• Journal of Welding and Joining
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• v.23 no.2
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• pp.59-65
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• 2005

A leaky surface acoustic wave (LSAW) velocity was measured using a scanning acoustic microscope on the ceramic/metal interface in order to investigate material properties. The inverse Fourier transform (IFFT) of the V(z) curve contains the reflectance function of a liquid-specimen interface. So, the longitudinal, transverse, and Rayleigh wave velocities for each layer are obtained by the inversion of the V(z) curve at the same time. This paper contains mainly the experimental procedure for measurements of the LSAW velocity, and the results obtained for the velocity variation of individual layer after the thermal shock. It is shown that this method is useful in measuring the material properties under external stress.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.5
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• pp.518-524
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• 2004

The feasibility of Y(z) curve method of scanning acoustic microscope using high frequency transducer was experimentally studied for assessment of the thermal degradation in Co-based superalloy. Thermal degradation was performed to simulate the microstructural changes in Co-based superalloy arising from long term exposure at high temperature. Longitudinal wave velocity measured by pulse echo method using 10MHz transducer and leaky surface acoustic wave (LSAW) velocity measured by V(z) curve method using 200MHE transducer were measured to investigate the effect on thermal degradation. Ultrasonic velocity decreased as the aging time increased in both ultrasonic waves. Moreover, the low frequency longitudinal wave velocity decreased a little. Otherwise, the high frequency LSAW velocity drastically decreased up to a maximum of 4.7% at the aging time of 4,000hours. A good correlation was found between LSAW and Vickers hardness. Consequently, V(z) curve method of SAM using high frequency transducer could be a potential tool for assessing thermal degradation.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.2
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• pp.171-175
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• 2014

In this study, we suggest a method to measure the thickness of thin films nondestructively using the dispersion characteristics of a surface acoustic wave propagating along the thin film surface. To measure the thickness of thin films, we deposited thin films with different thicknesses on a Si (100) wafer substrate by controlling the deposit time using the E-beam evaporation method. The thickness of the thin films was measured using a scanning electron microscope. Subsequently, the surface wave velocity of the thin films with different thicknesses was measured using the V(z) curve method of scanning acoustic microscopy. The correlation between the measured thickness and surface acoustic wave velocity was verified. The wave velocity of the film decreased as the film thickness increased. Therefore, thin film thickness can be determined by measuring the dispersion characteristics of the surface acoustic wave velocity.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.4
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• pp.393-400
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• 2012

In recent years, nano-structured thin film systems are often applied in industries such as MEMS/NEMS device, optical coating, semiconductor or like this. Thin films are used for many and varied purpose to provide resistance to abrasion, erosion, corrosion, or high temperature oxidation and also to provide special magnetic or dielectric properties. Quite a number of articles to evaluate the characterization of thin film structure such as film density, film grain size, film elastic properties, and film/substrate interface condition were reported. Among them, the evaluation of film adhesive to substrate has been of great interest. In this study, we fabricated the polymeric thin film system with different adhesive conditions to evaluate the adhesive condition of the thin film. The nano-structured thin film system was fabricated by spin coating method. And then V(z) curve technique was applied to evaluate adhesive condition of the interface by measuring the surface acoustic wave(SAW) velocity by scanning acoustic microscope(SAM). Furthermore, a nano-scratch technique was applied to the systems to obtain correlations between the velocity of the SAW propagating within the system including the interface and the shear adhesive force. The results show a good correlation between the SAW velocities measured by acoustic spectroscope and the critical load measured by the nano-scratch test. Consequently, V(z) curve method showed potentials for characterizing the adhesive conditions at the interface by acoustic microscope.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.2
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• pp.267-275
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• 2012

Austenite stainless steel 304 has properties of high resistance to corrosion and temperature changes. Therefore, this material is widely used in various of industries. However, when the material is subjected to heating and cooling cycles the forming accuracy, for example, the right angle associated with a sharp bend such as corner is lost. This phenomenon is caused by the reversion of the deformation-induced martensite into austenite when the temperature in increased. This result in misfit of a structure or an assembly, and an increase in residual stress. Hence, it is important to understand this process. In this study, to evaluate the mechanical behavior of the deformation-induced martensite and reversed austenite, a scanning acoustic spectroscope including the capability of obtaining both phase and amplitude of the ultrasonic wave (i.e., the complex V(z) curve method) was used. Then, the velocities of the SAW propagating within the specimens made in different conditions were measured. The experimental differences of the SAW velocities obtained in this experiment were ranging from 2,750 m/s to 2,850 m/s, and the theoretical difference was 3.6% under the assumption that the SAW velocity was 2,800 m/s. The error became smaller as the martensite content was increased. Therefore, the SAW velocity may be a probe to estimate the marternsite content.

