• Journal of the Korean Vacuum Society
• /
• v.6 no.S1
• /
• pp.70-74
• /
• 1997

The study of the thickness dependence of the electron energy structure of Fe, Ni, Ti and Zr sublayers in Ni/Ti and Fe/Zr multilayers by using the experimental and computer simulated optical spectroscopy has been performed. A series of Ni/Ti and Fe/Ze multiayered films (MLF) with a bilayer period of 0.5 - 30 nm and constant (Ni/Ti) / different (Fe/Zr) sublayer thickness ratios were prepared by using computer-controlled double-pair target face-to-face sputtering onto a glass substrate at room temperature (RT) Computer simulation of the resulting optical properties of these MLF was carried out by solving of multireflection problem with a matrix method assuming either "sharp" interfaces resulting in rectangular depth profiles of the components or "mixed" (alloy-like) interfaces of variable thickness between pure-metal sublayers. Optical constants of pure bulk metals as well as equiatomic alloy interfaces were employed in these simulations. It was shown that the difference between experimental and simulated optical properties of the investigated MLF increases with decrease in sublayer thickness. This result allows to conclude that the electronic structures of sublayers below 4-5 nm thickness in mlf differ from the corresponding bulk metals.ponding bulk metals.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.193-193
• /
• 2012

In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is the most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. Single-chamber PECVD system for a-Si:H solar cell manufacturing has the advantage of lower initial investment and maintenance cost for the equipment. However, in single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of single-chamber PECVD system. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. In order to remove the deposited B inside of the plasma chamber during p-layer deposition, a high RF power was applied right after p-layer deposition with SiH4 gas off, which is then followed by i-layer, n-layer, and Ag top-electrode deposition without vacuum break. In addition to the p-i interface control, various interface control techniques such as FTO-glass pre-annealing in O2 environment to further reduce sheet resistance of FTO-glass, thin layer of TiO2 deposition to prevent H2 plasma reduction of FTO layer, and hydrogen plasma treatment prior to n-layer deposition, etc. were developed. The best initial solar cell efficiency using single-chamber PECVD system of 10.5% for test cell area of 0.2 $cm^2$ could be achieved by adopting various interface control methods.

• Journal of the Korean Vacuum Society
• /
• v.15 no.1
• /
• pp.64-72
• /
• 2006

We demonstrated organic light-emitting devices (OLEDs) based on the organic thin-film materials such as tris-(8-hydroxyquinoline) aluminum $(Alq_3)$. The structure of OLEDs was vacuum deposited upon transparent and thin glass substrates pre-coated with a transparent, conducting indium tin oxide thin film. The luminance characteristics, current, capacitance, and dispersion factor for degraded OLEDs, which were made by various bias currents $(0.5mA\;{\leq}\;I_{Bias}\;{\leq}9mA)$, are studied. The current dependences of lifetime were divided at approximately 2mA, and they represented nearly linear behaviors but had different slopes in a logarithmic plot of lifetime versus bias current. With lighting OLEDs, the anomaly of capacitance, as shown in the CV curve, occurred because of two factors, polarization in the bulk of organic materials and the interface between the metal and organic layers. In decayed OLEDs that had lower bias currents of less than 2mA, it was found that the degradation of luminance was related to both the decrease of polarization and to the lowering of the injection barrier.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.27 no.1
• /
• pp.22-27
• /
• 2017

$TiO_2$ films, thickness of $1{\sim}30{\mu}m$ were deposited on glass substrate at room temperature by room temperature granule spray in vacuum. The starting powder was calcinated at $600^{\circ}C$ for 4 h using $Al_2O_3$ crucible in the furnace. The particle size of the $TiO_2$, $1.5{\mu}m$ was measured by a particle size analyzer. The effect of different process parameters such as number of pass, gas flow rate and feeder voltage was studied. As the number of passes increased, the film thickness increased proportionally due to adequate kinetic energy conserved. The effect of three different flow rates (i.e. 15, 25, and 35 LPM) on deposited film was investigated. As gas flow rate increased, the film thickness increased up to 25 LPM and then decreased. Higher feeder voltage with low flow rate of 15 LPM resulted in unsufficient coating thickness due to insufficient kinetic energy. Microstructure of $TiO_2$ films was investigated by scanning electron microscope and high resolution tramission electron microscope.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.14 no.2
• /
• pp.511-516
• /
• 2013

