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Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications (텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가)

  • Cho, Byoung-Jun;Kwon, Tae-Young;Kim, Hyuk-Min;Venkatesh, Prasanna;Park, Moon-Seok;Park, Jin-Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.61-66
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    • 2012
  • Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

The Impact of Education-Orientation on Technology Innovation and Company Outcome : Focusing on Korean Companies in China (기업의 교육지향성이 기술혁신과 기업성과에 미치는 영향 : 대 중국 투자 한국기업을 중심으로)

  • Kim, Jung Hoon;Lim, Young Taek
    • The Journal of Society for e-Business Studies
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    • v.19 no.4
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    • pp.231-249
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    • 2014
  • We define $21^{st}$ century as an amalgamation of globalization and localization, or Glocalization. Additionally, due to the increasing supply of smart phones and wide usage of social networking services, the ability to utilize such global and regional information has increased a coperation's competitiveness in its market, and even the business models have evolved from the conventional "production and distribution" to E-commerce, through which either a direct or a non-direct transaction is possible. My hypothesis is that the ability to adapt to this trend is possible through transfer of learning, and consequently, this will have an impact on company's performance. Thus, this thesis analyzes the mid- to the long-term impact of such ability and environmental factors on the performance and technology innovation of Korean companies in China. Ultimately, this study intends to engender a basic foundation for a corporation's management strategy in China. Finally this research focuses on those Korean companies in China only and on the proof of influential factors' impact on technological innovation and technological innovation's impact on those corporations' future performances. Section I is an abstract and section II, the case examines the uniqueness and current status of Korean companies in China identifies the concept and the definition of influential factors such as education-orientation, technological innovation, and performance, and then scrutinizes each factors through a closer look at their past researches. Section III explains the thesis model, the survey's method and target, the thesis, variable factors, the content, and the method of analysis. In section IV, the thesis is proved based on the outcome of the survey. The result in Section V highlights the high comprehension of technological innovation: both education-orientation and technological innovation prove to have a positive (+) correlation with the performance. The vision on education orientation proves to have a positive (+) influence on technological innovation. The vision on education-orientation and technological innovation prove to have a positive (+) influence individually on company's performance.

Comparison of Pulsatile and Non-Pulsatile Extracorporeal Circulation on the Pattern of Coronary Artery Blood Flow (체외순환에서 박동 혈류와 비박동 혈류가 관상동맥 혈류양상에 미치는 영향에 대한 비교)

  • Son Ho Sung;Fang Yong Hu;Hwang Znuke;Min Byoung Ju;Cho Jong Ho;Park Sung Min;Lee Sung Ho;Kim Kwang Taik;Sun Kyung
    • Journal of Chest Surgery
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    • v.38 no.2 s.247
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    • pp.101-109
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    • 2005
  • Background: In sudden cardiac arrest, the effective maintenance of coronary artery blood flow is of paramount importance for myocardial preservation as well as cardiac recovery and patient survival. The purpose of this study was to directly compare the effects of pulsatile and non-pulsatile circulation to coronary artery flow and myocardial preservation in cardiac arrest condition. Material and Method: A cardiopulmonary bypass circuit was constructed in a ventricular fibrillation model using fourteen Yorkshire swine weighing $25\~35$ kg each. The animals were randomly assigned to group I (n=7, non-pulsatile centrifugal pump) or group II (n=7, pulsatile T-PLS pump). Extra-corporeal circulation was maintained for two hours at a pump flow of 2 L/min. The left anterior descending coronary artery flow was measured with an ultrasonic coronary artery flow measurement system at baseline (before bypass) and at every 20 minutes after bypass. Serologic parameters were collected simultaneously at baseline, 1 hour, and 2 hours after bypass in the coronary sinus venous blood. The Mann-Whitney U test of STATISTICA 6.0 was used to determine intergroup significances using a p value of < 0.05. Result: The resistance index of the coronary artery was lower in group II and the difference was significant at 40 min, 80 min, 100 min and 120 min (p < 0.05). The mean velocity of the coronary artery was higher in group II throughout the study, and the difference was significant from 20 min after starting the pump (p < 0.05). The coronary artery blood flow was higher in group II throughout the study, and the difference was significant from 40 min to 120 min (p < 0.05) except at 80 min. Serologic parameters showed no differences between the groups at 1 hour and 2 hours after bypass in the coronary sinus blood. Conclusion: In cardiac arrest condition, pulsatile extracorporeal circulation provides more blood flow, higher flow velocity and less resistance to coronary artery than non-pulsatile circulation.

