• 제목/요약/키워드: Vacuum simulation

검색결과 535건 처리시간 0.026초

High rate deposition of poly-si thin films using new magnetron sputtering source

  • Boo, Jin-Hyo;Park, Heon-Kyu;Nam, Kyung-Hoon;Han, Jeon-Geon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.186-186
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    • 2000
  • After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

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전기영동증착법으로 폴리이미드를 코팅한 탄소섬유의 발열 특성 연구 (Heating Characteristics of Carbon Fiber Polyimide-Coated by Electrophoretic Deposition)

  • 정건주;김태유;정승부;김광석
    • 마이크로전자및패키징학회지
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    • 제30권1호
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    • pp.90-94
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    • 2023
  • 금속 발열체는 높은 열손실과 화재 위험성 등의 문제점이 있어 우수한 열전도도와 전기전도도 특성을 갖는 탄소섬유가 대체소재로 각광받고 있다. 그러나 탄소섬유는 약 200℃ 이상에서 산화하여 단선되기 때문에 발열체 적용이 제한적이며, 현재 진공관 형태로 탄소섬유 발열체가 일부 사용되고 있다. 본 연구에서는 진공관을 사용하지 않고 대기 중탄소섬유 산화방지를 위해 전기영동증착법으로 탄소섬유 표면에 내열성이 높은 폴리이미드를 코팅하였으며 인가전압에 따른 코팅 두께와 내열성을 확인하였다. 폴리이미드를 코팅한 탄소섬유 발열체를 직렬 연결하여 만든 히터는 최대 292℃ 까지 안정적인 발열 특성을 보였으며 이는 열전달 시뮬레이션의 발열온도 결과와 유사하였다. 전기영동증착방법으로 코팅한 폴리이미드 층은 200℃ 이상에서 탄소섬유의 산화방지에 효과적이며 발열 안정성을 요구하는 2차전지, 우주항공, 전기자동차 등 다양한 발열 부품에 적용 가능할 것으로 기대된다.

일반 형상의 2차원 영역에서의 멀티스케일 웨이블렛-갤러킨 기법 (Multiscale Wavelet-Galerkin Method in General Two-Dimensional Problems)

  • 김윤영;장강원;김재은
    • 대한기계학회논문집A
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    • 제26권5호
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    • pp.939-951
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    • 2002
  • We propose a new multiscale Galerkin method based on interpolation wavelets for two-dimensional Poisson's and plane elasticity problems. The major contributions of the present work are: 1) full multiresolution numerical analysis is carried out, 2) general boundaries are handled by a fictitious domain method without using a penalty term or the Lagrange multiplier, 3) no special integration rule is necessary unlike in the (bi-)orthogonal wavelet-based methods, and 4) an efficient adaptive scheme is easy to incorporate. Several benchmark-type problems are considered to show the effectiveness and the potentials of the present approach. is 1-2m/s and impact deformation of the electrode depends on the strain rate at that velocity, the dynamic behavior of the sinter-forged Cu-Cr is a key to investigate the impact characteristics of the electrodes. The dynamic response of the material at the high strain rate is obtained from the split Hopkinson pressure bar test using disc-type specimens. Experimental results from both quasi-static and dynamic compressive tests are Interpolated to construct the Johnson-Cook model as the constitutive relation that should be applied to simulation of the dynamic behavior of the electrodes. The impact characteristics of a vacuum interrupter are investigated with computer simulations by changing the value of five parameters such as the initial velocity of a movable electrode, the added mass of a movable electrode, the wipe spring constant, initial offset of a wipe spring and the virtual fixed spring constant.

오스테나이트계 FeMnAlC 경량철강의 용접열영향부 미세조직 변화 및 인장특성에 관한 연구 (An Investigation on the Microstructure Evolution and Tensile Property in the Weld Heat-Affected Zone of Austenitic FeMnAlC Lightweight Steels)

