• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.103.2-103.2
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• 2016

금속질화물 박막은 대표적인 고경도, 고내열성 박막이다. 박막의 두께는 기계적물성과 밀접한 상관관계가 있으며, 두께의 관리와 제어는 매우 중요하다. 3조 2배열의 증발원을 이용하여 Cathodic vacuum arc deposition(CVAD)법으로써 금속질화물 박막을 제조하였으며, 평균 두께 $4.38{\mu}m$, 표준편차 ${\pm}11.5%$ 박막들을 제조할 수 있었다. 증발원과 증발원 사이의 중첩이 되는 지점에 장착된 시편보다 각각의 증발원에서 평행한 위치에 장착된 시편에 코팅된 박막이 두꺼웠다.

• Journal of the Korean institute of surface engineering
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• v.37 no.1
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• pp.64-70
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• 2004

Cryogenic characteristics of austenitic stainless steel based on 304 steel with nickel and nitrogen were investigated at room temperature and $-196^{\circ}C$. The alloys were fabricated by vacuum arc furnace and cold working after homogenization treatment. The addition of nickel and nitrogen decreased the stability of $\delta$-ferrite and induced the stability against the formation of martensite to result significantly in enhancing ductility at $-196^{\circ}C$. Nitrogen reduced Md temperature, which was beneficial to the tensile strength and elongation at $25^{\circ}C$ and -196$^{\circ}C$.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1692-1694
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• 2003

펄스파워 시스템의 핵심은 스위치로서 현재까지 상당히 많은 종류가 개발되어 왔다. 이들 스위치는 구조 및 성능에 따라 장단점이 다르므로 목적에 적합한 시스템을 고려해 선택하여 사용되어 왔다. 일예로 펄스폭이 긴파형의 전류는 아크를 소화할수 있는 장치가 필요하다. 따라서 본 논문에서는 진공중의 두전극 (anode - cathode)을 나선형으로 제작하여 실험 하였다. 이방식은 결과적으로 아크를 회전시켜서 소호를 시키는 방식을 이용하였는데 전극의 수명을 연장시키는 효과를 얻을수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.478-478
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• 2010

대기압 플라즈마 공정은 진공 플라즈마 공정에 비해 장치의 경제성 및 규모면에서 많은 장점을 갖고 있어 대기압 공정에 대한 연구가 필요하다. 본 연구는 대기압 DC Arc Plasmatron을 이용하여 기체의 유량, 전류, plasmatron과 Si wafer 간의 거리를 변화시켜 이에 대한 Si wafer에 식각률(etching rate)을 확인하고 최적화 하였다. Ar은 2000sccm, $CF_4$는 50, 100sccm, 그리고 $O_2$는 0~1000sccm의 유량에 변화를 주었고 전류는 50A, 70A에서 식각하였다. 분석을 위해 Si wafer를 SEM(scanning electron microscope) 측정을 하였고, 그 결과 전류는 70A에서 기체 유량은 $CF_4$는 100sccm, $O_2$는 500sccm 일 때 식각률이 높게 나타났다. 그리고 전류와 유량을 위와 같은 조건에서 Plasmatron과 Si wafer 간의 거리를 5mm~15mm 변화를 주었을 때 Si wafer에 식각률을 측정해 본 결과 거리가 5mm일 때 식각률이 가장 높음을 확인 할 수 있었다. 아울러 거리를 변화시켰을 때가 유량이나 전압을 변화시킨 것 보다 식각률의 변화가 큰 경향을 보임을 알 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.2
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• pp.182-187
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• 2008

This paper dealt with the detection algorithm of series arcing, which is a cause of electric fires in low-voltage wiring systems. To find the distinguished electrical features of series arc, we simulated series arcing by the arc generator specified in UL1699. An electric heater, an inverter-controlled vacuum cleaner, and a phase-controlled incandescent lamp were used as loads to generate series arcing. A high-pass filter (HPF) with the low cut-off frequency of 3 kHz at -3 dB was fabricated and applied to separate the series arc signal from the AC voltage source. The experiment showed that the high frequency signal generates randomly during series arcing, and the phase-controlled incandescent lamp produces high frequency pulses even in normal state. In this case, the magnitude, the width, and the randomness of high frequency signal should be analyzed to estimate series arcing precisely.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.4
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• pp.326-331
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• 2000

