• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.633-638
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• 2002

The vacuum cleaner that has no dust bag generates very high level annoying noise. The dominant noise source is the 2$\^$nd/ BPF tone of the rotating impeller. In order to reduce the noise, we identify the acoustic characteristics and reduce the noise of the vacuum cleaner and centrifugal fan. The resonance phenomenon is observed in blade passages and we found out that the resonance frequency is very close to the 2$\^$nd/ BPF. In order to reduce this high-level peak noise, new impeller is designed in this paper. The trailing edge of new impeller is inclined and this makes the flow interactions between the rotating impeller and the stationary diffuser vane occurs with some phase shift. The performance of new impeller is similar to the old one but the overall SPL is reduced about 3.6dBA. The SPL of BPF is reduced about 6dBA and 2$\^$nd/ BPF is reduced about 20dBA. The vacuum cleaner, which uses newly developed centrifugal fan, generate more comfortable noise than the old model and the strong tonal sound was dramatically reduced.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.6
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.6
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• pp.460-466
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• 2003

The aeroacoustic characteristics and noise reduction method of a centrifugal fan for a bagless vacuum cleaner were studied. The major noise source of vacuum cleaner is the centrifugal fan. The impeller of the fan rotates over 30000 rpm and generates very high-level piercing noise. It was found that the dominant noise source of the fan is generated from the aerodynamic interaction between the highly rotating impeller and stationary diffuser. In order to reduce the high tonal sound generated from the aerodynamic interaction between the impeller and diffuser, tapered impeller was carefully designed and tested. The trailing edge of the tapered impeller was inclined and this reduces the flow interactions between the rotating impeller and the stationary diffuser because of some phase shift. The static efficiency of the new impeller is slightly lower than the conventional one. The overall SPL is reduced about 3.6 dBA. The SPL of blade passing frequency(BPF) is reduced about 6 dBA and the $2^{nd}$ BPF is reduced about 20 dBA. The vacuum cleaner with the tapered impeller has lower noise level than that of the previous impeller and the strong tonal sound was dramatically reduced.

• Journal of Sensor Science and Technology
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• v.29 no.5
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.300-305
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• 2018

The uncooled microbolometer thermal sensor for low cost and mass volume was designed to target the new infrared market that includes smart device, automotive, energy management, and so on. The microbolometer sensor features 80x60 pixels low-resolution format and enables the use of wafer-level vacuum packaging (WLVP) technology. Read-out IC (ROIC) implements infrared signal detection and offset correction for fixed pattern noise (FPN) using an internal digital to analog convertor (DAC) value control function. A reliable WLVP thermal sensor was obtained with the design of lid wafer, the formation of Au80%wtSn20% eutectic solder, outgassing control and wafer to wafer bonding condition. The measurement of thermal conductance enables us to inspect the internal atmosphere condition of WLVP microbolometer sensor. The difference between the measurement value and design one is $3.6{\times}10-9$ [W/K] which indicates that thermal loss is mainly on account of floating legs. The mean time to failure (MTTF) of a WLVP thermal sensor is estimated to be about 10.2 years with a confidence level of 95 %. Reliability tests such as high temperature/low temperature, bump, vibration, etc. were also conducted. Devices were found to work properly after accelerated stress tests. A thermal camera with visible camera was developed. The thermal camera is available for non-contact temperature measurement providing an image that merged the thermal image and the visible image.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.235-235
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• 2012

We investigated the energy levels of valence region at the planar junction of poly (3-hexylthiophene) (P3HT) and C61-butyric acid methylester (PCBM) using ultraviolet photoemission spectroscopy (UPS) with ultra high vacuum. These are the most widely used materials for bulk heterojunction (BHJ) organic solar cells due to their high efficiency. In order to make the planar junction, we carried out the electrospray vacuum deposition (EVD) of PCBM onto spin-coated P3HT in high vacuum conditions (${\sim}10^{-5}-10^{-6}$). The planar junction interface exhibited 0.71 eV for the offset between P3HT HOMO and PCBM LUMO, which is different from the gap (0.85 eV) of individual values and is closer to the open circuit voltage of solar cells fabricated with the same material combination.

• Vacuum Magazine
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• v.4 no.1
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• pp.16-23
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• 2017

Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

• Vacuum Magazine
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• v.2 no.4
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• pp.39-46
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• 2015

After stepping into a new field of vacuum 30 years ago, our company has grown up steadily as a specialized vacuum industry, and now we can provide vacuum devices covering most of the pressure range. We are planning to put out high level dry pump like a multistage Roots pump on the market in the near future. Procedures of technology development for designing, fabricating, and testing the multistage Roots pump of 600 L/min class will be briefly reported. Core items of the technical development on the multistage Roots pump are as follows; elaborated profile design of 3-lobe rotors using an involute curve, optimization of rotor dimensions, especially for clearances and rotor width, considering the pumping speed, compression ratio and heat load, and establishment of a standardized test system. At present, the multistage Roots pump is about to come into commercialization.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.6
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• pp.230-235
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• 2003

In this paper, a superposed discharge type ozonizer with an internal dielectric that can be made into a vacuum tube has been designed and fabricated. Ozone generation and discharge characteristics have been investigated in accordance with output voltage of power supply, flow-rate, discharge power and vacuum of inside internal dielectric. Pure oxygen was used as the supply gas of the ozonizer. Ozone concentration and ozone generation are gradually increased when discharge power is increased at the same flow-rate and they are both proportional to the vacuum level. As such, the maximum ozone concentration of 8840 ppm was obtained at vacuum 0.1 Torr and flow-rate 0.5 $\ell$/min.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.33-33
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• 1999

The design of a vacuum pumping system for the KOMAC (Korea Multipurpose Accelerator Complex) RFQ(Radio-Frequency Quadrupole) linac is described. [Fig] Resulted from the lost proton beam, gas streaming from the LEBT (Low Energy Beam Transport) and out-gassing from the surfaces of the RFQ cavity and vacuum plumbing, the total gas load will be on the order of 7.2$\times$10-4 Torr-liters/sec, consisting mainly of hydrogen. The system designed to pump on a continual basis with redundancy to ensure that the minimal operating vacuum level of 1.0$\times$10-6 Torr is maintained even under abnormal conditions. Details of the design, performance analysis and the preliminary test results of the cryogenic pumps are presented.