1 |
J. K. N. Sharma and D. R. Sharma, Measurement of the effective pressure distribution in axial direction in a dynamic vacuum system, J. Vac. Sci. Technol. (A) 6 (4), 2508 (1988)
DOI
|
2 |
G. Horikoshi, T. Kuroda, and Y Oka, "Pressure distribution in a large vacuum chamber with a large gas load and a large pumping speed", Vacuum, Vol. 44 (5-7), 617 (1993)
DOI
ScienceOn
|
3 |
A. Berman, Total Pressure Measurement in Vacuum Technology (Academic Press, Inc. Orlando, Florida, 1985) p. 23
|
4 |
Armand Berman, Vacuum Engineering Calculations, Formulas, and Solved Exercises (Academic Press, Inc, 1992) p. 46
|
5 |
Richard W. Hyland and Charles R. Tilford, Zero stability and calibration results for a group of capacitance diaphragm gauges, J. Vac. Sci. Technol. A 3(3), 1731 (1985)
DOI
|
6 |
J. M. Hidalgo and J. L. de Segovia, "Uncertainties in calibration using capacitance diaphragm gauges as reference standard", Vacuum, Vol. 82, 1503 (2008)
DOI
ScienceOn
|
7 |
S. B. Nesterov, Yu. K. Vassiliev, and A. P. Kryukov, "Influence of the vacuum chamber shape on the non-uniformity of gas distribution, Vacuum, Vol. 53, 193 (1999)
DOI
ScienceOn
|
8 |
Karl Jousten, Handbook of Vacuum Technology (Wiley-Vch Verlag GmbH & Co. KGaA, 2008) pp. 80-81
|
9 |
P. Repa. Z. Cespiro, L. Peksa, T. Gronych, and J. Tesar, "Measurement of pressure differences between various positions in a vacuum chamber where pressure is generated dynamically", Metrologia, Vol. 36, 551 (1999)
DOI
ScienceOn
|
10 |
S. H. Lee, H. J. Seo, and S. Y. Yoo, Space Business and Applications of Vacuum Technology, J. Kor. Vac. Soc., Vol. 17, No. 4, 270 (2008)
과학기술학회마을
DOI
ScienceOn
|
11 |
W. Jitschin and G. Reich, "Molecular velocity distribution at large Knudsen numbers", J. Vac. Sci. Technol. A, Vol. 9 (5), pp. 2752 (1991)
DOI
|
12 |
S. S. Hong, Y. H. Shin, and K. H. J. Chung, Bilateral comparison of medium vacuum standards between PTB and KRISS, Journal of the Korean Physical Society, Vol. 44, No. 6, 1364 (2004)
|
13 |
Shin-Ichi Nishizawa and Masahiro Hirata, "DSMC analysis of thermal transpiration of capacitance diaphragm gauge", Vacuum, Vol. 67, 301 (2002)
DOI
ScienceOn
|
14 |
P. L. M. Heydemann, C. R. Tilford, and R. W. Hyland, J. Vac. Sci. Technol. A 14 (1), 597 (1977)
DOI
|
15 |
P. J. Szwemin, N. Niewinski, and K. Szymanski, "Conductance of orifeces in the spherical and cylindrical chambers of calibration systems", Vacuum, Vol. 46 (8-10), 875 (1995)
DOI
ScienceOn
|
16 |
F. Stanek, J. Tesar, L. Peksa, T. Gronych, and P. Repa, "Extending the range of pressure generated dynamically up to 100 Pa in a calibration chamber pumped by a turbomolecular pump", Vacuum, vol. 67, 307 (2002).
DOI
ScienceOn
|
17 |
B.C. Moore, Causes and consequences of nonuniform gas distributions in vacuum system, J. Vac. Sci. Technol. Vol. 6, No. 1, 246 (1969)
DOI
|
18 |
S. S. Hong, Y. H. Shin, and K. H. J. Chung, J. Kor. Vac. Soc. 5, 181 (1996)
|
19 |
L. Peksa, T. Gronych, P. Repa, and J. Tesar, "Measurement of the pressure differences in a large chamber where the pressure is generated dynamically", Vacuum, Vol. 67, 333 (2002)
DOI
ScienceOn
|
20 |
O. Boulon and R. Mathes, Direct Monte Carlo method for molecular and transitional flow regimes in vacuum components with static and moving surfaces, J. Vac. Sci. Technol. A 17 (4), 2080 (1999)
DOI
|
21 |
S. S. Hong, Y. H. Shin, and K. H. J. Chung, Measurement uncertainties for vacuum standards at Korea Research Institute of Standards and Science, J. Vac. Sci. Technol. A 24, 1831 (2006)
DOI
ScienceOn
|
22 |
M. K. No, T. K. Whang, and J. W. Park, Screwtype Dry Vacuum Pump Technology and Application in Semiconductor Process, J. Kor. Vac. Soc. Vol. 17, No. 4, 292 (2008).
DOI
ScienceOn
|