• Journal of the Korean Society for Heat Treatment
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• v.24 no.5
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• pp.243-250
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• 2011

When alloys are vacuum-deposited on cooled substrates, super-rapidly cooled alloy films in the unequilibrium state can be obtained. As an application of this method, Ag-Cu, Ag-Ni and Ag-C alloys were successfully produced, and their mechanical properties with tempering temperature were investigated. The following results were obtained : (1) In case of Ag-Cu alloys, the solid solution was hardened by tempering at $150^{\circ}C$. The hardening is considered to occur when the solid solution begins to decompose into ${\alpha}$ and ${\beta}$ phases. The Knoop hardness number of a 40 at.%Ag-Cu alloy film deposited on a cooled glass substrate was 390 $kg/mm^2$. The as-deposited films were generally very hard but fractured under stresses below their elastic limits. (2) In case of Ag-Ni and Ag-C alloys, after the tempering of 4 at.%Ni-Ag alloy at $400^{\circ}C$ and of 1 and 2 at.%C-Ag alloys at $200^{\circ}C$, they were hardened by the precipitation of fine nickel and carbon particles. The linear relationship between proof stress vs. $(grain\;diameter)^{-l/2}$ for bulk silver polycrystals can be applied to vacuum-deposited films up to about 0.1 ${\mu}m$ grain diameter, but the proof stress of ultra-fine grained silver with grain diameters of less than 0.1 ${\mu}m$ was smaller than the value expected from the Petch's relation.

• 한국태양에너지학회:학술대회논문집
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• 2009.11a
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• pp.32-37
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• 2009

An energy loss through the window system occupies about 10 to 30 percent on energy consumption of the whole building. That is the reason, several elements for a building composition of window system are the weakest from the heat. Insulation performance increases for the reducing heat loss. Heat transfer through the window system that is reducing heat transfer through conduction, convection and radiation. Insulation performance reinforcement methods classify improving heat specific quality of window system and improving efficiency of whole window system. The most application method among each methods is reducing emission ratio of the window system(Low-E glass), increasing a number of glazing(multiple window) and a method of vacuuming between glazing and glazing. Therefore this study is investigated a sort of glazing and specific character, U-value calculation with changing glazing thickness and calculation of temperature distribution and U-value with a glazing charging gas kind from double glazing. For a conclusion, an aspect of U-value figure at the smallest value case of vacuum glazing with Low-E coating. That means insulation efficiency is the best advantage during a building plan selecting vacuum glazing with Low-E coating for a energy saving aspect. In this way, U-value become different the number of glazing, coating whether or not and selecting injection gas. Therefore selecting of glazing is very important after due consideration by a characteristic and use of building and consideration of strong point and weak point.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.3
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• pp.1002-1007
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• 2012

The manufacturing method of the pillar is one of the main process where it is used in vacuum glazing and semi-conductor display field. Pillar can be arranged by screen printing method. However it may unable to spread all pattern of metal mask according to the ingredient of the mixture. In addition, spreaded mixture doesn't maintain the original shape according to the viscosity. In this research, the pillar tried to be arranged through the screen printing by using the inorganic compound of the alumina and silica base. This study suggested a method in which it can decrease the test frequency and design the composition of the vacuum glass pillar by using the mixture design.

• Journal of the Korean Society for Heat Treatment
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• v.27 no.4
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• pp.175-179
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• 2014

IGZO thin films were prepared by radio frequency (RF) magnetron sputtering on glass substrates and then annealed in vacuum for 30 minutes at 100, 200 and $300^{\circ}C$, respectively. The thickness of films kept at 100 nm by controlling the deposition rate. While the optical transmittance and sheet resistance of as deposited films were 91.9% and $901{\Omega}/{\Box}$, respectively, the films annealed at $300^{\circ}C$ show the optical transmittance of 95.4% and the sheet resistance of $383{\Omega}/{\Box}$. The experimental results indicate that vacuum-annealed IGZO film at $300^{\circ}C$ is an attractive candidate for the transparent thin film transistor (TTFT) in large area electronic applications.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.6
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• pp.468-472
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• 2005