The Role of Pelvic Irradiation after Hysterectomy in Early Stage Cervical Carcinoma with Pelvic Nodal Metastasis (림프절 전이를 동반한 초기 자궁경부암에서 수술 후 방사선치료의 역할)

  • Suh, Hyun-Suk
    • Radiation Oncology Journal
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    • v.16 no.4
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    • pp.469-475
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    • 1998
  • Purpose : To determine the role of Pelvic irradiation in stage I or IIA cervical carcinoma with pelvic nodal metastasis after hysterectomy and bilateral pelvic lymphadenectomy. Materials and Methods : This is a retrospective study of 68 cervical carcinoma patients who were found to have pelvic nodal metastasis at hysterectomy and received pelvic irradiation from 1983 to 1996 at Inje University Seoul Paik Hospital. External beam radiation therapy to pelvis was delivered using 4 MeV Linac and intracavitary irradiation was given via vaginal ovoids or cylinders. Five-year survival and disease-free survival were estimated by Kaplan-Meier Method and prognostic factors related to survival were analysed by log-rank test and Cox proportional hazards regression model. Results : Median length of follow-up was 52months. Five-year overall survival and disease-free survival (DFS) were 81.8$\%$ and 81.7$\%$ respectively. Patients with endometrial invasion had a 57.1$\%$ 5-year DFS compared to 87.5$\%$ for those without endometrial invasion (p=0.0074). Multivariate analysis revealed endometrial invasion as an only statistically significant prognostic factor for 5-year DFS. Among total 15 (22$\%$) recurrences. pelvic recurrences occurred in 4 cases and distant metastases occurred in 13 cases. Conclusion : We have been able to confirm previous results demonstrating marked decrease in local recurrence after pelvic irradiation. In view of the high proportion of distant metastasis found in this study, a trial of aggressive adjuvant systemic therapy and irradiation in early stage cervical carcinoma patients with pelvic nodal metastasis, especially with endometrial invasion, appears to be warranted.

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Effects of Low Air Temperature and Light Intensity on Yield and Quality of Tomato at the Early Growth Stage (정식 초기의 저온·저일조가 토마토 수량·품질에 미치는 영향)

  • Wi, Seung Hwan;Yeo, Kyung-Hwan;Choi, Hak Soon;Yu, Inho;Lee, Jin Hyong;Lee, Hee Ju
    • Journal of Bio-Environment Control
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    • v.30 no.4
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    • pp.448-454
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    • 2021
  • This study was conducted to the effect of low air temperature and light intensity conditions on yield and quality of tomato at the early stage of growth in Korea. Inplastic greenhouses, low temperature and low temperature with shade treatments were performed from 17 to 42 days after plant. Tomato growing degree days were decreased 5.5% due to cold treatment during the treatment period. Light intensity decreased 74.7% of growing degree days due to shade. After commencing treatments, the plant growth decreased by low temperature and low radiation except for height. Analysis of the yield showed that the first harvest date was the same, but the yield of the control was 3.3 times higher than low temperature with shade treatment. The cumulative yields at 87 days after transplanting were 1734, 1131, and 854 g per plant for control, low temperature, and low temperature with shade, respectively. The sugar and acidity of tomatoes did not differ between treatment and harvesting season. To investigate the photosynthetic characteristics according to the treatment, the carbon dioxide reaction curve was analyzed using the biochemical model of the photosynthetic rate. The results showed that the maximum photosynthetic rate, J (electric transportation rate), TPU (triose phosphate utilization), and Rd (dark respiration rate) did not show any difference with temperature, but were reduced by shading. Vcmax (maximum carboxylation rate) was decreased depending on the low temperature and the shade. Results indicated that low temperature and light intensity at the early growth stage can be inhibited the growth in the early stage but this phenomenon might be recovered afterward. The yield was reduced by low temperature and low intensity and there was no difference in quality.

