• 제목/요약/키워드: Vacuum Glass

검색결과 758건 처리시간 0.029초

온도 조건 변화에 따른 Cu-Pc 박막 $\beta$-phase type의 표면 결정 특성에 관한 연구

  • 김현숙;강상백;채영안;윤창선;윤성현;유수창;김진태;차덕준
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.254-254
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    • 2010
  • Cu-Pc(copper(II)-phthalocyanine)는 박막의 형성과정에서 열처리 방식과 온도에 따라 박막의 구조가 변하며, 구조로는 열적으로 준 안정적인 $\alpha$-phase와 열적으로 안정적인 $\beta$-phase가 있다. 본 연구에서는 Cu-Pc 박막의 열적으로 안정적인 $\beta$-phase 구조에 대해 온도 조건 변화에 따른 표면 결정 성장의 특성을 연구하고자 한다. 진공증착 방법 중 하나인 thermal evaporation deposition을 이용하여 glass 기판위에 전열 처리 및 후열 처리에 대해 온도 조건 변화에 따른 $\beta$-phase type의 표면 결정 특성을 연구하였다. Cu-Pc 박막의 성장두께는 50nm 일정한 두께로 fluxmeter 및 thickness monitor를 이용하여 제어하였다. 50nm의 두께에 따른 기판온도를 $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$로 전열 처리한 후 각각 전열 처리한 기판온도에 대해 1hour, 2hour, 3hour 후열 처리하여 온도 조건에 따른 박막을 성장한 후, $\beta$-phase type에 대한 결정 구조 및 표면 특성 변화를 분석하였다. 제작된 Cu-Pc의 박막은 $\beta$-phase type으로, 열처리에 따른 $\beta$-phase transition 현상을 연구하였다. XRD(X-ray diffraction)를 통하여 박막에 대한 결정 구조 분석 및 FE-SEM(field emission scanning electron microscopy)을 이용하여 Cu-Pc 박막의 구조적 결정성과 방향성 등, 표면 상태와 형상구조에 대해 표면의 특성을 분석하며, 광 흡수도(UV-visible absorption spectra)을 이용하여 온도 조건에 따른 투과/흡수 현상을 비교분석하였다.

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Effects of annealing temperature on structural and optical properties of CdS Films prepared by RF magnetron sputtering

  • 황동현;안정훈;손영국
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.233-233
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    • 2010
  • CdS thin films were deposited on glass substrates by R.F. magnetron sputtering method and some of the samples were treated by rapid thermal annealing (RTA) process. Effects of thermal annealing on structural and optical properties were investigated at different temperatures ranging from 100 to $600^{\circ}C$. The crystallographic structure of the films and the size of the crystallites in the films were studied by X-ray diffraction. The crystallite sizes were found to increase, and the X-ray diffraction patterns were seen to sharpen by annealing. Optical properties of the films were calculated using the envelope method and the photoluminescence measurements. The optical properties of the films were seen to be dependent on the film thicknesses. The energy gap of the films was found to decrease by annealing. The band edge sharpness of the optical absorption was seen to oscillate by thermal annealing. Annealing over $400^{\circ}C$ was seen to degrade the optical properties of the film. The best annealing temperature for the films was found to be $400^{\circ}C$ from the optical properties. It is observed that the CdS film annealed at $400^{\circ}C$ reveals the strongest UV emission intensity and narrowest full width at half maximum among the temperature ranges studied. The enhanced UV emission from the film annealed at $400^{\circ}C$ is attributed to the improved crystalline quality of CdS thin film due to the effective relaxation of residual compressive stress and achieving maximum grain size. The results show that heat treatments under optimal annealing condition can provide significant improvements in the properties of CdS thin films.

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암모니아의 농도에 따른 CBD-ZnS/CIGS 박막태양전지의 제작 및 분석

