• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.303-308
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• 2004

This paper descibes on the characteristics of Ta-N(tantalum nitride) ceramic thin-film strain gauges which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-nitrogen atmosphere (Ar-$(4{\sim}16%)N_{2}$) for high-temperature applications. These films were annealed in $2{\times}10^{-6}$ Torr vacuum furnace at the range of $500{\sim}1000^{\circ}C$. Optimum deposition atmosphere and annealing temperature were determined at $900^{\circ}C$ for 1 hr. in 8% $N_{2}$ gas flow ratio. Under optimum formation conditions, the Ta-N thin-film for strain gauges was obtained a high-resistivity of $768.93{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance (TCR) of -84 ppm/$^{\circ}C$ and a good longitudinal gauge factor (GF) of 4.12.

• Journal of the Korean Ceramic Society
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• v.27 no.8
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• pp.1043-1049
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• 1990

In this work, strength of ceramic fibers and monofilament composites were evaluated on the basis of Weibull's theory. The fibers used were β-SiC and γ-Al2O3 monofilament composites was fabricated by coating Al on the fiber surface by the use of vacuum evaporation method. Average tensile strength of ceramic fibers showed the tendency to linearly decrease with increasing gauge length. Also, Weibull moduli of ceramic fibers were decreased with increasing gauge length, Weibull modulus of β-SiC was 3.5 for 6-50mm, 2.8 for 100-200mm. Weibull modulus of γ-Al2O3 was 6.5 for 20-50mm, 6 for 100mm. Fibers in monofilament retained their original as-produced strength to exposure temperature of 400℃. However, tensile strength of both monofilament composites approved to remarkably degrade due to interfacial reaction-induced flaws on the fiber surface after thermal exposure of 600℃. In this case, Weibull modulus of monofilament composites was 2.7 for β-SiC and 5.2 for γ-Al2O3 respectively.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.403-410
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• 2009

Vacuum chambers have wide application for a variety of purposes such as material processing, vacuum gauge calibration, etc. As the dynamic pressure generated in such chamber is non-uniform, in many industrial as well as research processes, it is vital to know the non-uniform gas distribution with associated gas flow regimes and the ways of minimizing these pressure non-uniformities. In the present work, the behavior of gas flow in a vacuum chamber, during continuous gas flow, is described in the pressure range 0.1-133 Pa and the effect of baffle plate in minimizing the pressure non-uniformities is investigated. It was observed that maximum deviations in the pressure occur near the gas inlet point and that the effect of baffle plate in minimizing the pressure non-uniformities is more obvious in the transitional flow regime.

• Korean Journal of Food Science and Technology
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• v.19 no.6
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• pp.550-555
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• 1987

Strain gauges attached on the Bourdon tube and load cell were used as the sensors for measuring the vacuum pressure in drying chamber and the weight loss of Shiitake mushrooms respectively. The vacuum drying system was interfaced further with the Bear II microcomputer. The interface devices used were built with such IC chips as MC 6821, ADC 0809, SN 74244 and SN 7424. The relationship between readings of vacuum gauge (P, mmHg) and digital outputs (D) from the microcomputer was represented by P =3.08 D-13.4875(r=0.9999). The weights of drying sample (W) were also related with the digital outputs (D) by W=0.4076 D-6.4762 (r=0.9999). During the vacuum drying of Shiitake mushrooms. the data on pressure and weight were recorded at regular intervals using an acquisition program on the microcomputer system. The Page model was fitted well to the drying data of Shiitake mushrooms. resulting in the following empirical equations : $(M-M_e)/(M_o-M_e)=\exp(-0.1569t^{1.0048})$ at 400 mm Hg up to 14 hours and $(M-M_e)/(M_o-M_e)=\exp(-0.1385_t^{1.2688})$ at 600 mm Hg up to 8 hours.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.187-187
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• 2016

진공 압력에 따른 플라즈마 발생의 관계, 전압에 따른 방전 밝기, gas와 방전 전극에 따른 플라즈마 색의 변화 등 실험을 통하여 학부생들에게 진공 시스템과 플라즈마의 이해도를 높이기 위해 Geissler tube cart를 제작하였다. Pump는 TMP station (PFEIFFER Vacuum Hi Cube ECO 80)을 사용하였으며 reducer를 이용하여 CF-4.5"에서 CF-2.75" adaptor를 설치, gate valve를 연결하여 진공도를 조절 할 수 있게 하였으며, 5-way를 이용하여 왼쪽은 gas line, 정면 view port, 상단 geissler tube, 후면 compact full range gauge를 설치하였고, cart 제작 결과를 Fig. 1에 나타내었다. Geissler tube의 수치모델은 Fig. 2에 나타내었다. 저진공(<10-3 Torr) 영역부터 고진공(<10-4 Torr) 영역까지 진공도에 따른 방전을 관찰 할 수 있으며, 표면과 플라즈마 사이의 전위 변화에 따른 쉬스(sheath) 관찰, trans 와 slidacs를 이용하여 전압 조정이 가능하기 때문에 전압에 따른 방전 관찰과 gas line을 통한 gas 주입에 따른 색의 변화를 관찰이 가능하도록 설계하였다.