The thickness and deflection of melting parts of the glass edge reach the biggest effect on the intensity and thermal insulation performance. During the sealing process using a hydrogen mixed gas torch, the thickness and the deflection effect of the edge part are affected by process parameters. In order to analyze the correlative relationship of the thickness prediction and the deflection of the edge part according to the process parameters, data was obtained by conducting sealing experiments. The main effects and interaction effects of process parameters for the thickness and the shape of the glass edge parts were analyzed through the design of experiment. A mathematical experiment equation that can predict the thickness and deflection of the edge part according to the process parameters was developed by conducting multiple regression equations.

• Korean Journal of Materials Research
• /
• v.30 no.4
• /
• pp.169-175
• /
• 2020

Silicon nitride thin films are deposited by RF (13.57 MHz) magnetron sputtering process using a Si (99.999 %) target and with different ratios of Ar/N₂ sputtering gas mixture. Corning G type glass is used as substrate. The vacuum atmosphere, RF source power, deposit time and temperature of substrate of the sputtering process are maintained consistently at 2 ~ 3 × 10^-3 torr, 30 sccm, 100 watt, 20 min. and room temperature, respectively. Cross sectional views and surface morphology of the deposited thin films are observed by field emission scanning electron microscope, atomic force microscope and X-ray photoelectron spectroscopy. The hardness values are determined by nano-indentation measurement. The thickness of the deposited films is approximately within the range of 88 nm ~ 200 nm. As the amount of N₂ gas in the Ar:N₂ gas mixture increases, the thickness of the films decreases. AFM observation reveals that film deposited at high Ar:N₂ gas ratio and large amount of N₂ gas has a very irregular surface morphology, even though it has a low RMS value. The hardness value of the deposited films made with ratio of Ar:N₂=9:1 display the highest value. The XPS spectrum indicates that the deposited film is assigned to non-stoichiometric silicon nitride and the transmittance of the glass with deposited SiO₂-Si_xN_y thin film is satisfactory at 97 %.

• Journal of Institute of Control, Robotics and Systems
• /
• v.17 no.6
• /
• pp.566-572
• /
• 2011

In recent semiconductor and FPD (Flat Panel Display) manufacturing processes, high clean-class delivery operation is required more and more for short working time and better product quality. Traditionally SLIM (Single-sided Linear Induction Motor) is widely used in the liner drive applications because of its simplicity in the rail structure. A magnetically levitated (Maglev) unmanned vehicle with SLIM traction, which is powered by a CPS (Contactless Power Supply) can be a high precision delivery solution for this industry. In this paper unmanned FPD-carrying vehicle, which can levitate without contacting the rail structure, is suggested for high clean-class FPD delivery applications. It can be more acceptable for the complex facilities composed with many processes which require longer rails, because of simple rail structure. The test setup consists of a test vehicle and a rounded rail, in which the vehicle can load and unload products at arbitrary position commanded through wireless communications of host computer. The experimental results show that the suggested vehicle and rail have reasonable traction servo and robust electromagnetic suspensions without any contact. The resolution of point servo errors in the SLIM traction system is accomplished under 1mm. The maximum gap error is ${\pm}0.25mm$ with nominal air gap length of 4.0mm in the electromagnetic suspensions. This type of automated delivery vehicle is expected to have significant role in the clean delivery like FPD glass delivery.

• Journal of Welding and Joining
• /
• v.34 no.2
• /
• pp.22-29
• /
• 2016

Recently, Application of composite materials are increased in transport area for weight reduction. Also, Related technical developments have been implemented actively at domestic and abroad. In particular, The carbon fiber has high strength and ultra light property higher than stainless steel, aluminum, GFRP as Eco-friendly material. Carbon fiber contribute to improving the environmental effect such as fuel saving, expansion of loadage, reducing the exhaustion of carbon dioxide through the weight reduction of transport area. In addition, The carbon fiber is applied to the ship in the area of race yacht, luxury cruise boat as weight reduction and high added-value materials, but there is limited application for general boat because price of carbon fiber is very expensive. For the weight reduction of general boat hull, being used as structure materials, glass fiber and carbon fiber are applied to hull with form of hybrid composite materials, but application of domestic and research for development are incomlete. In this study, An evaluations of mechanical strength property and fatigue strength are performed on composite materials by hybrid weaving of glass fiber and carbon fiber and composite materials forming method by hybrid forming.

