• Title/Summary/Keyword: Vacuum Gauge

Search Result 75, Processing Time 0.027 seconds

The Study of Vacuum Gauge Characteristics in the High Vacuum Range (고진공 영역의 진공게이지 특성연구)

  • 홍승수;신용현;임재영;박재홍;이철로;정광화
    • Journal of the Korean Vacuum Society
    • /
    • v.2 no.1
    • /
    • pp.1-8
    • /
    • 1993
  • 당 연구실에서 개발 제작된 동적교정방법을 이용한 고진공표준기를 사용하여 10-6∼10-3torr 영역에서 가장 널리 쓰이는 spinning rotor gauge와 열음극전리 진공게이지들의 특성을 상품화되어 사용되는 방법대로 측정하여 조사하여 보았다. 게이지들의 직선성, 단기간(15일)에 행해진 반복측정에서의 scattering을 조사하였고 또한 N2, CO, He, H2, O2, Ar 가스에 대한 감도와 압력을 올릴 때와 내릴 때의 hysteresis를 조사하였다.

  • PDF

Intercomparison of National High Vacuum Standards Between Korea and Italy (한국 KRISS와 이태리 IMGC간의 고진공 국가표준의 국제비교)

  • ;;;G. Rumiano
    • Journal of the Korean Vacuum Society
    • /
    • v.4 no.2
    • /
    • pp.135-141
    • /
    • 1995
  • Spinning Rotor Gauge(SRG)를 전달표준기(transfer standard gauge)로 사용하여 한국표준과학연구원(KRISS)의 고진공표준과 이태리 표준연구소인 IMGC(Istituto 야 Metrologia Gustavo Colonnetti)고진공표준의 국제비교를 실시하였다. 그 방법은 SRG의 accommodation coefficient(s)를 각 연구실의 고진공표준기로 측정하여 그 결과를 비교하였다. 이 결과 두 기관에서 교정한 SRG 볼의 $\sigma$값의 평균차이는 0.696%로서 양국의 고진공표준은 오차범위내에서 일치하는 것으로 나타났다.

  • PDF

Microcomputer Based Vacuum Drying System and its Application to the Vacuum Drying of Green Red Pepper (마이크로컴퓨터 감압건조(減壓乾燥)시스템의 제작운영(製作運營)과 풋고추의 감압건조특성(減壓乾燥特性))

  • Chun, Jae-Kun;Kang, Jun-Soo
    • Applied Biological Chemistry
    • /
    • v.30 no.1
    • /
    • pp.65-70
    • /
    • 1987
  • In Girder to measure the pressure and weight decrease of drying sample during the vacuum drying process of food, sensing devices were designed and constructed with strain gauge. Microcomputer based vacuum drying system was made up of these devices interfaced to apple II microcomputer. The electrical output signal from vacuum sensor which constituted with Bourdon tube whereon strain gauge attached were digitalized and input to microcomputer through the MC 6821 interface I.C. chip. The relationship between read-out digital value (D) from microcomputer and readings of vacuum gauge (P, mmHg) was P=-146.136+3.620D'(r=0.9994) The pressure control of vacuum dryer was successfully conducted in the range of $400{\sim}600\;mmHg$ accuracy. The digitalized load cell output (D) could be correlated with the real weight (W, g) as W=-14,000+0.585D (r=0.9998) Drying curves of green red pepper under $64^{\circ}C$, $400{\sim}600\;mmHg$ was similar to those of red pepper and differently affected by the degree of vacuum pressure but was varied according to their shape (cut or whole). Moisture movement of green red pepper during the vacuum drying process was fitted to Page model. The empirical equations obtained were $M-M_e/M_o-M_e={\exp}\;(-0.0673{\theta}^{1.177})$ and $M-M_e/M_o-M_e={\exp}\;(-0.0655\;{\theta}^{1.477})$ for whole and cut green red pepper, respectively.

  • PDF

Evaluation of low vacuum gauge using deadweight piston gauge (분동식압력계를 이용한 저진공게이지의 평가)

  • Woo, Sam-Yong;Choi, In-Mook;Song, Han-Wook;Kim, Boo-Shik
    • Journal of the Korean Vacuum Society
    • /
    • v.16 no.4
    • /
    • pp.244-249
    • /
    • 2007
  • Deadweight piston gauge have been widely used as a fundamental instrument of precise pressure measurement because they are robust, accurate, potable, convenient to use and are able to realize the definition of pressure as farce per unit area. Basically, a deadweight piston gauge consists of a piston mounted vertically in a close-fitting cylinder filled with a gas and weights of known mass values. The pressure to be measured is applied to the base of the piston generating an upward vertical force, and is balanced by the downward gravitational force generated by weights. These instruments can be used to measure pressures above 10 kPa because of tare weights including piston. However, using a variable bell-jar pressure method and a newly developed weight loading device we can extend the application range of deadweight piston gauge to lower pressures. In this paper, we present the practical calibration results for two CDGs(Capacitance diaphragm gauge, MKS) with full-scale ranges of 1.33 kPa and 13.3 kPa, respectively.

Development of a national medium vacuum standard by static expansion method (정적법을 이용한 중진공 국가표준기 개발)

  • Hong S. S.;Lim I. T.;Shin Y. H.;Chung K. H.
    • Journal of the Korean Vacuum Society
    • /
    • v.14 no.2
    • /
    • pp.59-68
    • /
    • 2005
  • We developed a national medium vacuum standard by static expansion method. A 133 Pa capacitance diaphragm gauge was calibrated and analysed according to the document of 'Guide to the Expression of Uncertainty in Measurement' of ISO. The results showed that the expanded uncertainty of $2.628\times10^{-3}$ Pa at $95\%$ confidence level and coverage factor of k=2.

Intercomparison of vacuum standards of Korea, United Kingdom, and Japan (진공표준의 국제비교 연구)

  • 홍승수;신용현;임종연;이상균;정광화
    • Journal of the Korean Vacuum Society
    • /
    • v.6 no.4
    • /
    • pp.308-313
    • /
    • 1997
  • TDS (Thermal Lkso~ption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and themla1 desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 pirrts. vacuum chamher and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1\times10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could he controlled from sub 11s to 100 11s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to $600^{\circ}C$ within t $\pm 1^{\circ}C$$difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data ;ind application on the CRT process analysis were shown.

  • PDF