• 제목/요약/키워드: Vacuum Heat Treatment

검색결과 343건 처리시간 0.029초

Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide (초임계이산화탄소를 이용한 플라즈마 손상된 다공성 저유전 막질의 복원)

  • Jung, Jae-Mok;Lim, Kwon-Taek
    • Clean Technology
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    • 제16권3호
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    • pp.191-197
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    • 2010
  • Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

Research of Heavily Selective Emitter Doping for Making Solar Cell by Using the New Atmospheric Plasma Jet (새로운 대기압 플라즈마 제트를 이용한 태양전지용 고농도 선택적 도핑에 관한 연구)

  • Cho, I Hyun;Yun, Myung Soo;Son, Chan Hee;Jo, Tae Hoon;Kim, Dong Hea;Seo, Il Won;Rho, Jun Hyoung;Jeon, Bu Il;Kim, In Tae;Choi, Eun Ha;Cho, Guangsup;Kwon, Gi Chung
    • Journal of the Korean Vacuum Society
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    • 제22권5호
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    • pp.238-244
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    • 2013
  • Doping process using laser is an important process in fabrication of solar cell for heat treatment. However, the process of using the furnace is difficult to form a selective emitter doping region. The case of using a selective emitter laser doping is required an expensive laser equipment and induce the wafer's structure damage due to high temperature. This study, we fabricated a new costly plasma source. Through this, we research the selective emitter doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (a few tens kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer. Atmospheric plasma treatment time was 15 s and 30 s, and current for making the plasma is 40 mA and 70 mA. We investigated a doping profile by using SIMS (Secondary Ion Mass Spectroscopy) and we grasp the sheet resistance of electrical character by using doping profile. As result of experiment, prolonged doping process time and highly plasma current occur a deeper doping depth, moreover improve sheet resistance. We grasped the wafer's surface damage after atmospheric pressure plasma doping by using SEM (Scanning Electron Microscopy). We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.

A study of the Mori Radicis Cortex pre-treatment on transient ischemic brain injury in mice (상백피(桑白皮) 메탄올 추출물 전처치가 일과성 허혈에 의한 생쥐의 뇌 손상에 미치는 영향)

  • Chung, Byung-Woo;Lim, Jae-Yu;Lee, Se-Eun;Lee, Byoungho;Lim, Sehyun;Lim, Chiyeon;Cho, Suin
    • The Korea Journal of Herbology
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    • 제32권1호
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    • pp.25-31
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    • 2017
  • Objectives : Mori Radicis Cortex (MRC), the root epidermis of Morus alba L., has been traditionally used to treat lung-related diseases in Korean Medicine. The common of MRC is Mulberry bark Morus bark, and it's pharmaceutical properties and taste are known as sweet and cold, and it promotes urination and reduce edema by reducing heat from the lungs and soothe asthma. In the present study, anti-apoptotic mechanism of MRC in middle cerebral artery occlusion (MCAO) model in mice. Methods : Two-hundred grams of MRC was extracted with methanol at room temperature for 5 days, and this was repeated one time. After filtration, the methanol was removed using vacuum evaporator, then stored at $-20^{\circ}C$ until use. C57BL/6 male mice were housed in an environment with controlled humidity, temperature, and light cycle. In order to determine beneficial effects of MRC on ischemia induced brain damage, infarct volume, neurological deficit scores, activities of several apoptosis-related proteins such as caspase-8, -9, Bcl-xL in MCAO-induced brains of mice were analyzed. Mice in MRC-treated groups were orally administered 30, 100, or 300 mg/kg of body weight for three consecutive days before commencing the MCAO procedure. Results : Pre-treatment of MRC significantly reduced infarct volume in MCAO subjected mice applied with 300 mg/kg of MRC methanol extract, and MRC effectively inhibited Bcl-xL reduction and caspase-9 activation caused by MCAO-induced brain damage. Conclusions : MRC showed neuro-protective effects by regulating apoptosis-related protein signals, and it can be a potential candidate for the therapy of ischemia-induced brain damage.