NEAR-INFRARED VARIABILITY OF OPTICALLY BRIGHT TYPE 1 AGN (가시광에서 밝은 1형 활동은하핵의 근적외선 변광)

  • JEON, WOOYEOL;SHIM, HYUNJIN;KIM, MINJIN
    • Publications of The Korean Astronomical Society
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    • v.36 no.3
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    • pp.47-63
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    • 2021
  • Variability is one of the major characteristics of Active Galactic Nuclei (AGN), and it is used for understanding the energy generation mechanism in the center of AGN and/or related physical phenomena. It it known that there exists a time lag between AGN light curves simultaneously observed at different wavelengths, which can be used as a tool to estimate the size of the area that produce the radiation. In this paper, We present long term near-infrared variability of optically bright type 1 AGN using the Wide-field Infrared Survey Explorer data. From the Milliquas catalogue v6.4, 73 type 1 QSOs/AGN and 140 quasar candidates are selected that are brighter than 18 mag in optical and located within 5 degree around the ecliptic poles. Light curves in the W1 band (3.4 ㎛) and W2 band (4.6 ㎛) during the period of 2010-2019 were constructed for these objects by extracting multi-epoch photometry data from WISE and NEOWISE all sky survey database. Variability was analyzed based on the excess variance and the probability Pvar. Applying both criteria, the numbers of variable objects are 19 (i.e., 26%) for confirmed AGN and 12 (i.e., 9%) for AGN candidates. The characteristic time scale of the variability (τ) and the variability amplitude (σ) were derived by fitting the DRW model to W1 and W2 light curves. No significant correlation is found between the W1/W2 magnitude and the derived variability parameters. Based on the subsample that are identified in the X-ray source catalog, there exists little correlation between the X-ray luminosity and the variability parameters. We also found four AGN with changing W1-W2 color.

A prediction model for adolescents' skipping breakfast using the CART algorithm for decision trees: 7th (2016-2018) Korea National Health and Nutrition Examination Survey (의사결정나무 CART 알고리즘을 이용한 청소년 아침결식 예측 모형: 제7기 (2016-2018년) 국민건강영양조사 자료분석)

  • Sun A Choi;Sung Suk Chung;Jeong Ok Rho
    • Journal of Nutrition and Health
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    • v.56 no.3
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    • pp.300-314
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    • 2023
  • Purpose: This study sought to predict the reasons for skipping breakfast by adolescents aged 13-18 years using the 7th Korea National Health and Nutrition Examination Survey (KNHANES). Methods: The participants included 1,024 adolescents. The data were analyzed using a complex-sample t-test, the Rao Scott χ2-test, and the classification and regression tree (CART) algorithm for decision tree analysis with SPSS v. 27.0. The participants were divided into two groups, one regularly eating breakfast and the other skipping it. Results: A total of 579 and 445 study participants were found to be breakfast consumers and breakfast skippers respectively. Breakfast consumers were significantly younger than those who skipped breakfast. In addition, breakfast consumers had a significantly higher frequency of eating dinner, had been taught about nutrition, and had a lower frequency of eating out. The breakfast skippers did so to lose weight. Children who skipped breakfast consumed less energy, carbohydrates, proteins, fats, fiber, cholesterol, vitamin C, vitamin A, calcium, vitamin B1, vitamin B2, phosphorus, sodium, iron, potassium, and niacin than those who consumed breakfast. The best predictor of skipping breakfast was identifying adolescents who sought to control their weight by not eating meals. Other participants who had low and middle-low household incomes, ate dinner 3-4 times a week, were more than 14.5 years old, and ate out once a day showed a higher frequency of skipping breakfast. Conclusion: Based on these results, nutrition education targeted at losing weight correctly and emphasizing the importance of breakfast, especially for adolescents, is required. Moreover, nutrition educators should consider designing and implementing specific action plans to encourage adolescents to improve their breakfast-eating practices by also eating dinner regularly and reducing eating out.