In order to prevent adhering of molten glass on a mold wall, the wall is swabbed with lubricant oil before forming. However, the swabbing process can be removed from the entire processes of the glass forming if the mold wall is made of a porous sintered material. The purpose of the present study is to manufacture a sintered material(having a sintered density of $85{\~}90\%$)which is the most appropriate into. plane material for a glass mold. For the research, SUS310L-based coarse powder (${\~}150{\mu}m$) and SUS420J2-based fine powder ($40{\~}50{\mu}m$) were used for the compact materials, and effects of compaction pressure and sintering condition(atmosphere, temperature) were investigated. The results obtained were as fellows. (1) By means of solid phase sintering, a desired sintering density could not be achieved in any case when using a 310L-based powder having a large particle size. (2) When sintering green compacts(compaction pressure of $2ton/cm^2$) in a commercial vacuum furnace(at $1300^{\circ}C$ for 2 hours), the sintered compacts had densities of $6.2g/cm^3(79\%)$ for 310L + 0.03$\%$B, $6.6g/cm^3 (86\%)$ for 420J2, $7.3g/cm^3(95\%)$ for 420J2+(0.03)$\%$B, and $7.6g/cm^3(99\%)$ for 420j2+(0.06)$\%$B, respectively. As a result, it is regarded that sintered compacts having a desired porosity may be achieved by vacuum sintering the 420J2-based powder (low pressure compaction) and the 310L+0.03$\%$B-based powder (high pressure compaction).

• Journal of the Korean Vacuum Society
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• v.7 no.1
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• pp.17-23
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• 1998

$Pb(Fe_{0.5}Nb_{0.5}O_3(PFN)$ thin films were prepared by rf magnetron co-sputtering method on $SiO_2/Si$, ITO/glass, and $Pt/Ti/SiO_2/Si$ substrates and post-annealed at the $N_2$ atmosphere by RTA(rapid thermal annerling). The degree of crystallinity of PFN films was identified on various substrates. Electrical properties of PFN films was characterized for $Pt/PFN/Pt/Ti/SiO_2/Si$ structure. The composition of PFN films was estimated by EPMA (electron probe micro analysis). PFN films would be crystallized better to perovskite phase on ITO/glass substrate than $SiO_2/Si$ substrate. This may be induced by the deformation of Pb deficient pyrochlore phase due to Pb diffusion into $SiO_2/Si$ substrate. PFN films on $Pt/Ti/SiO_2/Si$ substrate. PFN films with 5-10% Pb excess were crystallized to perovskite phase from $500^{\circ}C$ temperature. In summary, we show that Pb composition and annealing temperature were critically influenced on crystallinity to perovskite phase. When PFN film with 17% Pb excess was annealed at $600^{\circ}C$ at the $N_2$ atmosphere for 300kV/cm and 88. Its remnant polarization coercive field $2.0 MC/cm^2$ and 144kV/cm, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.186-186
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• 2000

