• Title/Summary/Keyword: Vacuum condition

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Development of Thin-Film Type Strain Gauges for High-Temperature Applications (고온용 박막형 스트레인 게이지 개발)

  • Choi, Sung-Kyu;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1596-1598
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    • 2002
  • This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-($4{\sim}16%$)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vacuum furnace range $500{\sim}1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, ${\rho}$=768.93 ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR = -84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF = 4.12.

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Fabrication of Ultra-smooth 10 nm Silver Films without Wetting Layer

  • Devaraj, Vasanthan;Lee, Jongmin;Baek, Jongseo;Lee, Donghan
    • Applied Science and Convergence Technology
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    • v.25 no.2
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    • pp.32-35
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    • 2016
  • Using conventional deposition techniques, we demonstrate a method to fabricate ultra-smooth 10 nm silver films without using a wetting layer or co-depositing another material. The argon working pressure plays a crucial role in achieving an excellent surface flatness for silver films deposited by DC magnetron sputtering on an InP substrate. The formation of ultra-smooth silver thin films is very sensitive to the argon pressure. At the optimum deposition condition, a uniform silver film with an rms surface roughness of 0.81 nm has been achieved.

Analytic and Numerical Study for air Bubble Defect of UV-NIL Process (UV-NIL 공정의 기포 결함에 대한 해석적 및 수치적 연구)

  • Seok, Jeong-Min;Kim, Nam-Woong
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.21 no.3
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    • pp.473-478
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    • 2012
  • In this paper, the air bubble formation mechanism in the rectangular and triangular line-and-space pattern during dispensing UV Nanoimprint Lithography (UV-NIL) at an atmospheric condition is studied. To investigate the air bubble formation, an analytic model based on geometric approach and a numerical model based on CFD(computational fluid dynamics) were used in the analysis. It was found in the numerical analysis that every time the flow front passed through a corner of the pattern, it proceeded with a newly formed shape, occurring due to interface reconfiguration, since the flow fronts were formed such that they minimized the surface energy. Moreover, the conditions for the air bubble formation were investigated by applying the analytic analysis based on geometric approach and the numerical analysis. Good overall agreement was found between the analytic and numerical analysis.

Numerical Analysis of the Incident Ion Energy and Angle Distribution in the DC Magnetron Sputtering for the Variation of Gas Pressure

  • Hur, Min Young;Oh, Sehun;Kim, Ho Jun;Lee, Hae June
    • Applied Science and Convergence Technology
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    • v.27 no.2
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    • pp.26-29
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    • 2018
  • The ion energy and angle distributions (IEADs) in the DC magnetron sputtering systems are investigated for the variation of gas pressure using particle-in-cell simulation. Even for the condition of collisionless ion sheath at low pressure, it is possible to change the IEAD significantly with the change of gas pressure. The bombarding ions to the target with low energy and large incident angle are observed at low pressure when the sheath voltage drop is low. It is because the electron transport is hindered by the magnetic field at low pressure because of few collisions per electron gyromotion while the ions are not magnetized. Therefore, the space charge effect is the most dominant factor for the determination of IEADs in low-pressure magnetron sputtering discharges.

Optical Characterization of Cubic and Pseudo-cubic Phase Perovskite Single Crystals Depending on Laser Irradiation Time

  • Byun, Hye Ryung;Jeong, Mun Seok
    • Applied Science and Convergence Technology
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    • v.27 no.2
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    • pp.42-45
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    • 2018
  • Photovoltaic and optoelectronic devices based on hybrid metal halide perovskites ($MAPbX_3$; $MA=CH_3NH_3{^+}$, $X=Cl^-$, $Br^-$, or $I^-$) are rapidly improving in power conversion efficiency. Also, during recent years, perovskite single crystals have emerged as promising materials for high-efficiency photovoltaic and optoelectronic devices because of their low defect density. Here we show that the light soaking effect of mixed halide perovskite ($MAPbBr_{3-x}I_x$) single crystals can be explained using photoluminescence, time-resolved photoluminescence, and Raman scattering measurements. Unlike Br-based single crystal, Br/I mixed single crystal show a strong light soaking effect under laser irradiation condition that was related to the existence of multiple phases.

