of heat affected zone (HAZ) in austenitic stainless steel type 304 by ultrasonic wave and neural network. In experiment, the reflected ultrasonic defect signals from artificial defects (side hole, vertical hole, notch) of HAZ appears as beam distance of prove-defect, distance of probe-surface, depth of defect-surface on CRT. For defect classification simulation, neural network system was organized using total results of ultrasonic experiment. The organized neural network system was learned with the accuracy of 99%. Also it could be classified with the accuracy of 80% in side hole, and 100% in vertical hole, 90% in notch about ultrasonic pattern recognition. Simulation results of neural network agree fairly well with results of ultrasonic experiment. Thus were think that the constructed system (ultrasonic wave - neural network) in this work is useful for defects dection and classification such as holes and notches in HAZ of austenitic stainless steel 304.