• 한국진공학회지
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• 제18권6호
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• pp.411-417
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• 2009

차세대 반도체 및 디스플레이 산업용 드라이펌프의 배기속도를 평가하기 위해 최소부피 22 L 급의 정적형 유량계를 설계/제작 하였다. 정적형 유량계의 기본 평가항목인 base pressure와 leak rate 측정결과 각각 $6{\times}10^{-8}\;mbar$ 와 $1.5{\times}10^{-6}\;mbar-L/s$로 측정되었고 throughput limit의 경우 기존 875 L 급보다 1 order 낮은 $1{\times}10^{-3}\;mbar-L/s$ 영역까지 확대되었음이 확인되었다. 구축된 시스템을 이용해 배기용량이 적은 최신 공정 드라이 펌프까지도 배기속도 값을 정확히 측정할 수 있으며, 구축비용이 높은 정압형 유량계를 어느 정도 대체할 수 있을 것으로 기대하고 있다.

• Applied Science and Convergence Technology
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• 제24권4호
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• 한국산업융합학회 논문집
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• 제21권1호
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• pp.1-8
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• 2018

The purpose of this study is to develop a high-strength, high-toughness, thin-walled aluminum shock absorber housing product by applying a high vacuum die casting method to improve internal gas defect and formability. The analysis program dedicated for the casting was used because it was too costly and time-consuming to adopt the gating system design. The final casting plan was designed based on the flow pattern of the material filled into the mold and the result of air pressure and air pocket after the material was completely filled in the mold. Gaty shape was designed as a split type. The runner was designed to have the same shape as the initial inlet curve of the cavity, and the flow of the molten metal was prevented from turbulent flow. The most favorable results were obtained when the injection speed was $V_2=4.0m/s$. Defects on pores were reduced by applying high vacuum level inside the mold.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 B
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• pp.672-674
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• 2001

Axial magnetic field(AMF) type electrode can increase the interrupting capability of vacuum interrupters. But, this interrupting capability vary with design parameters such as shape of electrode, slits of contact, material of contact and so on. In this paper, shown arc characteristics of unipolar axial magnetic field type electrode for vacuum interrupter by design parameters such as shape of contact slits and diameter of contact. And, confirmed vacuum arc configuration by individual design parameter using high speed camera.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.373-375
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• 2008

In this paper the arc behavior in spiral type vacuum interrupter was analyzed by observing taken photographs from high-speed digital camera(10000frame/second) and current-voltage waveform from oscilloscope. As a result, the influence of twisting angle between contacts on arc behavior could be analyzed by matching and comparing arc voltage and photographs simultaneously.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2002년도 학술대회지
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• pp.733-736
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• 2002

The inside configuration of intake nozzle of vacuum cleaner greatly affects the dust-collection efficiency and acoustic-noise effect generated from flow separation Interaction between high-speed flow and internal structure. In order to improve the performance of the vacuum cleaner, flow fields inside the intake nozzles were investigated using flow visualization and FIV (Particle Image Vetocimetry) technique. The measurement to aerodynamic power, suction efficiency and noise level were also carried out. Valuable information was obtained from the experiments, revealing how to modify the intake nozzle. In this paper, the results of visualization, velocity distribution of flow fields, aerodynamic power, suction efficiency and noise level are discussed.

• 펄프종이기술
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• 제31권1호
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• pp.52-60
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• 1999

Drainage rate in wet-end, which has significant influences on the production capacity, product quality and process economics in papermaking, becomes an important factor in the modern high speed papermaking processes owing to increased level of fines contained in today's pulp materials and increased papermaking system closure. A study was carred out to investigate the influence of beating and fines content on natural and vacuum dewatering using a vacuum drainage tester. Increase in beating and accumulation of fines in the stock decreased natural dewatering, Vacuum dewatering effect, however, increased substantially as beating and fines content were increased. But this increase in vacuum dewatering decreased again when a stock is severely beaten or fines content is greater than 35%. Above this level of fines content, mobile fines migrates to the interstices of the forming web to cause sealing or plugging which restrict fluid movement through the web.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.233-233
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• 1999

본 연구에서는 2성분계 gas(Ne+Xe)를 사용하여 기체압력(p), 진동수(f)에 따라 VUV(Vacuum Ultra Violet) spectrum 147, 173nm 파장과 IR(Infrared) spectrum 823nm, 828nm을 Vacuum Monochromator(Acton-VM 507)를 통해 측정하였다. 휘도(Luminance)와 전력(Power)측면에서 Ne+ Xe 최적의 가스 조성비를 찾기 위해서 Xe의 혼합비에 따른 IR영역인 823nm, 828nm을 측정결과, Xe 4%일 때 좋은 효율을 나타냈다. 기체압력이 200Torr에서는 Xe(3P1)에 기인하는 147nm가 주요한 파장이며, 기체압력이 400Torr, 600Torr일때는 Xe(3P2)에 기인하는 173nm 파장이 주요함을 알 수 있었다. 또한 공간 방전 이미지를 전압 pulse 인가후 ICCD Camera(V-Tek)의 Ready time, On Time을 조절하면서 50ns delay로 관측하였다. 향후 실험계획은 실제 상용화되고 있는 혼합가스 He+Ne+Xe의 조성비에 따른 자세한 실험을 할 것이다.

• 대한기계학회논문집B
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• 제28권11호
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• pp.1359-1367
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• 2004

The demand of vacuum pump has been increased in the process of semi-conduct manufacturing, as a core component. The response of the system for vacuum pump performance test can be utilized to assess the system and to obtain the reliability of the apparatus for the test. The system consists of gas supply tank, pressure chamber, measurement chamber and transmission line. Transient analysis for compressible fluid has been conducted to evaluate the dynamic characteristic of the volume terminated transmission line. Numerical approach based on the method of characteristics is used for the analysis. The response is evaluated with the important parameters for the system: i.e., length and diameter of the line, volume of the terminal tank. Using the numerical results, pumping speeds are calculated and then compared to the experimental results.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1996년도 제24회 춘계학술대회
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• pp.145-152
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• 1996

This paper deals with an experimental study on the f~iction torque characteristics of magnctic fluid seals for various oil temperatures, rotating speeds, and vacuum pressures. The friction torque of MFS was measured by high response torque meter. The experimental results show that, as the rotating speed increases, the fi'iction torque of MFS increases and as the oil temperature increases, the friction torque of MFS decreases. Also, the experimental results show that the friction torque of Model II is 1.73 ~ 2.56, 2.0 ~ 2.89, 2.0 - 3.25 times larger than those of Model I under the atmospheric pressure, vacuum pressure(10$^{-4}$ and 10$^{-6}$ torr), respectively.