  • 정용덕;최해원;조대형;박래만;이규석;김제하
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.298-299
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    • 2010
  • Cu(In, Ga)Se2 (CIGS) 박막 태양전지는 Soda lime glass/Mo/CIGS/CdS/ZnO/ITO/Al 의 구조를 가지고 있다. CIGS 화합물은 direct bandgap 구조를 하고 있으며, 광흡수율이 다른 어떤 물질들 보다 뛰어나 박막으로도 충분히 태양광을 흡수할 수 있다. 또한 Ga의 도핑 농도에 따른 밴드갭 조절도 가능하다. 이러한 성질들로 인해 현재 박막태양전지로서 20.1%의 최고효율을 가지고 있다.[1] CIGS 박막 태양전지에서 p-CIGS layer와 스퍼터링으로 증착되는 n-ZnO layer사이의 buffer 층으로 chemical bath deposition (CBD)-CdS 박막을 주로 사용한다. CBD-CdS 박막은 n-ZnO 스퍼터로 증착 시킬 때, CIGS 층의 손상을 최소화하고, 이 두 층 사이에서의 격자상수와 밴드갭의 차이를 줄여주어 CIGS 박막태양전지의 효율을 증가 시키는 역할을 한다. 하지만, Cd (카드뮴)의 심각한 독성과 낮은 밴드갭(2.4eV)으로 인해 CIGS 층에서의 광흡수율을 줄여, CdS를 대체할 새로운 buffer 층의 필요성이 대두되었다.[2] 그 대안으로 ZnS, Zn(O, S, OH), (Zn, Mg)O, In2S3 같은 물질이 연구되고 있다. 현재 CBD-ZnS를 buffer 층으로 사용한 CIGS 박막태양전지의 효율은 최고 18.6%로 CBD-CdS의 최고효율보다는 약 1.5% 낮지만, ZnS가 높은 밴드갭(3.7~3.8eV)과 Cd-free 물질이라는 점에서 CdS를 대체할 물질로 각광받고 있다. 본 연구에서는 기존의 CdS 박막을 제조하는 방법과 같은 방법인 CBD를 이용하여 ZnS 박막을 제조하였다. ZnS 박막을 제조하기 위해서는 Zinc sulfate, Thiourea, 암모니아가 사용된다. 암모니아의 mol 농도에 따른 CBD-ZnS/CIGS 박막태양전지의 효율 변화를 관찰하기 위해 암모니아의 mol 농도는 1 mol, 2 mol, 3 mol, 4 mol, 5 mol, 6 mol, 그 이상의 과량을 사용하여 실험하였다. 실험 결과, 암모니아농도 5 mol에서 효율 13.82%를 확인할 수 있었다. 최고효율을 보인 조건인 암모니아 농도가 5 mol 일 때, Voc는 0.602V, Jsc는 33.109mA/cm2, FF는 69.4%를 나타내었다.

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액상성형공정별 물리적/기계적 특성 비교 평가 (Evaluation of Physical and Mechanical Properties based on Liquid Composite Molding)

  • 박동철;김태곤;김승혁;신도훈;김현우;한중원
    • Composites Research
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    • 제31권6호
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    • pp.304-310
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    • 2018
  • 오토클레이브 (Autoclave) 성형 공정은 항공산업분야의 복합재 부품 제작에 있어서 매우 안정적이고 중요한 제조방법으로서 자리매김 해왔었지만 오토클레이브가 가진 많은 장점과 함께 단점 또는 제약 사항들을 보여주고 있다. 최근에는 이러한 한계를 극복하기 위하여 다양한 탈 오토클레이브 (OoA, Out-of-Autoclave) 공정들이 연구 개발되고 있는데, 본 연구에서는 탈 오토클레이브 공정 중 하나로서 많은 관심을 받고 있는 액상성형공정 (Liquid Composite Molding)을 사용하여 시편들을 제작하고 이를 오토클레이브 공정으로 제작된 시편과 실험적으로 비교평가하였다. 액상성형공정 중 DB (Double Bagging), CAPRI (Controlled Atmospheric Pressure Resin Infusion) 및 VAP (Vacuum Assisted Process) 공정을 사용하여 시편 제작을 수행하고 내부 기공 함유량, 두께, 유리전이온도, 층간전단강도 및 굽힘강도 시험 평가를 통하여 각 제작 공정에 따른 차이를 확인할 수 있었다. 전체적으로 오토클레이브 성형 시편이 우수한 두께 균일도, 낮은 기공 함유량 및 양호한 기계적 강도 특성을 보였으며, 액상성형공정 중에서는 CAPRI 성형 시편이 DB 및 VAP 성형 시편에 비하여 상대적으로 우수한 특성을 가짐을 확인하였다.

