• Title/Summary/Keyword: Vapor injection

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Study on the OLED Thin Film Encapsulation of the Al2O3 Thin Layer Formed by Atomic Layer Deposition Method (원자층 증착방법에 의한 Al2O3 박막의 OLED Thin Film Encapsulation에 관한 연구)

  • Kim, Ki Rak;Cho, Eou Sik;Kwon, Sang Jik
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.1
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    • pp.67-70
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    • 2022
  • In order to prevent water vapor and oxygen permeation in the organic light emitting diodes (OLED), Al2O3 thin-film encapsulation (TFE) technology were investigated. Atomic layer deposition (ALD) method was used for making the Al2O3 TFE layer because it has superior barrier performance with advantages of excellent uniformity over large scales at relatively low deposition temperatures. In this study, the thickness of the Al2O3 layer was varied by controlling the numbers of the unit pulse cycle including Tri Methyl Aluminum(Al(CH3)3) injection, Ar purge, and H2O injection. In this case, several process parameters such as injection pulse times, Ar flow rate, precursor temperature, and substrate temperatures were fixed for analysis of the effect only on the thickness of the Al2O3 layer. As results, at least the thickness of 39 nm was required in order to obtain the minimum WVTR of 9.04 mg/m2day per one Al2O3 layer and a good transmittance of 90.94 % at 550 nm wavelength.

A New Poly-Si TFT Employing Air-Cavities at the Edge of Gate Oxide (게이트 산화막 가장자리에 Air-cavity를 가지는 새로운 구조의 다결정 실리콘 박막 트랜지스터)

  • Lee, Min-Cheol;Jung, Sang-Hoon;Song, In-Hyuk;Han, Min-Koo
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.8
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    • pp.365-370
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    • 2001
  • We have proposed and fabricated a new poly-Si TFT employing air-cavities at the edges of gate oxide in order to reduce the vertical electric field induced near the drain due to low dielectric constant of air. Air-cavity has been successfully fabricated by employing the wet etching of gate oxide and APCVD (Atmospheric pressure chemical vapor deposition) oxide deposition. Our experimental results show that the leakage current of the proposed TFT is considerably reduced by the factor of 10 and threshold voltage shift under high gate bias is also reduced because the carrier injection into gate insulator over the drain depletion region is suppressed.

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Electrical Stress in High Permittivity TiO2 Gate Dielectric MOSFETs

  • Kim, Hyeon-Seag;S. A. Campbell;D. C. Gilmer
    • Electrical & Electronic Materials
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    • v.11 no.10
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    • pp.94-99
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    • 1998
  • Suitable replacement materials for ultrathin SiO2 in deeply scaled MOSFETs such as lattice polarizable films, which have much higherpermittivities than SiO2, have bandgaps of only 3.0 to 4.0 eV. Due to these small bandgaps, the reliability of these films as a gate insulator is a serious concern. Ramped voltage, time dependent dielectric breakdown, and hot carrier effect measurements were done on 190 layers of TiO2 which were deposited through the metal-organic chemical vapor deposition of titanium tetrakis-isopropoxide (TTIP). Measurements of the high and low frequency capacitance indicate that virtually no interface state are created during constant current injection stress. The increase in leakage upon electrical stress suggests that uncharged, near-interface states may be created in the TiO2 film near the SiO2 interfacial layer that allow a tunneling current component at low bias.

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Effects of $HfO_x$ treated indium tin oxide on organic emitting diodes

  • Sohn, Sun-Young;Park, Keun-Hee;Jung, Dong-Geun;Kim, Hyoung-Sub
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.970-972
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    • 2006
  • The surface of ITO in OLEDs was treated with $HfO_x$ deposition process using an atomic layer chemical vapor deposition system. The treatment at room temperature for 5 cycles exhibited significantly improved electroluminescent characteristics compared to the OLEDs without any treatment, which is believed to be caused by the increased holes injection efficiency.

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Corona ion Assisted Nano-Particle Morphology Control in an Atmospheric Pressure Furnace Reactor (대기압 반응로 내 코로나 이온을 이용한 나노입자 형상의 제어)

  • An, Gang-Ho;Yun, Jin-Uk;Kim, Yeong-Won
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.5
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    • pp.710-715
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    • 2002
  • The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the injection of TEOS vapor, irons and reaction gas in a furnace. Ions are generated by corona discharge and these ions charge SiO$_2$particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions. Their morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 to 5.0 kV, it is observed that the melon diameter of SiO$_2$particle decreases from 94 nm to 42 nm.

