• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.481.1-481.1
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• 2014

Dye-sensitized solar cell (DSSC) has been extensively investigated as the next generation energy source. Despite attractive features of simple fabrication process and its economical efficiency, there are some problems such as low efficiency and low long-term stability. Many groups have attempted the proposed way to improve the cell efficiency and long-term stability such as low recombination rate between $TiO_2$ surface and electrolyte, the development of new dye molecules capable of light adsorption as broadly as possible, the fabrication of a solid-state DSSC by replacing the liquid electrolyte, and protective coating on glass. In this work, we confirmed new dye-coating conditions to maximize the dye adsorption between the dye and $TiO_2$ nanoparticle surface. The experiment results coating conditions with the coating temperature of $70^{\circ}C$, the dye concentration of 10 mM and the coating time of 3 min. Conditions have two times, three times cycle the experiment in progress efficiency rises.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.207.2-207.2
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• 2014

ZnO는 큰 액시톤 결합에너지(60 meV)와 넓은 밴드갭(3.36 eV)을 가지고 있어 광소자 분야에서 다양하게 연구 되어지고 있다. 또한 높은 광 투과도로 인해 여러 투명 제품 분야에도 적용되어지고 있다. 본 연구에서는 높은 가시광 투과도와 함께 근적외선 차폐를 위한 스마트 필름 제작을 위해 RF sputter를 이용하여 상온에서 ZnO 나노박막을 제작하여 광학적인 특성들을 분석하였다. 실험은 Glass 와 PET 위에 동시에 성장시켜 RF power 변화와 Ar, O2의 가스 분압비, Working Pressure의 변화를 변수로 두어 진행하였다. 측정은 Ellipsometry를 이용하여 광학적인 두께와 굴절률을 조사하였고 UV visible spectrometer를 통해 광학적인 투과도를 확인하였다.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.337-337
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• 2000

This paper describes a Chuck System developed for scaling PDP gas hole on PDP panel glass. There are lots of constraints for designing Chuck System: high temperature, high vacuum, precious motor control etc. A such constraints was considered by design of structure and by selecting of parts and material for Chuck System. The Chuck System was manufactured and assembled after the design process. It was applied on the PDP process unit. For sealing POP hole, precious control of a step motor was important in this system. For this experiment, a step motor, motor driver and micro controller(80196KC) were used.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.90-90
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• 1998

전계 에미터 어레이(FEA)는 진공에서 전계률 인가하여 전극으로부터 전자률 방출시키는 전자원으로서, 마이크로파 소자 및 명판 디스플레이, 센서 둥에 이용된다 .. Transfer Mold 법 은 뾰족한 에미터 립과 게이트 절연막 및 게이트 전극 충올 형성한 후 유리와 같은 기판에 이전 시키는 방법으로, 이러한 방법은 Mold 형태 위에 코탱 충의 두께 조절과, 게이트와 립 높이 조절이 가능하며, 그리고 유리 기판 위에 접착하여 대면적의 평판 디스플레이를 제작 할 수 었다는 장점이 있다[1,2]. 본 연구에서는 일반적으로 사용되는 실리콘 기판올 습식 식 각하여 Mold률 제작하는 방법 대선에, 측벽 스페이스 구조률 이용한 새로운 방법의 Mold 형태률 이용하여 게이트률 가진 에마터 립올 제작하였다. 먼저 실리콘 기판 위에 산화막올 증착하고 그 위에 게이트 전극파 게이트 절연막을 LPCVD 방법으로 증착하여 구명 형태로 패터닝 한 후, BPSG(Boro Phospher Silicate Glass) 박막올 증착하여 고온에서 훌러 내려 뾰족한 형태의 주형(Mold)률 제작한 후 TiN율 증착하여 정전 접합(an여ic bon벼ng)이나 레 진(resine)둥으로 유리률 접합한 후 KOH 용액으로 실리콘 기판옵 뒷면부터 식각해 낸다. 그 다옴, 립과 게이트 위에 있는 절연막올 제거한 후 뾰족한 전계 에미터 어레이륭 제조하 였다. 자세한 제조 공정 및 제작된 에미터 립의 특성은 학회에서 발표될 예정이다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.260-260
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• 2010