Processing of Water Activity Controlled Fish Meat Paste by Dielectric Heating 2. Storage Stability of the Product (내부가열을 이용한 보장성어육(고등어) 연제품의 가공 및 제품개발에 관한 연구 2. 제품저장중의 품질변화)

  • LEE Kang-Ho;LEE Byeong-Ho;You Byeong-Jin;SUH Jae-Soo;JO Jin-Ho;JEONG In-Hak;JEA Yoi-Guan
    • Korean Journal of Fisheries and Aquatic Sciences
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    • 제17권5호
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    • pp.361-367
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    • 1984
  • In previous paper(Lee et al., 1984), preparation formula and processing conditions of the fish meat (mackerel) paste using dielectric heating were described, that included the proper shape and size of product and the conditions of dielectric heating, hot air dehydration, and heating with electric heater to yield the minimum expansion and case hardening during heating and to controll the final rater activity of 0.86 to 0.83 accompanying with a complete reduction of viable cells and good texture. In present study, changes in VBN, pH, total plate count, water activity, texture, the loss of available lysine, color indexes, TBA value, and the content of TI were determined to assess the quality stability and shelf-life of the product during the storage for 35 days at $5^{\circ}C\;and\;25^{\circ}C$, respectively. And the effect of vacuum sealing and hot water treatment before storage on the storage stability of product was also mentioned. As the product was vacuum packed in K-flex film bag, heat treated in boiling water for 6 minutes, and stored, water activity was maintained 0.86 to 0.84 for 35 days regardless of storage temperature, and the increase of total plate count was negligible in case of $5^{\circ}C$ storage while tended to gain slightly after 25 days at $25^{\circ}C$ storage. Changes in VBN was also minimum with an increase of 1.5 mg/100g at $5^{\circ}C$ and 7.0mg/100g at $25^{\circ}C$, but in case of unpacked sample, it was 24.5mg/100g at $5^{\circ}C$ and 42.4 mg/100g at $25^{\circ}C$ even after 7 days. In textural property hardness tended to increase after 28 days and folding test score was down to A or B from AA grade. The loss of available lysine was $7.5\%\;at\;5^{\circ}C$ and $17.0\%\;at\;25^{\circ}C$ but brown color was not deeply developed as the color index score indicated. TBA value was not increased at $5^{\circ}C$ while it tended to increase rapidly after 30 days at $25^{\circ}C$. Changes in TI content was not obvious except that it showed a tendency of increase at the end of storage as well as in the change of lysine and TBA value. It is concluded from the results that the quality of the product, pasteurized and water activity controlled by dielectric heating, and vacuum packed in K-flex film would be stable for more than 35 days at $5^{\circ}C$ and at least 25 days even at room temperature.

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Sterilization of Neurospora Crassa by Noncontacted Low Temperature Atmospheric Pressure Surface Discharged Plasma with Dielectric Barrier Structure (유전체장벽 방전구조의 비접촉식 저온 대기압 면방전 플라즈마를 이용한 빵곰팡이의 살균효과)

  • Ryu, Young Hyo;Uhm, Han Sup;Park, Gyung Soon;Choi, Eun Ha
    • Journal of the Korean Vacuum Society
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    • 제22권2호
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    • pp.55-65
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    • 2013
  • Sterilization of Neurospora crassa has been investigated in this research by using a surface air plasma with dielectric barrier discharged (DBD) structure under atmospheric pressure. The sinusoidal alternating current has been used in this experiment with discharge voltage of 1.4~2.3 kV. The phase difference between the voltage and current signals are found to be almost 80 degree due to the capacitive property of dielectric barrier. Temperature on the biomaterials has been minimized by radiating the heat with the air cooling system. It is noted that the substrate temperature remains under 37 degree for plasma exposure time of 10 minutes with operation of cooler system. It is found that the ozone, $O_3$, has been measured to be about 25~30 ppm within 1 cm region and to be about 5 ppm at the 150 cm downstream region away from the suface plasma. It is also noted that the nitric oxide, NO, and nitric dioxide, $NO_2$, are not nearly detected. Germination rate and mitochodrial activity of Neurospora crassa immersed in the deionized water have been found to be drastically decreased as the plasma treatment time and its electrical power are increased in this experiment. Here, the mitochondrial activity has been analyzed by MTT (3-(4,5-dimethy lthiazol-2yl)-2,5-diphenyl-2H-tetrazolium bromide) assay. However, sterilization of Neurospora crassa immersed in the Vogel's minimal media has been found to be low by plasma treatment, which is caused by surrounding background solution. This research shows the sterilization possibility of Neurospora crassa by using the noncontated surface DBD plasma, which is different from the plasma jet. This is mainly attibuted to the reactive species generated by the surface plasma, since they play a major role for inhibition of micobes such as Neurospora crassa.

