Characteristics analysis of ZnO-Si-ZnO multi-layer thin films by pulsed laser deposition (펄스 레이저 증착법에 의해 제작된 ZnO-Si-ZnO 다층 박막의 특성 분석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.07b
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- pp.1057-1059
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- 2002