The effects of fluoride releasing orthodontic sealants on the prevention and the progressive inhibition of enamel demiheralization in vitro (광중합형 및 자가중합형 교정용 전색제의 치아우식예방 및 진행억제효과에 관한 실험적 연구)

  • Chae, Seung-Won;Cho, Jae-O;Yoon, Young-Jooh;Kim, Kwang-Won
    • The korean journal of orthodontics
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    • v.27 no.6 s.65
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    • pp.979-995
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    • 1997
  • The purpose of this study was to identify the preventive and the progressive inhibitory effects of enamel demineralization with fluoride releasing light-and self-cured orthodontic sealants(FluoroBond), in vitro, under the polarizing light microscope and the scanning electon microscope. The polarizing light microscopic group was subdivided into seven groups(Group A-Group G). The scanning electron microscopic group was also subdivided into seven groups(Group A'-Goup G'). For polarizing light microscopic evaluation, longitudinal sections were made longitudinally by Maruto cutter(Maruto Co., Japan) and Maruto grinding machine(Maruto Co., Japan). Sections were examined and photographed by the polarizing light microscope(Olympus Optical Co., Japan) using crossed polars and with the enamel rod longitudinal axis oriented at $45^{\circ}$ to the extinction position. For scanning electron microscopic evaluation, the specimens were coated with a highly conducting layer of gold palladium in a model Hus-4 high-vacuum evaporator and examined in an ISI-100B scanning electron microcope operated at 20kV. The results of this study were as follows : 1. The mean depths of artificial carious lesions under a polarized light microscope were $Group\;A(5.08{\mu}m),\;Group\;B(47.82{\mu}m,\;Group\;C(8.42{\mu}m),\;Group\;D(7.20{\mu}m),\;Group\;E(85.41{\mu}m),\;Group\;F(60.38{\mu}m),\;Group\;G(60.13{\mu}m)$. 2. There were statistically significant differences in Group B compared with Group A, C, and D(p<0.05), and also, in Group I compared with Group F and Group G(p<0.05). 3. Light-and self-cured orthodontic sealants had the preventive effects of enamel demineralization. 4. Light-and self-cured orthodontic sealants had the progressive inhibitory effects of enamel demineralization. 5. The time progress of demineralizing agent had no influence on the samples of light-and self-cured orthodontic sealants under the scanning electron microscope. 6. There was no difference between the specimens of light-and self-cured orthodontic sealants both in the polarized light microscopic group and in the scanning electron microscopic group.

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The Frequency of Chromosomal Aberrations of Peripheral Lymphocytes according to Radiation Dose and Dose Rate (선량 및 선량률 변화에 따른 말초혈액 임파구의 염색체 이상의 빈도)

  • Jeong Tae Sik;Baek Heum Man;Shin Byung Chul;Moon Chang Woo;Kim Mi Hyang;Lee Yong Hwan;Yum Ha Yong
    • Radiation Oncology Journal
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    • v.18 no.2
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    • pp.138-149
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    • 2000
  • Purpose : It was studied that the relationship between radiation dose, dose rate and the frequency of chromosomal aberrations in peripheral lymphocytes. Methods and Materials : Peripheral lymphocytes were irradiated in vitro with 6 MeV X-ray at dose ranges from 50 cGy to 800 cGy. The variations of the frequency of chromosomal aberrations were observed according to different radiation dose rate from 20 cGy/min to 400 cGy/min at constant total dose of 400 cGy which it was considered as factor to correct biological radiation dose measurement. Results : The yields of lymphocytes with chromosomal aberrations (dicentric chromosome, ring chromosome, acentric fragment pairs) are 0% at 50 cGy, 9% at 100 cGy, 20% at 200 cGy, 27% at 300 cGy, 55% at 400 cGy, 88% at 600 cGy, and 100% at 800 cGy. The value of Ydr is 0.000 at 50 cGy, 0.093 at 100 cGy, 0.200 at 200 cGy, 0.354 at 300 cGy, 0.612 at 400 cGy, 2.040 at 600 cGy, and 2.846 at 800 cGy. The relationship between radiation (D) and the frequency of dicentrlc chromosomes and ring Chromosomes (Ydr) can be expressed as Ydr=0.188${\times}$10$^{-2}$ D/Gy+0.422${\times}$10$^{-4}$/Gy$^{2}$${\times}$D$^{2}$ The Value of Qdr is 0.000 at 50 cGy, 1.000 at 100 cGy, 1.000 at 200 cGy, 1.333 at 300 cGy, 1.118 at 400 cGy, 2.318 at 600 cGy, and 2.846 at 800 cGy. When 400 cGy is irradiated with different dose rate each of 20, 40, 60, 80, 100, 160, 240, 320, and 400 cGy/min, Ydr is each of 0.982, 0.837, 0.860, 0.732, 0.763, 0.966, 0.909, 1.006, and 0.806, and Qdr is each of 1.839, 1.555, 1.654, 1.333, 1.381, 1.750, 1.6000, 1.710, and 1.318. Conclusion : There are not the significant variations of Ydr and Qdr values according to different dose rate. And so radiation damage is influenced by total exposed radiation doses and is influenced least of all by different dose rate when it is acute single exposure.