After LeComber et al. reported the first amorphous hydrogenated silicon (a-Si: H) TFT, many laboratories started the development of an active matrix LCDs using a-Si:H TFTs formed on glass substrate. With increasing the display area and pixel density of TFT-LCD, however, high mobility TFTs are required for pixel driver of TF-LCD in order to shorten the charging time of the pixel electrodes. The most important of these drawbacks is a-Si's electron mobiliy, which is the speed at which electrons can move through each transistor. The problem of low carier mobility for the a-Si:H TFTs can be overcome by introducing polycrystalline silicon (poly-Si) thin film instead of a-Si:H as a semiconductor layer of TFTs. Therefore, poly-Si has gained increasing interest and has been investigated by many researchers. Recnetly, fabrication of such poly-Si TFT-LCD panels with VGA pixel size and monolithic drivers has been reported, . Especially, fabricating poly-Si TFTs at a temperature mach lower than the strain point of glass is needed in order to have high mobility TFTs on large-size glass substrate, and the monolithic drivers will reduce the cost of TFT-LCDs. The conventional methods to fabricate poly-Si films are low pressure chemical vapor deposition (LPCVD0 as well as solid phase crystallization (SPC), pulsed rapid thermal annealing(PRTA), and eximer laser annealing (ELA). However, these methods have some disadvantages such as high deposition temperature over $600^{\circ}C$, small grain size (<50nm), poor crystallinity, and high grain boundary states. Therefore the low temperature and large area processes using a cheap glass substrate are impossible because of high temperature process. In this study, therefore, we have deposited poly-Si thin films on si(100) and glass substrates at growth temperature of below 40$0^{\circ}C$ using newly developed high rate magnetron sputtering method. To improve the sputtering yield and the growth rate, a high power (10~30 W/cm2) sputtering source with unbalanced magnetron and Si ion extraction grid was designed and constructed based on the results of computer simulation. The maximum deposition rate could be reached to be 0.35$\mu$m/min due to a high ion bombardment. This is 5 times higher than that of conventional sputtering method, and the sputtering yield was also increased up to 80%. The best film was obtained on Si(100) using Si ion extraction grid under 9.0$\times$10-3Torr of working pressure and 11 W/cm2 of the target power density. The electron mobility of the poly-si film grown on Si(100) at 40$0^{\circ}C$ with ion extraction grid shows 96 cm2/V sec. During sputtering, moreover, the characteristics of si source were also analyzed with in situ Langmuir probe method and optical emission spectroscopy.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.351-352
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• 2012

UV LED에서 p-GaN층의 높은 일함수와 자체 면저항이 크기 때문에 current spreading layer인 ITO (indium tin oxide) 투명전극이 사용되고 있다. 따라서 높은 UV 파장대 투과율과 낮은 면 저항이 매우 중요하다. 본 연구에서, RF magnetron sputter를 사용하여 ITO 투명전극을 glass(boro33)에 120 nm 두께로 증착하였다. 그 후 RTA (rapid thermal annealing)을 이용해 120초 동안 $600^{\circ}C$에서 Air, $N_2$ (15 sccm), vacuum 환경에서 열처리를 하여 UV-Vis-NIR spectrophotometer를 사용해 ITO 박막의 투과율을 측정하고, Hall measurement system을 이용하여 전기적 특성을 측정하였다. Fig. 1과 같이 열처리 환경에 따라 ITO 박막의 투과율이 변하고 또한 Table 1과 같이 전기적 특성도 변함을 알 수 있었다. Air 환경에서의 열처리는 reference 샘플과 비교 했을 때 400 nm 이하의 파장에서 투과율이 증가하였지만 400 nm 이상의 파장에서는 투과율이 낮아짐을 볼 수 있고, 면 저항 (Ohm/sq)은 오히려 reference (as deposited) 샘플과 비교하여 24 Ohm/sq 증가하는 것을 알 수 있었다. 반면에 $N_2$, vacuum 환경에서 열처리는 reference (as deposited) 샘플 보다 380 nm 파장대에서 16% 정도 높은 투과율을 보였고, 면저항 역시 2배 이상 낮아졌다. 둘 다 비슷한 투과율과 면저항을 나타내었지만 vacuum 환경이 좀 더 우수한 광학적 특성을 나타내었고 반면에 $N_2$ 환경은 좀 더 낮은 면저항을 나타내었다. ITO 박막을 증착한 후 vacuum 환경에서 열처리를 통하여 제작된 UV-LED (중심 파장 380 nm)가 Fig. 2와 같이 입력 전류 450 mA에서 광출력이 46% 정도 향상 되었고 안정된 I-V 특성 보였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.389-390
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• 2012

In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.95-95
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• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.