Dark Conductivity in Semi-Insulating Crystals of CdTe:Sn

  • Makhniy, V.P.;Sklyarchuk, V.M.;Vorobiev, Yu.V.;Horley, P.P.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.2
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    • pp.243-248
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    • 2015
  • We prepared semi-insulating CdTe for radiation detectors by isothermal annealing of single crystals grown by Bridgeman technique in a sealed quartz container filled with Sn vapor. The resistivity of CdTe:Sn samples thus obtained was of order of $10^{10}Ohm{\cdot}cm$ at room temperature with electrons lifetime of $2{\times}10^{-8}$ s, which is appropriate for the applications desired. Analysis of electric transport characteristics depending on temperature, sample thickness and voltage applied revealed the presence of traps with concentration of about $(4-5){\times}10^{12}cm^{-3}$ with the corresponding energy level at 0.8 - 0.9 eV counted from the bottom of conduction band. The conductivity was determined by electron injection from electrodes in space charge limited current mode.

Discussions on the Leak Phenomena of Liquid Butane in the Open Air (액화석유가스(butane)의 대기중 누출현상에 대한 고찰)

  • Yoon, Jae-Kun
    • Journal of the Korean Society of Safety
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    • v.15 no.2
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    • pp.59-62
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    • 2000
  • Almost accidents related with gas have started with the leakage of LPG(Liquefied Petroleum Gas) in the open air. But experimental data of LPG leak jet are difficult to find because the safety of experiment is hard to secure and its phenomenon is not steady but transitional. This study is focused on the phenomena of injection jet of liquid butane to the open air. Simple experiment shows that only liquid butane jet in the open air is possible due to the slow vaporization because of low temperature difference between the liquid and air and low vapor pressure of liquid butane. Comparing with the water, 25~40% more liquid butane flow through the tube under the same pressure difference driving.

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A Study on Performance Characteristics According to the Fuel Conditions for a Fuel Pump in LPG Engine (자동차용 LPG 펌프의 연료조건에 따른 성능특성에 관한 연구)

  • Park, Cheol-Woong;Kim, Chang-Up;Choi, Kyo-Nam
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.32 no.4
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    • pp.266-274
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    • 2008
  • The need for more fuel-efficient and lower-emission vehicles has driven the technical development of alternative fuels such as Liquefied Petroleum Gas(LPG) which is able to meet the limits of better emission levels without many modifications to current engine design. LPG has a high vapor pressure and lower viscosity and surface tension than diesel and gasoline fuels. These different fuel characteristics make it difficult to apply it for the conventional gasoline or diesel fuel pump directly. In this study, experiments are performed to get performance and efficiency of the fuel pump at different condition as temperature, rotating speeds, composition of fuel. The characteristics of fuel pump is affected by cavitation due to the variation of temperature and composition.

Fabrication of White Light Emitting Diode Lamp Designed by Photomasks with Serial-parallel Circuits in Metal Interconnection ($\cdot$병렬 회로로 금속배선된 포토마스크로 설계된 백색LED 조명램프 제조 공정특성 연구)

  • Song, Sang-Ok;Kim, Keun-Joo
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.3 s.12
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    • pp.17-22
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    • 2005
  • LED lamp was designed by the serial-parallel integration of LED chips in metal-interconnection. The 7 $4.5{\times}4.5\;in^{2}$ masks were designed with the contact type of chrome-no mirror?dark. The white epitaxial thin film was grown by metal-organic chemical vapor deposition. The active layers were consisted with the serial order of multi-quantum wells for blue, green and red lights. The fabricated LED chip showed the electroluminescence peaked at 450, 560 and 600 nm. For the current injection of 20 mA, the operating voltage was measured to 4.25 V and the optical emission power was obtained to 0.7 $\mu$W.

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In-Cylinder Phenomena in a Swirl Type GDI Engine (스월형 GDI 엔진의 연소실내 현상 연구)

  • 김기성;박상규
    • Proceedings of the Korean Society of Marine Engineers Conference
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    • 2001.05a
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    • pp.75-90
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    • 2001
  • For the purpose of helping development of a GDI(Gasoline Direct Injection) engine, the in-cylinder phenomena, such as the spray behaviors and fuel distributions, unburned fuel, and flame characteristics were investigated in a single cylinder GDI engine. The GDI engine was equipped with a swirl type electronic injector and SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used for the measurements of the fuel distributions. The effects of the injector specifications, such as the spray cone angle and the offset angle on the fuel distributions and combustion characteristics were investigated. As a result, it was found that the injected fuel spray collided with the bottom of the bowl and moved upward along the exhaust side wall of the piston bowl. This fuel vapor played a important role in the instance of spark ignition. The injector specifications has a great influence on the flame characteristics.

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