Effects of High Temperature Sterilization on Qualities Characteristics of the Canned Boiled Oyster (가열살균처리가 굴 보일드통조림의 품질특성에 미치는 영향)

  • Kong, Chung-Sik;Yun, Jae-Ung;Oh, Dong-Hun;Park, Jun-Yong;Kang, Jin-Yeong;Oh, Kwang-Soo
    • Journal of agriculture & life science
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    • 제43권6호
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    • pp.85-93
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    • 2009
  • The boiled oyster vacuum-packed in cylindrical can(No. 301-3) were thermally processed at $115^{\circ}C$ to reach Fo values of 5~20 min. The yield was slightly decreased with the increasing of Fo-values (79.2~ 83.7%), and volatile basic nitrogen (VBN) contents increased markedly with the increasing of Fo-value. In fatty acid composition of canned oyster, the composition ratio of saturates and monoenes such as 14:0, 16:0 and 18:1n9 increased, while polyunsaturated fatty acids such as 20:5n-3 and 22:6n-3 decreased with the increasing of Fo-value. In taste compounds, content of total free amino acid in raw oyster was 1,533.5 mg%, and this total content was slightly increased (1,140.8~1,266.2 mg%) with the increasing of Fo values. But contents of betaine and ionic minerals such as Na, K, Mg and P decreased markedly by thermal processing at $115^{\circ}C$. As compared with Fo 5 min. heat treatment; Fo 20 min. heat treatment at $115^{\circ}C$ became more hardened in texture of oyster meat. In sensory evaluations on organoleptic characteristics, no significant difference at 5% level was observed among the canned boiled oyster meats heated at Fo 5~15 min.

A.C. Impedance Properties of HA/Ti Compound Layer coated Ti-30Ta-(3~15)Nb Alloys (Ti-30Ta-(3~15)Nb 합금에 HA/Ti 복합 코팅한 표면의 교류임피던스 특성)

  • Jeong, Y.H.;Lee, H.J.;Moong, Y.P;Park, G.H.;Jang, S.H.;Son, M.K.;Choe, H.C.
    • Journal of the Korean institute of surface engineering
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    • 제41권5호
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    • pp.181-188
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    • 2008
  • A.C. impedance properties of HA/Ti compound layer coated Ti-30Ta-($3{\sim}15$)Nb alloys have been studied by electrochemical method. Ti-30Ta binary alloys contained 3, 7, 10 and 15 wt% Nb were manufactured by the vacuum furnace system. And then specimen was homogenized at $1000^{\circ}C$ for 24 hrs. The sample was cut and polished for corrosion test and coating. It was coated with HA/Ti compound layer by magnetron sputter. The non-coated and coated morphology of Ti alloy were analyzed by X-ray diffractometer (XRD), energy X-ray dispersive spectroscopy (EDX) and filed emission scanning electron microscope (FE-SEM). The corrosion behaviors were investigated using A.C. impedance test (PARSTAT 2273, USA) in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. Ti-30Ta-($3{\sim}15\;wt%$)Nb alloys showed the ${\alpha}+{\beta}$ phase, and $\beta$ phase peak was predominantly appeared in the case of increasingly Nb contents. The microstructures of Ti alloy were transformed from needle-like structure to equiaxed structure as Nb content increased. From the analysis of coating surface, HA/Ti composite surface uniformed coating layer with 750 nm thickness. The growth directions of film were (211), (112), (300) and (202) for HA/Ti composite coating on the surface after heat treatment at $550^{\circ}C$, whereas, the growth direction of film was (110) for Ti coating. The polarization resistance ($R_p$) of HA/Ti composite coated Ti-alloys were higher than those of the Ti and HA coated samples in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. Especially, corrosion resistance of Ti-Ta-Nb system increased as Nb content increased.