  • 문준오;박성준
    • Journal of Welding and Joining
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    • 제35권1호
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    • pp.9-15
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    • 2017
  • IMicrostructure evolution and tensile property in the weld heat-affected zone (HAZ) of austenitic Fe-30Mn-9Al-0.9C lightweight steels were investigated. Five alloys with different V and Nb content were prepared by vacuum induction melting and hot rolling process. The HAZ samples were simulated by a Gleeble simulator with welding condition of 300kJ/cm heat input and HAZ peak temperatures of $1150^{\circ}C$ and $1250^{\circ}C$. Microstructures of base steels and HAZ samples were observed by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), and their mechanical properties were evaluated by tensile tests. The addition of V and Nb formed fine V and/or Nb-rich carbides, and these carbides increased tensile and yield strength of base steels by grain refinement and precipitation hardening. During thermal cycle for HAZ simulation, the grain growth occurred and the ordered carbide (${\kappa}-carbide$) formed in the HAZs. The yield strength of HAZ samples (HAZ 1) simulated in $1150^{\circ}C$ peak temperature was higher as compared to the base steel due to the formation of ${\kappa}-carbide$, while the yield strength of the HAZ samples (HAZ 2) simulated in $1250^{\circ}C$ decreased as compared to HAZ 1 due to the excessive grain growth.

Polybenzimidazole (PBI) Coated CFRP Composite as a Front Bumper Shield for Hypervelocity Impact Resistance in Low Earth Orbit (LEO) Environment

  • Kumar, Sarath Kumar Sathish;Ankem, Venkat Akhil;Kim, YunHo;Choi, Chunghyeon;Kim, Chun-Gon
    • Composites Research
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    • 제31권3호
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    • pp.83-87
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    • 2018
  • An object in the Low Earth Orbit (LEO) is affected by many environmental conditions unlike earth's surface such as, Atomic oxygen (AO), Ultraviolet Radiation (UV), thermal cycling, High Vacuum and Micrometeoroids and Orbital Debris (MMOD) impacts. The effect of all these parameters have to be carefully considered when designing a space structure, as it could be very critical for a space mission. Polybenzimidazole (PBI) is a high performance thermoplastic polymer that could be a suitable material for space missions because of its excellent resistance to these environmental factors. A thin coating of PBI polymer on the carbon epoxy composite laminate (referred as CFRP) was found to improve the energy absorption capability of the laminate in event of a hypervelocity impact. However, the overall efficiency of the shield also depends on other factors like placement and orientation of the laminates, standoff distances and the number of shielding layers. This paper studies the effectiveness of using a PBI coating on the front bumper in a multi-shock shield design for enhanced hypervelocity impact resistance. A thin PBI coating of 43 micron was observed to improve the shielding efficiency of the CFRP laminate by 22.06% when exposed to LEO environment conditions in a simulation chamber. To study the effectiveness of PBI coating in a hypervelocity impact situation, experiments were conducted on the CFRP and the PBI coated CFRP laminates with projectile velocities between 2.2 to 3.2 km/s. It was observed that the mass loss of the CFRP laminates decreased 7% when coated by a thin layer of PBI. However, the study of mass loss and damage area on a witness plate showed CFRP case to have better shielding efficiency than PBI coated CFRP laminate case. Therefore, it is recommended that PBI coating on the front bumper is not so effective in improving the overall hypervelocity impact resistance of the space structure.

지구관측 소형위성 비행모델의 열제어계 개발 및 성능 검증 (Development and Performance Validation of Thermal Control Subsystem for Earth Observation Small Satellite Flight Model)

  • 장진수;정연황;김병진
    • 한국항공우주학회지
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    • 제36권12호
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    • pp.1222-1228
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    • 2008
  • ㈜쎄트렉아이는 UAE의 EIAST와 함께 2008년 발사를 목표로 SI-200 표준버스시스템을 기반으로 하는 DubaiSat-1 비행모델을 개발하였다. DubaiSat-1 비행모델의 열제어계는 전력 소비의 최소화를 위해 수동 열제어를 기반으로 하되, 주요 부품에는 히터를 이용한 능동 열제어가 이뤄지도록 설계되었다. 또한 열해석 모델을 작성하여 DubaiSat-1의 임무궤도에 대해 열해석을 수행하였으며, 해석 결과를 토대로 모든 구성품이 설계 요구조건을 만족시킬 수 있도록 설계 보정 작업을 진행하였다. 또한 우주환경을 모사한 열진공시험을 수행하여 DubaiSat-1 비행모델의 열제어 성능에 대해 검토하였으며, 시험 결과와 해석 결과의 비교를 통한 열해석 모델의 보정 작업을 완료하였다.