Structure and Physical Properties of Fe/Si Multiayered Films with Very Thin Sublayers

  • Baek, J.Y;Y.V.Kudryavtsev;J.Y.Rhee;Kim, K.W.;Y.P.Le
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.173-173
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    • 2000
  • Multilayered films (MLF) consisting of transition metals and semiconductors have drawn a great deal of interest because of their unique properties and potential technological applications. Fe/Si MLF are a particular topic of research due to their interesting antiferromagnetic coupling behavior. although a number of experimental works have been done to understand the mechanism of the interlayer coupling in this system, the results are controversial and it is not yet well understood how the formation of an iron silicide in the spacer layers affects the coupling. The interpretation of the coupling data had been hampered by the lack of knowledge about the intermixed iron silicide layer which has been variously hypothesized to be a metallic compound in the B2 structure or a semiconductor in the more complex B20 structure. It is well known that both magneto-optical (MO0 and optical properties of a metal depend strongly on their electronic structure that is also correlated with the atomic and chemical ordering. In order to understand the structure and physical properties of the interfacial regions, Fe/Si multilayers with very thin sublayers were investigated by the MO and optical spectroscopies. The Fe/si MLF were prepared by rf-sputtering onto glass substrates at room temperature with a totall thickness of about 100nm. The thicknesses of Fe and Si sublayers were varied from 0.3 to 0.8 nm. In order to understand the fully intermixed state, the MLF were also annealed at various temperatures. The structure and magnetic properties of Fe/Si MLF were investigated by x-ray diffraction and vibrating sample magnertometer, respectively. The MO and optical properties were measured at toom temperature in the 1.0-4.7 eV energy range. The results were analyzed in connection with the MO and optical properties of bulk and thin-film silicides with various structures and stoichiometries.

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Effect of Sn Doping on the Thermoelectric Properties of P-Type Mg3Sb2 Synthesized by Controlled Melting, Pulverizing Followed by Vacuum Hot Pressing

  • Rahman, Md. Mahmudur;Kim, Il-Ho;Ur, Soon-Chul
    • 한국재료학회지
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    • 제32권3호
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    • pp.132-138
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    • 2022
  • Zintl phase Mg3Sb2 is a promising thermoelectric material in medium to high temperature range due to its low band gap energy and characteristic electron-crystal phonon-glass behavior. P-type Mg3Sb2 has conventionally exhibited lower thermoelectric properties compared to its n-type counterparts, which have poor electrical conductivity. To address these problems, a small amount of Sn doping was considered in this alloy system. P-type Mg3Sb2 was synthesized by controlled melting, pulverizing, and subsequent vacuum hot pressing (VHP) method. X-ray diffraction (XRD) and scanning electron microscopy (SEM) were used to investigate phases and microstructure development during the process. Single phase Mg3Sb2 was successfully formed when 16 at.% of Mg was excessively added to the system. Nominal compositions of Mg3.8Sb2-xSnx (0 ≤ x ≤ 0.008) were considered in this study. Thermoelectric properties were evaluated in terms of Seebeck coefficient, electrical conductivity, and thermal conductivity. A peak ZT value ≈ 0.32 was found for the specimen Mg3.8Sb1.994Sn0.006 at 873 K, showing an improved ZT value compared to intrinsic one. Transport properties were also evaluated and discussed.

진공 증착법에 의하여 제작한 Europium complex 유기 박막 전기발광소자의 광학적.전기적 특성에 관한 연구. (Studies on the Optical and the Electrical Characterization of Organic Electroluminescence Devices of Europium Complex Fabricated with PVD(Physical Vopor Deposition) Technique)

  • 이명호;이한성;김영관;김정수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권5호
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    • pp.285-295
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    • 1999
  • Electroluminescent(EL) devices based on organic materials have been of great interest due to their possible applications for large-area flat-panel displays. They are attractive because of their capability of multi-color emission, and low operation voltage. An approach to realize such device characteristics is to use active layers of lanthanide complexes with their inherent extremely sharp emission bands in stead of commonly known organic dyes. In general, organic molecular compounds show emission due to their $\pi$-$\pi*$ transitions resulting in luminescence bandwidths of about 80 to 100nm. Spin statistic estimations lead to an internal quantum efficiency of dye-based EL devices limited to 25%. On the contrary, the fluorescence of lanthanide complexes is based on an intramolecular energy transfer from the triplet of the organic ligand to the 4f energy states of the ion. Therefore, theoretical internal quantum efficiency is principally not limited. In this study, Powders of TPD, $Eu(TTA)_3(phen) and AlQ_3$ in a boat were subsequently heated to their sublimation temperatures to obtain the growth rates of 0.2~0.3nm/s. Organic electrolumnescent devices(OELD) with a structure of $glass substrate/ITO/Eu(TTA)_3(phen)/AI, glass substrate/ITO/TPD/Eu(TTA)_3(phen)/AI and glass substrate/ITO/TPD/Eu(TTA)_3(phen)/AIQ_3AI$ structures were fabricated by vacuum evaporation method, where aromatic diamine(TPD) was used as a hole transporting material, $Eu(TTA)_3(phen)$ as an emitting material, and Tris(8-hydroxyquinoline)Aluminum$(AlQ_3)$ as an electron transporting layer. Electroluminescent(EL) and current density-voltage(J-V) characteristics of these OELDs with various thickness of $Eu(TTA)_3(phen)$ layer were investigated. The triple-layer structure devices show the red EL spectrum at the wavelength of 613nm, which is almost the same as the photoluminescent(PL) spectrum of $Eu(TTA)_3(phen)$.It was found from the J-V characteristics of these devices that the current density is not dependent on the applied field, but on the electric field.