• Applied Science and Convergence Technology
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• v.23 no.2
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• pp.83-89
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• 2014

Adsorption of residual gas molecules damped the emission current of a W (310) field electron emission (FE) emitter. The damping speed was linearly proportional to the pressure gauge readings at pressure ranging from ${\sim}10^{-8}Pa$ to ${\sim}10^{-9}Pa$, and the proportionality constant was employed to measure pressure in the $10^{-10}Pa$ range. A time plot of FE current revealed the existence of an "initial stable region" after the flash heating of W(310) FE, during which the FE current damps very slowly. The presence of non-hydrogen gas removed this region from the plot, supplying a means of qualitatively analysing the gas species.

• Journal of Biosystems Engineering
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• v.32 no.6
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• pp.448-454
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• 2007

This study was conducted to develop a 100 kPa soil tensiometer mainly consisted of a porous ceramic cup, water-holding tube, and a digital vacuum gauge, through theoretical design analysis and experimental performance evaluation. Major findings were as follows. 1. Theoretical analysis showed that air entry value of a porous media decreased as the maximum effective size of the pore increased, and the maximum diameter of the pores was $2.9\;{\mu}m$ for measuring up a 100 kPa of soil-water tension. 2. Property analysis of tensiometer porous cups supplied in Korean domestic market indicated that main components were $SiO_2$ and $Al_2O_3$ with a porosity range of $33.8{\sim}49.3%$. 3. The porous cup selected through sample fabrication and air-permeability tests showed weight ratios of 87% and 11% for $Al_2O_3$ and $SiO_2$. The analysis of SEM (scanning electron microscope) images showed that the sample was sintered at temperatures of about $1150^{\circ}C$, which consisted of pores with sizes of up to 25% of those for commercial porous cups. 4. The prototype soil tensiometer was fabricated using the developed porous cup and a digital vacuum gauge that could measure water tension with a pressure of 85 kPa in air tests. 5. In-soil tests of the prototype conducted during a period of 25-day drying showed that soil-water tension values measured with the prototype and commercial units were not significantly different, and soil-water characteristic curves could be established for different soils, confirming accuracy and stability of the prototype.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.363.2-363.2
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• 2016

Stretchable strain sensors are becoming essential in diverse future applications, such as human motion detection, soft robotics, and various biomedical devices. One of the well-known approaches for fabricating stretchable strain sensors is to embed conductive nanomaterials such as metal nanowires/nanoparticles, graphene, conducting polymer and carbon nanotubes (CNTs) within an elastomeric substrate. Among various conducting nanomaterials, CNTs have been considered as important and promising candidate materials for stretchable strain sensors owing to their high electrical conductivity and excellent mechanical properties. In the past decades, CNT-based strain sensors with high stretchability or sensitivity have been developed. However, CNT-based strain sensors which show both high stretchability and sensitivity have not been reported. Herein, highly stretchable and sensitive strain sensors were fabricated by integrating single-walled carbon nanotubes (SWNTs) and nylon textiles via vacuum-assisted spray-layer-by-layer process. Our strain sensors had high sensitivity with 100 % tensile strain (gauge factor ~ 100). Cyclic tests confirmed that our strain sensors showed very robust and reliable characteristic. Moreover, our SWNTs-based strain sensors were easily and successfully integrated on human finger and knee to detect bending and walking motion. Our approach presented here might be route to preparing highly stretchable and sensitive strain sensors with providing new opportunity to realize practical wearable devices.

• Applied Science and Convergence Technology
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• v.25 no.6
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• pp.124-127
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• 2016

Humidity calibration for a temperature-stable quartz oscillator (TSQO) was investigated to exclude the influences of relative humidity on the TSQO output in order to use the corresponding devices outdoors. The TSQO output is a voltage that is inversely proportional to the electric impedance of the quartz oscillator, which depends on the viscosity and density of the measured gas. The TSQO output was humidity calibrated using its humidity dependence, which was obtained by varying the relative humidity (RH) from 0 to 100 RH% while other conditions were kept constant. The humidity dependencies of the TSQO output were fit by a linear function. Subtracting the change in the TSQO output induced by the change in humidity, calculated with the function from the experimentally measured TSQO output for a range of 0-100RH%, eliminated the influence of humidity on the TSQO output. The humidity calibration succeeded in reducing the fluctuations of the TSQO output from 0.4-3% to 0.1-0.3% of the average values for a range of 0-100RH%, at constant temperatures. The necessary stability of the TSQO output for application in hydrogen sensors was below one-third of the change observed for a hydrogen leakage of 1 vol.% hydrogen concentration, corresponding to 0.33% of the change in each background. Therefore, the results in this study indicate that the present humidity calibration effectively suppresses the influence of humidity, for the TSQO output for use as an outdoor hydrogen sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.376-377
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• 2006

This paper presents the characteristics of Ta-N thin film strain gauges that are suitable for harsh environemts, which were deposited on thermally oxidized Si substrates by DC reactive magnetronsputtering in an argon-nitrogen atmosphere (Ar-$N_2$ (4 ~ 16 %)). These films were annealed for 1 hr in $2{\times}10^{-6}$ Torr in a vacuum furnace with temperatures that ranged from 500 - $1000^{\circ}C$. The optimized deposition and annealing conditions of the Ta-N thin film strain gauges were determined using 8 % $N_2$ gas flow ratio and annealing at $900^{\circ}C$ for 1 hr. Under optimum formation conditions, the Ta-N thin film strain gauges obtained a high electrical resistivity, ${\rho}\;=\;768.93\;{\mu}{\Omega}{\cdot}cm$, a low temperature coefficient of resistance, $TCR\;=\;-84\;ppm/^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12. The fabricated Ta-N thin film strain gauges are expected to be used inmicromachined pressure sensors and load cells that are operable under harsh environments.