• Journal of Korean Dental Science
• /
• v.16 no.1
• /
• pp.74-79
• /
• 2023

Purpose: Cention N (Ivoclar Vivadent) was a recently introduced alkasite-based restorative material that was expected to replace amalgam and glass ionomer cement. This material was an esthetic restoration with adequate mechanical strength and release of fluoride and calcium. The purpose of this study was to measure the water sorption and water solubility of Cention N and evaluate its long-term durability compared to other esthetic restorations (Resin-Modified Glass Ionomer cement [RMGIC], Giomer, Composite Resin). Materials and Methods: Twenty specimens each of Cention N (CN), Resin Modified-Glass Ionomer Cement (FJ), Giomer (BF), and Composite Resin (FZ) were made. After each specimen was completely dried in a desiccator for 24 hours using a vacuum pressure pump, the specimen was weighed (m1). After that, the specimen was immersed in distilled water at 37℃ for 7 days, stored in a drying oven, and weighed (m2). After drying completely for 24 hours in a desiccator, the specimen was weighed (m3) to calculate the water absorption and water solubility using Formulas 1 and 2. The measured values were statistically processed and analyzed using SPSS, and the significance level was set at 0.05. Result: When measuring water sorption, FJ (122.61 ㎍/mm³) showed significantly higher water sorption than CN (35.42 ㎍/mm³) (P<0.05). There was no significant difference between FZ (18.03 ㎍/mm³) and BF (14.76 ㎍/mm³) (P=0.930). When measuring water solubility, CN (6.65 ㎍/mm³) showed significantly higher water solubility than FJ (1.47 ㎍/mm³) (P<0.05). Conclusion: Cention N had lower water sorption than RMGIC, but higher water solubility, indicating that it is more vulnerable to moisture and has lessened long-term durability.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2009.05a
• /
• pp.31.1-31.1
• /
• 2009

Carbon nanotubes (CNTs) are attractive material because of their superior electrical, mechanical, and chemical properties. Furthermore, their geometric features such as a large aspect ratio and a small radius of curvature at tip make them ideal for low-voltage field emission devices including backlight units of liquid crystal display, lighting lamps, X-ray source, microwave amplifiers, electron microscopes, etc. In field emission devices for display applications, the phosphor anode is positioned against the CNT emitters. In most case, light generated from the phosphor by electron bombardment passes through the anode front plate to reach observers. However, light is produced in a narrow depth of the surface of the phosphor layer because phosphor particles are big as much as several micrometers, which means that it is necessary to transmit through the phosphor layer. Hence, a drop of light intensity is unavoidable during this process. In this study, we fabricated a transparent cathode back plate by depositing an ultra-thin film of single walled CNTs (SWCNTs) on an indium tin oxide (ITO)-coated glass substrate. Two types of phosphor anode plates were employed to our transparent cathode back plate: One is an ITO glass substrate with a phosphor layer and the other is a Cr-coated glass substrate with phosphor layer. For the former case, light was radiated from both the front and the back sides, where luminance on the back was ~30% higher than that on the front in our experiments. For the other case, however, light was emitted only from the cathode back side as the Cr layer on the anode glass rolled as a reflecting mirror, improving the light luminance as much as ~60% compared with that on the front of one. This study seems to be discussed about the morphologies and field emission characteristics of CNT emitters according to the experimental parameters in fabricating the lamps emitting light on the both sides or only on the cathode back side. The experimental procedures are as follows. First, a CNT aqueous solution was prepared by ultrasonically dispersing purified SWCNTs in deionized water with sodium dodecyl sulfate (SDS). A milliliter or even several tens of micro-liters of CNT solution was deposited onto a porous alumina membrane through vacuum filtration. Thereafter, the alumina membrane was solvated with the 3 M NaOH solution and the floating CNT film was easily transferred to an ITO glass substrate. It is required for CNT film to make standing CNTs up to serve as electron emitter through an adhesive roller activation.