현대 사회가 고도의 정보화 사회로 변화하는 가운데 능동행렬 액정 표시 소자(AMLCD : Active Matrix Liquid Crystal Display)는 정보 디스플레이 분야에서 없어서는 안될 중요한 위치를 차지하게 됐다. AMOLED는 자체발광형이므로 LCD에 비해 시야각, contrast, 시인성이 우수하며, 화소를 낮은 전류 밀도로 구동시킨다는 장점이 있다. OLED 소자는 각 화소를 구동할 수 있는 박막 트랜지스타가 필요하며, OLED 소자와 결합된 TFT의 연구도 진행되고 있다. 더욱이 모바일 소자에서 낮은 구동 전압과 비용의 절감을 위해 System On Panels (SOP)에 대한 연구가 또한 진행되고 있다. LCD 패널위에 콘트롤러와 메모리와 같은 소자를 직접화시킴으로써 액정 표시 장치를 소형화시킬 수 있으며 신뢰성을 향상시킬 수가 있다. 본 연구에서는 SOP를 위한 ELA 방법을 통하여 결정화한 poly-Si TFT memory를 제작하여 전기적 특성을 조사하였다.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.17 no.3
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• pp.53-58
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• 2008

This study was conducted to evaluate the flatness of the porous type of dicing chuck. Two measurement systems for a vacuum chuck with a porous type of ceramic plate were prepared using a digital indicator and a laser interferometer. 6 inch of silicon and glass wafer were also used. Vacuum pressure from 100mmHg to 700mmHg by 100mmHg was increased. From experiments, chucked-wafer flatness was converged to the dicing chuck flatness itself even though the repeatability of contact method using indicator was unstable. Finally, the chuck flatness was estimated below $2{\mu}m$ with peak-to valley value.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.59-59
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• 2000

Recently low resistance of bus line is required for large screen size TFT-LCD panels. As a result, lower resistance Al-alloy is currently reviewed extensively. The resistivity is required smaller than 10 $\mu$$\Omega$cm. In this paper, Al-Nd thin film were deposited on glass substrates by D.C. magnetron sputtering system under various condition. Its properties were characterized by SEM, AFM, XRD, 4-ping-probe. The optimal condition of Al-Nd was 12$0^{\circ}C$, 125W, 0.4Pa, 30sccm(Ar) and 35$0^{\circ}C$, 20min. annealing. At that condition the resistivity of Al-Nd(2wt.%) was about 4 $\mu$$\Omega$cm. The minimum contact resistance of ITO/Nd was about 110$\mu$$\Omega$cm in the condition of 30$0^{\circ}C$, Ar 30 sccm. O2.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.149-149
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• 2011

CdS films were deposited on glass substrates by R.F. magnetron sputtering method and the films were annealed at various substrate temperatures ranging from room temperature to $300^{\circ}C$. Structural properties of the films were studied by X-ray diffraction analysis. The structural parameters as crystallite size have been evaluated. The crystallite sizes were found to increase, and the X-ray diffraction patterns were seen to sharpen by increasing substrate temperatures. X-ray diffraction patterns of these films indicated that they contain both cubic (zincblende) and hexagonal (wurtzite) structures as a mixture. Optical properties of the films were measured at room temperature by using UV/VIS spectrometer in the wavelength range of 190 to 1100nm and optical absorption coefficients were calculated using these data. The energy gap of the films was found to decrease, and the band edge sharpness of the optical absorption was seen to oscillate by annealing. The results show that heat treatments under optimal annealing condition can provide significant improvements in the properties of CdS thin films.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.203-203
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• 2012

The SWCNTs network are formed on various plastic substrates such as poly(ethylene terephthalate) (PET), polyimide (PI) and soda lime glass using roll-to-roll printing and spray process. Selective patterning of carbon nanotubes film on transparent substrates was performed using a femtosecond laser. This process has many advantages because it is performed without chemicals and is easily applied to large-area patterning. It could also control the transparency and conductivity of CNT film by selective removal of CNTs. Furthermore, selective cutting of carbon nanotube using a femtosecond laser does not cause any phase change in the CNTs, as usually shown in focused ion beam irradiation of the CNTs. The patterned SWCNT films on transparent substrate can be used electrode layer for touch panels of flexible or flat panel display instead indium tin oxide (ITO) film.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.383-383
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• 2011

We fabricated thermal annealing-free polymer solar cells (PSC) by processing with additive and applied to flexible substrates. The 1, 8-Diiodooctane of 3 vol% blended with active solution resulted in enhancement of $J_{SC}$ due to increase of light absorption and hole mobility as improving the crystallinity of P3HT. In addition, the $V_{OC}$ of PSCs with additive was improved by inserting $TiO_2$ layer without any treatment. The $TiO_2$ layer prevented the direct contact between active layer and Al electrode and reduced the charge recombination near Active/Al interface. It was confirmed by calculation of J0 and photo-voltage transient measurement. The power conversion efficiencies of annealing-free PSCs using additive for ITO glass and flexible (ITO PEN) substrate were obtained 3.03% and 2.45%, respectively.