• 유체기계공업학회:학술대회논문집
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• 2006.08a
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• pp.249-252
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• 2006

We conducted the experiment to analyze characteristics of micro-nozzle using different cold gas under two different nozzle expansion ratios in low vacuum condition. We measured thrust and chamber pressure and mass flow rate under low vacuum condition, and then compared them with those in ambient pressure.

• Journal of the Korean Vacuum Society
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• v.2 no.1
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• pp.1-8
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• 1993

당 연구실에서 개발 제작된 동적교정방법을 이용한 고진공표준기를 사용하여 10-6∼10-3torr 영역에서 가장 널리 쓰이는 spinning rotor gauge와 열음극전리 진공게이지들의 특성을 상품화되어 사용되는 방법대로 측정하여 조사하여 보았다. 게이지들의 직선성, 단기간(15일)에 행해진 반복측정에서의 scattering을 조사하였고 또한 N2, CO, He, H2, O2, Ar 가스에 대한 감도와 압력을 올릴 때와 내릴 때의 hysteresis를 조사하였다.

• Vacuum Magazine
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• v.1 no.3
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• pp.9-13
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• 2014

Vacuum growth of thin films via chemical vapor deposition (CVD) methods has been extensively used in modern semiconductor and flat panel display industries. The CVD processes have a wide range of variation and are categorized according to their working conditions, power sources, precursor materials, and so forth. Basic components and process steps common to all CVD branches are discussed. In addition, characteristics and applications of two major CVD techniques - LPCVD and PECVD - are reviewed briefly.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2769-2774
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• 2007

In vacuum ejector-diffuser systems where a finite volume secondary chamber is used, the secondary jet exhibits transient characteristics during start-up. A steady state is achieved after some time in which mass entrainment prevails indefinitely inside the ejector, though there is no flow from the secondary chamber. An attempt is made in this work to study the infinite entrainment of secondary jet into the primary jet from a finite secondary chamber, with the help of a computational fluid dynamics method. The present study is also intended to identify the operating range of vacuum ejector-diffuser systems where the steady flow assumption can be applied without uncertainty. The results obtained show that the only condition in which an infinite mass entrainment is possible is the generation of a re-circulation zone near the primary nozzle exit. The flow in the secondary chamber attains a state of dynamic equilibrium at this point. Steady flow assumption is valid only after this point.

• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.672-674
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• 2001

Axial magnetic field(AMF) type electrode can increase the interrupting capability of vacuum interrupters. But, this interrupting capability vary with design parameters such as shape of electrode, slits of contact, material of contact and so on. In this paper, shown arc characteristics of unipolar axial magnetic field type electrode for vacuum interrupter by design parameters such as shape of contact slits and diameter of contact. And, confirmed vacuum arc configuration by individual design parameter using high speed camera.

• Journal of Power System Engineering
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• v.5 no.1
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• pp.44-49
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• 2001

Low temperature vacuum drying technique shows very excellent energy efficiency and prominent drying performances compared with the conventional hot air drying technique. This study was focused on the thermal characteristics of the low temperature vacuum drying technique. From the results of this study, it was confirmed that the time consumption for drying with the new drying technique could be shortened to about 1/3 of the time consumption with the conventional hot air drying technique under the same drying conditions for wet products. Also, the maximum drying rate with the new drying technique reached to about $0.35kg/m^2h$ at about 400% of moisture content.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.11
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• pp.1359-1367
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• 2004

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1996.04b
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• pp.145-152
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• 1996

This paper deals with an experimental study on the f~iction torque characteristics of magnctic fluid seals for various oil temperatures, rotating speeds, and vacuum pressures. The friction torque of MFS was measured by high response torque meter. The experimental results show that, as the rotating speed increases, the fi'iction torque of MFS increases and as the oil temperature increases, the friction torque of MFS decreases. Also, the experimental results show that the friction torque of Model II is 1.73 ~ 2.56, 2.0 ~ 2.89, 2.0 - 3.25 times larger than those of Model I under the atmospheric pressure, vacuum pressure(10$^{-4}$ and 10$^{-6}$ torr), respectively.

• Tribology and Lubricants
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• v.13 no.2
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• pp.105-111
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• 1997

This paper deals with an experimental study on the friction torque characteristics of magnetic fluid seals for various oil temperatures, rotating speeds, and vacuum pressures. The friction torque of MFS was measured by high response torque meter. The experimental results show that, as the rotating speed increases, the friction torque of MFS increases and as the oil temperature increases, the friction torque of MFS decreases. Also, the experimental results show that the friction torque of Model-II is 1.73~2.56, 2.0~2.89, 2.0~3.25 times higher than those of Model-I under the atmospheric pressure, vacuum pressure ($10^{-4} and 10^{-6}$ torr), respectively.

• Journal of the Korean Vacuum Society
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• v.3 no.1
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• pp.71-76
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• 1994

The electrical characteristics of the capacitor dielectric films of amorphous silicon-nit-ride-oxide(ANO) structures are compared with the capacitor dielectric films of oxide-nitride-oxide (ONO) structrues The electrical characteristics of ONO and ANO films were evaluated by high frequency(1 MHz) C-V high frequency C-V after constant voltage stree I-V TDDB and refresh time measurements. ANO films shows good electrical characteristics such as higher total charge to breakdown storage capacitance and longer refresh time than ONO films. Also it makes little difference that leakage current and flat band voltage shyift(ΔVfb)of ANO ana ONO films.