A Study on the High Temp. Tensile Properties of B1914 Ni-base Superalloy According to Crystal Structures of Poly-, Directionally Solidified- and Single Crystal Casts (Ni기 초합금 B1914의 다결정, 방향성 및 단결정 주조구조에 따른 고온 인장 특성 연구)

  • An, Seong-Uk;Jang,Yong-Seok;Yun, Dong-Han;Im, Ok-Dong;Larionov, V.;Grafas, I.;Jin, Yeong-Hun;Lee, Jae-Hun;Seo, Dong-Lee;O, Je-Myeong;Lee, Sang-Jun;Lim, Dae-Soon
    • Korean Journal of Materials Research
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    • 제8권9호
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    • pp.831-836
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    • 1998
  • The B1914 Ni-base superalloy was manufactured according to crystal structures of poly-, directionally solidified- and single crystals. We observe deformation as type of different crystal structure from room to high temperature. Specimens are controled by cooling rate and thermal gradient and then heat treatment in vacuum and then cooling with Ar gas. Different crystal structure has different stress-strain characteristic. At $600^{\circ}C$, yield strength and ultimate strength is increased single-, directionally solidified- and poly crystals in order.

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Synthesis of High-purity Silicon Carbide Powder using the Silicon Wafer Sludge (실리콘 기판 슬러지로부터 고순도 탄화규소 분말 합성)

  • Hanjung Kwon;Minhee Kim;Jihwan Yoon
    • Resources Recycling
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    • 제31권6호
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    • pp.60-65
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    • 2022
  • This study presents the carburization process for recycling sludge, which was formed during silicon wafer machining. The sludge used in the carburization process is a mixture of silicon and silicon carbide (SiC) with iron as an impurity, which originates from the machine. Additionally, the sludge contains cutting oil, a fluid with high viscosity. Therefore, the sludge was dried before carburization to remove organic matter. The dried sludge was washed by acid cleaning to remove the iron impurity and subsequently carburized by heat treatment under vacuum to form the SiC powder. The ratio of silicon to SiC in the sludge was varied depending on the sources and thus carbon content was adjusted by the ratio. With increasing SiC content, the carbon content required for SiC formation increased. It was demonstrated that substoichiometric SiCx (x<1) was easily formed when the carbon content was insufficient. Therefore, excess carbon is required to obtain a pure SiC phase. Moreover, size reduction by high-energy milling had a beneficial effect on the suppression of SiCx, forming the pure SiC phase.

Facile Separation of Zinc Oxalate to Oxalate and its Conversion to Glycolic Acid via Electrochemical Reduction (ZnC2O4의 Oxalate로의 효과적 분리 및 이의 전기화학적 환원을 통한 글리콜산으로의 전환)

  • Sunmi Im;Yiseul Park
    • Clean Technology
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    • 제29권1호
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    • pp.46-52
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    • 2023
  • Oxalic acid has been traditionally obtained via the oxidation of carbohydrates using nitric acid and catalysts. However, this process produces a variety of nitrogen oxides during oxidation and requires a separation process due to its various intermediates. These products and additional steps increase the harmfulness and complexity of the process. Recently, the electrochemical reduction of carbon dioxide into oxalic acid has been suggested as an environmentally friendly and efficient technology for the production of oxalic acid. In this electrochemical conversion system, zinc oxalate (ZnC2O4) is obtained by the reaction of Zn2+ ions produced by Zn oxidation and oxalate ions produced by CO2 reduction. ZnC2O4 can then be converted to form oxalic acid, but this requires the use of a strong acid and heat. In this study, a system was proposed that can easily convert ZnC2O4 to oxalic acid without the use of a strong acid while also allowing for easy separation. In addition, this proposed system can also further convert the products into glycolic acid which is a high-value-added chemical. ZnC2O4 was effectively separated into Zn(OH)2 powder and oxalate solution through a chemical treatment and a vacuum filtration process. Then the Zn(OH)2 and oxalate were electrochemically converted to zinc and glycolic acid, respectively.