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An Analysis on Factors Affecting Local Control and Survival in Nasopharvngeal Carcinoma (비인두암의 국소 종양 치유와 생존율에 관한 예후 인자 분석)

  • Chung Woong-Ki;Cho Jae-Shik;Park Seung Jin;Lee Jae-Hong;Ahn Sung Ja;Nam Taek Keun;Choi Chan;Noh Young Hee;Nah Byung Sik
    • Radiation Oncology Journal
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    • v.17 no.2
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    • pp.91-99
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    • 1999
  • Propose : This study was performed to find out the prognostic factors affecting local control, survival and disease free survival rate in nasopharyngeal carcinomas treated with chemotherapy and radiation therapy. Materials and Methods : We analysed 47 patients of nasopharyngeal carcinomas, histologically confirmed and treated at Chonnam University Hospital between July 1986 and June 1996, retrospectively. Range of patients' age were from 16 to 80 years (median; 52 years). Thirty three (70$\%$) patients was male. Histological types were composed of 3 (6$\%$) keratinizing, 30 (64$\%$) nonkeratinizing squamous cell carcinoma and 13 (28$\%$) undifferentiated carcinoma. Histoiogicai type was not known in 1 patient (2$\%$). We restaged according to the staging system of 1997 American Joint Committee on Cancer Forty seven patients were recorded as follows: 71: 11 (23$\%$), T2a; 6 (13$\%$), T2b; 9 (19$\%$), 73; 7 (15$\%$), 74: 14 (30$\%$), and NO; 7 (15$\%$), Nl: 14 (30$\%$), N2; 21 (45%), N3: 5 (10%). Clinical staging was grouped as follows: Stage 1; 2 (4$\%$), IIA: 2 (4$\%$), IIB; 10 (21$\%$), III; 14 (30$\%$), IVA; 14 (30$\%$) and IVB; 5 (11$\%$). Radiation therapy was done using 6 MV and 10 MV X- ray of linear accelerator. Electron beam was used for the Iymph nodes of posterior neck after 4500 cGy. The range of total radiation dose delivered to the primary tumor was from 6120 to 7920 cGy (median; 7020 cGy). Neoadjuvant chemotherapy was performed with cisplatin +5-fluorouracil (25 patients) or cisplatin+pepleomycin (17 patients) with one to three cycles. Five patients did not received chemotherapy. Local control rate, survival and disease free suwival rate were calculated by Kaplan-Meier method. Generalized Wilcoxon test was used to evaluate the difference of survival rates between groups. multivariate analysis using Cox proportional hazard model was done for finding prognostic factors. Results: Local control rate was 81$\%$ in 5 year. Five year survival rate was 60$\%$ (median survival; 100 months). We included age, sex, cranial nerve deflicit, histologic type, stage group, chemotherapy, elapsed days between chemotherapy and radiotherapy, total radiation dose, period of radiotherapy as potential prognostic factors in multivariate analysis. As a result, cranial none deficit (P=0.004) had statistical significance in local control rate. Stage group and total radiation dose were significant prognostic factors in survival (P=0.000, P=0.012), and in disease free survival rates (P=0.003, P=0.008), respectively. Common complications were xerostomia, tooth and ear problems. Hypothyroidism was developed in 2 patients. Conclusion : In our study, cranial none deficit was a significant prognostic factor in local control rate, and stage group and total radiation dose were significant factors in both survival and disease free survival of nasopharyngeal carcinoma. We have concluded that chemotherapy and radiotherapy used in our patients were effective without any serious complication.

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