수치해석을 이용한 담수장치용 이젝터의 노즐위치 변화에 따른 이젝터 유동특성 연구 (CFD Analysis on the Flow Characteristics of Ejector According to the Position Changes of Driving Nozzle for F.W.G)

  • 주홍진;정일영;윤상국;곽희열
    • 한국태양에너지학회 논문집
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    • 제31권3호
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    • pp.23-28
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    • 2011
  • In this study, the ejector design was modeled using Fluent 6.3 of FVM(Finite Volume Method) CFD(Computational Fluid Dynamics) techniques to resolve the flow dynamics in the ejector. A vacuum system with the ejector has been widely used because of its simple construction and easy maintenance. Ejector is the main part of the desalination system, of which designs determine the efficiency of system. The effects of the ejector was investigated geometry and the operating conditions in the hydraulic characteristics. The ejector consists mainly of a nozzle, suction chamber, mixing tube (throat), diffuser and draft tube. Liquid is supplied to the ejector nozzle, the fast liquid jet produced by the nozzle entrains and the non condensable gas was sucked into the mixing tube. The multiphase CFD modeling was carried out to determine the hydrodynamic characteristics of seawater-air ejector. Condition of the simulation was varied in entrance mass flow rate (1kg/s, 1.5kg/s, 2kg/s, 2.5kg/s, 3kg/s), and position of driving nozzle was located from the central axis of the suction at -10mm, 0mm, 10mm, 20mm, 30mm.. Asaresult, suction flow velocity has the highest value in central axis of the suction.

2차목에 의한 고고도 모사용 초음속 디퓨져 시동성능 향상 (Improvement of Starting Performance in Supersonic Exhaust Diffuser with Second Throat for High Altitude Simulation)

  • 박성현;박병훈;임지환;윤웅섭
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2008년도 제30회 춘계학술대회논문집
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    • pp.321-327
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    • 2008
  • 초음속 디퓨져를 사용하는 고도모사 장치에서 기존에 연구되었던 일정단면적 형태를 개선해 2차 목 형태 디퓨져의 효과를 고찰하였다. 기 수행 된 일정단면적 디퓨져 정상상태 해석 결과 및 공압시험 데이터를 바탕으로 본 연구의 해석방법을 검증하고, 2차목에 의한 효과를 정량화시키기 위해 노즐전압력과 2차목 면적에 따른 시동성능과 진공챔버압력 변화에 관하여 해석하였다. 일정단면적 디퓨져 내부 벽면 및 중심축을 따른 압력데이터 비교에서 일치하는 거동을 확인했으며, 2차목의 사용에 의해 시동을 위한 노즐 전압력이 현저히 낮아짐을 알 수 있었다. 저팽창비 노즐 사용으로 인하여 2차목에 의한 진공챔버 내 압력 변화는 거의 없음을 관찰하였다.

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Triode magnetron sputtering system의 제작 및 특성평가 (Characteristic evaluations and production of triode magnetron sputtering system)

  • 김현후;이무영;김광태;윤상현;유환구;김종민;박철현;임기조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.787-790
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    • 2003
  • A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

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모바일 컴퓨팅 환경에서 협업추천 모형을 이용한 캐시 적재 기법 (A Cache Hoarding Method Using Collaborative Filtering in Mobile Computing Environments)

  • 전성해;정성원;오경환
    • 한국지능시스템학회논문지
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    • 제14권6호
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    • pp.687-692
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    • 2004
  • 본 논문은 낮은 대역폭, 장시간의 지연, 그리고 잦은 네트워크 단절로 인한 정보 서비스 공백에 대한 모바일 컴퓨팅 환경의 문제점들을 해결하기 위하여 협업추천 모형에 의한 효과적인 캐시 적재 기법을 제안하였다. 효과적인 캐시 적재가 모바일 클라이언트의 이러한 문제점들을 해결하기 위한 적절한 방법이 된다는 기존의 연구는 많이 진행되어 왔다. 하지만 모바일 컴퓨터의 요구에 대한 이력 정보만을 이용한 기존의 연구는 모바일 클라이언트가 필요로 하는 모든 정보 요구를 만족하지 못하였다. 특히 저장 공간의 제약을 갖는 모바일 컴퓨터의 한계 때문에 더욱 큰 어려움을 갖게 되었다. 본 연구에서는 모바일 클라이언트의 이력 정보에 대하여 협업추천 모형을 적용한 캐시 적재 기법을 제안하여 적은 캐시 용량만으로도 모바일 클라이언트의 정보 요구를 만족하는 아이템들을 서비스할 수 있도록 하였다. SAS E-Miner를 이용하여 모의실험 데이터를 생성하여, 제안 모형의 성능 평가를 위한 실험을 수행하였다. Cache hit ratio를 이용한 객관적인 성능 평가를 통하여 제안된 모형의 성능을 확인하였다.