We have fabricated the field emitter arrays coated with diamond-like carbon (DLC) films that improved the field emission characteristics. The nitrogen doped DLC films are prepared by the filtered cathodic vacuum are (FCVA) tehnique. The activation energy of the nitrogen doped DLC films are derived from electrical conductivity measurements. The silicon field emission arrays (FEAs) were prepared by the VLSI technique. The turn-on field was rapidly decreasing and the emission current was remarkably increasing the DLC-coated FEAs than the non-coated silicon FEAs. In the nitrogen doped FEAs, the turn-on field decreased and the emission current increased with increasing the nitrogen found out the field emission current and the work function of the DLC-coated FEAs was remarkably decreased than that of the non-coated silicon FEAs. As nitrogen doping concentrations are increased the work function of FEAs is decreased and the field emission properties are improved in nitrogen doped DLC-coated FEAs. This phenomenon in due the fact that the Fermi energy level moves to the conduction band by increasing nitrogen doping concentration.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.4
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• pp.145-151
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• 2005

The synthetic breaking test method was developed to evaluate the breaking performance of ultra high-voltage circuit breaker and made up of two independent circuits; current source circuit and voltage source circuit. In application of this test method, it is necessary to extend the arc of the test breaker. So, the new re-ignition system using VTGS (Vacuum Triggered Gap-Switch) was constructed to improve the efficiency and reliability of this test. In this re-ignition system, VTGS operates in high vacuum state of $5{\time}10^{17}$torr and control system consists of the triggering device and the air M-G (Motor-Generator). This re-ignition system showed the operating characteristics, such as delay time ($t_d$) and jitter time ($t_j$ not exceeding 5us and 1us respectively, and had the operating voltage of $25\~150kVdc$ at the gap distance of 24mm.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.5
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• pp.460-467
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• 2002

This paper deals with the distribution characteristics of the current density and axial magnetic flux density on the vacuum interrupter with axial magnetic field type using 3 dimension finite element analysis. An axial magnetic field parallel to the current flow in the arc column can improve the current breaking capacity of vacuum interrupter by affecting the arc mode. The axial magnetic flux density on the contact electrode surface is analyzed by inputting external current as a function of the transient time for sine half wave. And it also is analyzed within the gap distance of the contact electrode. The peak value of current but is decreased with the descending current on the contact electrode surface and within the gap distance of the contact electrode. The residual magnetic field is generated on the contact electrode surface and within the gap distance in the instant of zero current, which is due to the influence of eddy currents. The phase shift due to eddy currents, defined as time difference between the maximum value of current and axial magnetic field, is about 1ms in the center point of gap distance.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.9
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• pp.1159-1164
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• 2018

Vacuum circuit breakers(VCB) are widely used for current interruption of high-voltage inductive loads such as induction motors. This VCB can be chopped off before the current zero due to its high arc-extinguishing capability. One of the outstanding features of VCB is that it can cut off high frequency re-ignition current more than other circuit breakers. If the transient recovery voltage generated in the arc extinguishing is higher than the dielectric strength of the circuit breaker, a re-ignition phenomenon occurs. The surge voltage of the re-ignition is very high in magnitude and the steepness of the waveform is so severe that it can act as a high electrical stress on the winding. If the high frequency current of one phase affects the other two phases when the re-ignition occurs, it may cause a high surge voltage due to the virtual current chopping. If the magnitude of the voltage allowed in the motor winding is high or the waveform level is too severe, it may lead to insulation breakdown. Therefore, it is necessary to reduce the voltage to within a certain range. In this study, we briefly explain the various phenomena at the time of interruption, analyzed the magnitude of the dielectric strength and the transient recovery voltage at the simultaneous three-phase interruption that can give the greatest influence to the inductive load, proposed a method to reduce the impact.

• Journal of the Korean institute of surface engineering
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• v.38 no.5
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• pp.193-197
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• 2005

Highly c-axis oriented Zinc oxide (ZnO) films were successfully deposited at room temperature by oxygen ion-assisted pulsed filtered vacuum arc. The effect of oxygen gas ratio ($O_{2}/O_{2}+Ar$ on the preferred orientation, surface morphology and resistivity of the ZnO films were investigated. Highly crystalline ZnO films with (002) orientation were obtained at over $13\%$ of oxygen gas ratio. Increasing oxygen gas ratio up to $80\%$ was found to improve crystallinity of the films. From hall measurements, it was found that the film has n-type characteristic and carrier concentration and its mobility were closely related with oxygen gas ratio. Minimal resistivity of $3.6{\times}10^{-3}{\Omega}{\cdot}cm$ was obtained in the range of $20\%$ to $40\%$ of oxygen gas ratio.