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Active-Matrix Cathodes though Integration of Amorphous Silicon Thin-Film Transistor with triode -and Diode-Type field Emitters

  • Song, Yoon-Ho;Cho, Young-Rae;Hwang, Chi-Sun;Kim, Bong-Chul;Ahn, Seong-Deok;Chung, Choong-Heui;Kim, Do-Hyung;Uhm, Hyun-Seok;Lee, Jin-Ho;Cho, Kyoung-Ik
    • Journal of Information Display
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    • 제2권3호
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    • pp.72-77
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    • 2001
  • Amorphous silicon thin-film transistors (a-Si TFTs) were incorporated into Mo-tip-based triode-type field emitters and diode-type ones of carbon nanotubes for an active-matrix cathode (AMC) plate of field emission displays. Also, we developed a novel surface-treatment process for the Mo-tip fabrication, which gleatly enhanced in the stability of field emission. The field emission currents of AMC plates on glass substrate were well controlled by the gate bias of a-Si TFTs. Active-matrix field emission displays (AMFEDs) with these AMC plates were demonstrated in a vacuum chamber, showing low-voltage matrix addressing, good stability and reliability of field emission, and highly uniform light emissions from the anode plate with phosphors. The optimum design of AMFEDs including a-Si TFTs and a new light shield/focusing grid is discussed.

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Ferrite plating 방법에 의한 $Fe_{3-x}Mn_{x}O_4$ 박막 제작과 자기적 성질 (Preparation of $Fe_{3-x}Mn_{x}O_4$ Films by the Ferrite Plating and its Magnetic Properties)

  • 하태욱;이정식
    • 한국자기학회지
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    • 제6권3호
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    • pp.145-150
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    • 1996
  • Ferrite plating 방법은 진공이 불필요하고, 저온(< $100^{\circ}C$)에서 페라이트 박막을 제작할 수 있다. 이 방법으로 유리 기판위에 $80^{\circ}C$에서 $Fe_{3-x}Mn_{x}O_4(x=0.0~0.023)$의 페라이트 박막을 제작하였다. 박막은 60분간 성장시켰으며, 막의두께는 약 $9000\AA$이었고, 거울면과 같은 광택을 지녔다. X-선 회절 실험으로 스피넬 구조의 단일상을 확인하였다. $Fe_{3-x}Mn_{x}O_4$ 박막의 구성비 x는 반응용액에서의 구성비 x'에 비해 매우낮다(x/x'=0.04). $Fe_{3}O_{4}$ ferrite 박막의 포화자화($M_{s}$)는 480 emu/cc로써 bulk 시료와 비슷한 값을 가졌다.

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열 화학 기상 증착법을 이용한 삼극관 구조의 탄소 나노 튜브 전계 방출 소자의 제조 (Fabrication of Triode Type Field Emission Device Using Carbon Nanotubes Synthesized by Thermal Chemical Vapor Deposition)

  • 유완준;조유석;최규석;김도진
    • 한국재료학회지
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    • 제14권8호
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    • pp.542-546
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    • 2004
  • We report a new fabrication process for high performance triode type CNT field emitters and their superior electrical properties. The CNT-based triode-type field emitter structure was fabricated by the conventional semiconductor processes. The keys of the fabrication process are spin-on-glass coating and trim-and-leveling of the carbon nanotubes grown in trench structures by employing a chemical mechanical polishing process. They lead to strong adhesion and a uniform distance from the carbon nanotube tips to the electrode. The measured emission property of the arrays showed a remarkably uniform and high current density. The gate leakage current could be remarkably reduced by coating of thin $SiO_{2}$ insulating layer over the gate metal. The field enhancement factor(${\beta}$) and emission area(${\alpha}$) were calculated from the F-N plot. This process can be applicable to fabrication of high power CNT vacuum transistors with good electrical performance.