• Title/Summary/Keyword: Vacuum exhaust

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Optimal Design of an Exhaust System of a Vacuum-Compatible Air Bearing (진공용 공기베어링 배기시스템의 최적설계)

  • Khim, Gyung-Ho;Park, Chun-Hong;Lee, Hu-Sang;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.6
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    • pp.86-95
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    • 2007
  • This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

Performance Analysis of a Vacuum-Compatible Air Bearing (진공용 공기베어링의 성능해석)

  • Khim, Gyung-Ho;Park, Chun-Hong;Lee, Hu-Sang;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.10
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    • pp.103-112
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    • 2006
  • This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

A Study on Cooling of Piezoelectric Element of Multifunction Equipment for Vacuum Exhaust and Ultrasonic Joining (진공 배기 및 초음파 접합 복합기 진동자 냉각에 관한 연구)

  • Park, Sang-Jun;Lee, Young-Lim
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.13 no.4
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    • pp.1511-1517
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    • 2012
  • Vacuum chamber or vacuum tube for the exhaust process of vacuum glazing is presently used, where excessive time and expenses are required to make the whole vacuum chamber or tube vacuum. To solve this problem, multifunction equipment for vacuum exhaust and ultrasonic joining at atmospheric pressure has been developed, in which a piezoelectric vibrator experiences excessive temperature rise resulting in optimizing the cooling of the equipment. Therefore, in this study, cooling effects of natural convection and forced convection methods were identified by numerical analysis and experiments, and cooling performance of the multifunction equipment was optimized.

HIGH TEMPERATURE DEFORMATION BEHAVIOR OF AUSTENITIC STAINLESS STEELS FOR EXHAUST MANIFOLD (Exhaust Manifold 용 오스테나이트계 스테인리스 강의 고온 변형특성)

  • Lee, K.D.;Ha, T.K.;Jeong, H.T.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.314-317
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    • 2007
  • Domestic automobile industries have been focusing their effort on development of exhaust manifolds using high temperature stainless steel. Exhaust manifolds fabricated with stainless steels can be categorized into tubular and cast ones. The former is usually manufactured by forming and welding process and the latter by vacuum casting process. In the present study, high temperature mechanical properties of 5 austenitic stainless steels, one was sand cast and the others vacuum cast, were investigated by performing a series of high temperature tensile tests and high temperature low cycle fatigue tests.

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The Stream and Exhaust Gas Characteristics for Variation of Exhaust Gas Temperature of Marine Incinerator Ejector (선박용 소각로 이젝터의 배출온도 변화에 따른 유동과 배기특성)

  • 김태한
    • Journal of Ocean Engineering and Technology
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    • v.14 no.2
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    • pp.60-64
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    • 2000
  • An experimental study was performed to investigate the optimal ejector and operating condition of vessel incinerator. Exhaust gas temperature and secondary air which makes vacuum pressure at ejector throat regions were considered as an important factor. According to the measurement of pressure temperature and nitrogen oxides between non combustion and combustion we found the stream and exhaust gas characteristics of incinerator. This results can give us the exhaust gas temperature control system air pollutant reduction method and the optimum ejector design.

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Simulation of Conductance Effects on Vacuum Characteristics of High Vacuum System for Semiconductor Processing (반도체공정 고진공시스템 진공특성에 대한 배기도관 컨덕턴스 영향 전산모사)

  • Kim, Hyung-Taek;Seo, Man-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.4
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    • pp.287-292
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    • 2010
  • Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

Investigation of Characteristics of Second Throat Exhaust Diffuser for Simulating High-Altitude of Liquid Rocket Engine According to Design Parameter (액체로켓엔진 고고도 모사용 2차목 초음속 디퓨져 설계변수에 따른 특성 고찰)

  • Moon, Yoon-Wan;Lee, Eun-Seok
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2011.11a
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    • pp.970-972
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    • 2011
  • The vacuum chamber pressure was investigated according to the second throat exhaust diffuser entrance diameter. The sizes of diffuser entrance were changed three cases, and each case was computed by using CFD. Also in order to relatively compare the vacuum chamber pressure the Euler equation was adopted. According to the results, as the size of diffuser entrance was increased it was observed that the vacuum chamber pressure was decreased.

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Characterization of High Temperature Mechanical Properties of Cast Stainless Steels for Exhaust Manifold (배기다기관용 주강소재의 고온특성 평가)

  • Lee, Kyu-Dong;Ha, Tae-Kwon;Jung, Jae-Young
    • Transactions of Materials Processing
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    • v.18 no.3
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    • pp.217-222
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    • 2009
  • Automobile industries have been focusing their efforts on the development of exhaust manifolds using high temperature stainless steels. Exhaust manifolds fabricated with stainless steels can be categorized into tubular and cast ones. The former is usually manufactured by forming and welding process and the latter by vacuum casting process. In the present study, high temperature mechanical properties of 5 austenitic and 4 ferritic stainless steels were investigated by performing a series of high temperature tensile and low cycle fatigue tests. One of the austenitic stainless steels was vacuum cast and the others sand cast. Fatigue life of ferritic stainless steels was higher than that of austenitic ones.

Study on Design- and Operating- Parameters of Supersonic Exhaust Diffusers Simulating high Altitude (고고도 모사용 초음속 디퓨져의 설계인자 및 작동인자에 대한 연구)

  • Yoon, Sang-Kyu;Kim, Jin-Kon;Sung, Hong-Gye;Kim, Yong-Wook;Oh, Seung-Hyup
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2007.04a
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    • pp.303-306
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    • 2007
  • A engineering analysis has been conducted to study operating characteristics of a supersonic exhaust diffuser simulating high altitude atmosphere from a flow-developing point of view. Emphasis is placed in the detail flow structure resulting from several design- and operating- parameters of the diffuser such as the area ratios of a exhaust nozzle to the diffuser, the vacuum chamber size, and jet pressure.

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Numerical simulation on starting transients in supersonic exhaust diffuser; evolution of internal shock structures with different initial cell pressures (초음속 디퓨져 시동 과정에 관한 수치 모사; 초기 진공도에 따른 디퓨져 내부 충격파 구조의 발달 과정)

  • Park Byung-Hoon;Lim Ji-Hwan;Yoon Woong-Sup
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2005.11a
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    • pp.46-55
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    • 2005
  • For the sea-level performance test of rocket motor designed to operate in the upper atmosphere, ejectors with no induced secondary flow are generally used, which serves dual purposes of evacuating the test cell and performing as a supersonic exhaust diffuser (SED). The main concern of this research is to simulate starting transients in order to visualize evolution of internal shock structures in SED with different initial cell (vacuum chamber) pressures. RANS code with low Reynolds $k-\varepsilon$ turbulence model was employed for these computations. Numerical results were compared with the pressure measurements previously performed [Proceedings of 2004 Annual Conference, KIMST], and showed good agreements with pressure-time history of measured data. In the case of low vacuum chamber pressure, abrupt impingement of the under-expanded supersonic jet from the nozzle onto the diffuser wall was observed, whereas initial impingement point was located downstream and moved slowly upstream in the case of non-vacuum chamber pressure. In spite of initially dissimilar evolution of shock structures, iso-mach contour revealed that the steady shock structures had little difference except the location of flow separation and normal shock.

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