The Heat Treatment Characterization of Plasma Sprayed Alumina Coatings (플라즈마 용사법에 의한 $Al_2$O$_3$ 피복층의 열처리효과에 관한 연구)

  • 오익현;김한산;김수식
    • Journal of Surface Science and Engineering
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    • v.27 no.3
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    • pp.134-142
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    • 1994
  • $Al_2O_3$coatings on mild steel substrate by plasma spray process were produced to evaluate microstructural characterization and mechanical properties. As-coated $Al_2O_3$coating samplessd were subjected to two heat treat-ment conditions : ⅰ) annealing under vacuum circumstance, ⅱ) hot press treated condition. The two heat treat-ed coatings were investigated in terms of microhardness, adhesion strength, wear resistance, porosity forma-tion, and microstructures. In the case of the coatings which were subject to preparation step ⅰ, the porosity in the coating was decreased with the increase of temperature ($700^{\circ}C$-$1100^{\circ}C$), and the wear resistance, microhardnesss and adhesion strength were increased with the increase of temperature. On the other hand, in the case of the coatings which were subject to preparation step ⅱ, wear resistance and adhesion strength were improved with the increase of temperature and pressure. Experimental measurements of coatings which were produced by both preparation conditions were enhanced compare to those of as-coated coatings.

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Effect of Spraying Conditions in Flame Spraying of Ni-Cr Base Self Fluxing Alloy on Mild Steel (가스용사에 의한 Ni-Cr 기 자용성합금 용사 의 특성에 미치는 용사조건의 영향)

  • 배종규;박경채;정인상
    • Journal of Surface Science and Engineering
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    • v.22 no.1
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    • pp.26-42
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    • 1989
  • It has between investigated that the optimum spaying conditions, such as, spraying distance, fusing temperature and fusing time, ect, in a Ni-cr base self fluxing alloy sprayed on the mild steel substrate by oxygen-acetylenc flame spraying. Sprayed specimens on various conditions were fuused in a vacuum furnace and the results were as follows. The optimum spraying condition for excellent coating layer are obtained under spraying distances, fusing temperature and fusing and time ; 180~240mm,1050~110$0^{\circ}C$and 15~30min, respectively. The adhesive strength and surface hurface hardness of the as sprayed specimens were very low by mechanical bonding becaus of the diffusion layer during process. The carbides and borides and formed in the sprayed coating layer and densification of the layer was resulted from the elimination of pores and oxides. The hardness of sprayed coating layer, particularly in the high temperature, was superior to ordinary tool steels.

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Fabrication and Gas-Sensing Characteristics of $NO_x$ Sensors using $WO_3$ Thin Films ($WO_3$ 박막을 이용한 $NO_x$ 센서의 제조 및 가스감도 특성)

  • 유광수;김태송;정형진
    • Journal of the Korean Ceramic Society
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    • v.32 no.12
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    • pp.1369-1376
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    • 1995
  • The WO3 thin-film NOx sensor which is of practical use and includes the heater and the temperature sensor was fabricated. The WO3 thin films as a gas-sensing layer was deposited at ambient temperature in a high-vacuum resistance heated evaporator. The highest sensitivity of the WO3 thin-film sensor to NOx was obtained under the condition of the annealing temperature of 50$0^{\circ}C$ and the operating temperature of 30$0^{\circ}C$. The gas sensing characteristics of this sensor was excellent, i.e. high sensitivity (Rgas/Rair in 3 ppm NO2=53) and fast response time (4 seconds).

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STUDIES FOR THE CHARACTER OF THE POROUS SILICA CONTAINING THE NANO-SIZED TIO$_2$, PARTICLE IN THE PORE.

  • Jhun, Hyun-pyo;Kong, Woo-sik;Lee, Kyoung-chul
    • Journal of the Society of Cosmetic Scientists of Korea
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    • v.24 no.3
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    • pp.59-64
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    • 1998
  • In order to lower porosity of the porous silica, titanium alkoxide solution was filled in the pore of silica in the heating-vacuum condition. The specific surface area of modified samples was decreased effectively from 900 m$^2$/g to 100 m$^2$/g. (The aggregation phenomena in modified samples were improved fairly.) Samples were heated at 600 , and then the titanium alkoxide in the pore was decomposed completely to titanium oxide from TGA-DTA measurement. From SEM result, it was evident that titanium oxide did not coat the surface of the silica. The modified samples were analyzed using SEM, DTA-TGA, BET, and UV-visible spectrometer.

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A Study on The Surface Roughness Of Metal Workpieces Machined by Ion Sputtering (이온 스파터 가공에 의하 금속표면의 표면거칠기에 관한 연구)

  • 한응교;노병옥;박재민
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.3
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    • pp.747-754
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    • 1990
  • Since Ion sputter machining can perform removing processing in atom or molecule units in vacuum state, it has the merit that high precision processing is possible. In this study, therefore, the effect of incidence ion beam is certified to processing amount and surface roughness when longtimed processing is applied. As a result, processing amount is made almost constant with time and the best processing condition is achieved when the incidencial angle of ion is 55.deg.. In addition, processing time for the good surface roughness is different respectively to the quality of material and longtimed processing has some defect for achieving good surface roughness.