• Analytical Science and Technology
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• v.17 no.2
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• pp.117-129
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• 2004

Amitrole in environment, difficult to be analyzed by GC or GC/MS due to high polarity and low volatility, was analyzed by LC/ESI/MS in the study. Maximum peak intensity of amitrole in LC/MS/ESI mass spectrum is m/z 85 of protonated molecular ion $(M+H)^+$ with 30V of cone voltage at SIR mode. It was confirmed that ratios between main ion of amitrole, 85 of protonated molecular ion, and m/z 58 fragmented ion of amitrole, had increased corresponding with the increment of cone voltage from 20V to 70V. The isotope molecular weight of amitrole was $86([M+H])^+$ at LC/MS analysis and the mass spectrum ratio between 85 mass and 86 mass was not different by the change of concentration but similar to theoretical ratio(less than 10% standard deviation).The linearity of standard calibration curve under same condition with sample treatment method had $y=1.09354e^6X+26947.2$ and $r^2=0.99$. Recovery rates in water and soil samples were 77.64~83.44% and 71.11~79.44%, respectively. Reliability of the analysis was performed with 5 repeated measurements at each level of standard concentration and the result showed that relative standard deviation was less than 10%; therefore, the extraction and analysis method in the study suggested that it would be reliable to measure amitrole in water and soil media.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.10a
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• pp.119-119
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• 2003

Plasma polymerized organic thin films were deposited on Si(100) glass and Copper substrates at 25 ∼ 100 $^{\circ}C$ using cyclohexane and ethylcyclohexane precursors by PECVD method. In order to compare physical and electrochemical properties of the as-grown thin films, the effects of the RF plasma power in the range of 20∼50 W and deposition temperature on both corrosion protection efficiency and physical properties were studied. We found that the corrosion protection efficiency (P$\_$k/), which is one of the important factors for corrosion protection in the interlayer dielectrics of microelectronic devices application, was increased with increasing RF power. The highest P$\_$k/ value of plasma polymerized ethylcyclohexane film (92.1% at 50 W) was higher than that of the plasma polymerized cyclohexane film (85.26% at 50 W), indicating inhibition of oxygen reduction. Impedance analyzer was utilized for the determination of I-V curve for leakage current density and C-V for dielectric constants. To obtain C-V curve, we used a MIM structure of metal(Al)-insulator(plasma polymerized thin film)-metal(Pt) structure. Al as the electrode was evaporated on the ethylcyclohexane films that grew on Pt coated silicon substrates, and the dielectric constants of the as-grown films were then calculated from C-V data measured at 1㎒. From the electrical property measurements such as I-V ana C-V characteristics, the minimum dielectric constant and the best leakage current of ethylcyclohexane thin films were obtained to be about 3.11 and 5 ${\times}$ 10$\^$-12/ A/$\textrm{cm}^2$ and cyclohexane thin films were obtained to be about 2.3 and 8 ${\times}$ 10$\^$-12/ A/$\textrm{cm}^2$.

• Journal of environmental and Sanitary engineering
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• v.19 no.4 s.54
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• pp.25-33
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• 2004

Acrylamide, difficult to analyze by GC and GC/MS due to the polarity and low volatility, was analyzed by LC/ESI/MS in the study. Acrylamide its(molecular weight 71amu) showed m/z=72 $(M+H)^+$ and high peak intensity at 22V in SIR mode. The mass spectrum ratios of acrylamide for qualitative identification had m/z=72 in precursor ion and m/z=55 in products ion, respectively. Those ratios at 30V in SIR mode ranged from 1: 1.4 to 1:1.17 despite various acrylamide concentrations. The ion intensity ratios of acrylamide $(m/z=72,\; [M+H]^+)$ to acrylamide isotopes $(m/z=73,\;[M+H]^+)$ ranged from 100 : 3.57 to 100 : 3.92. The results verified theoretical mass spectrum ratio that was 100:3.82. The linearity of standard calibration curve was y : 520.584x + 1815.26 with $r^2=0.99.$ In quality assurance and quality control, the recovery rate ranged from 81.64 percent to 90.97 percent and relative standard deviation was less than $10\%$ with 5 repeated injections at individual standard calibration solutions. The method was applied to analyze acrylamide in food at grocery stores. Snacks made of potatoes showed the highest acrylamide concentration followed by products made of French fries, wheat, and corn.

• Analytical Science and Technology
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• v.12 no.6
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• pp.528-533
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• 1999

The total iodine is determined in serum, fresh milk and feed additive by ICP-MS. The preparation involves only a 25-fold dilution with a diluent by direct nebulization in the plasma. The diluent composition is $NH_4OH$(0.5% v/v)+$CH_3OH$(5% v/v) and the abundance of iodine is measured at m/z=127. The calibration curve was linear over the ranges $0-100{\mu}g/L$ with $R^2=0.99$ for iodine. The detection limit of this method is $0.084{\mu}g/L$ for iodine. The relative error range of milk powder SRM in optimum condition is 2.30%-4.73%. The concentration ranges of iodine in the serum, fresh milk, feed additive were $12.4-40.2{\mu}g/L$, < 0.01-3.11 mg/L, < $10^{-7}-2.60g/kg$ respectively.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.10
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• pp.195-201
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• 2002

This paper deals with the precision grinding for aspherical surface of optical parts. A parallel grinding method using the spherical wheel was suggested as a new grinding method. In this method, the wheel axis is positioned at a $\pi$/4 from the Z-axis in the direction of the X-axis. An advantage of this grinding method is that the wheel used in grinding achieves its maximum area, reducing wheel wear and improving the accuracy of the ground mirror surface. In addition, a truing by the CG (curve generating) method was proposed. After truing, the shape of spherical wheel transcribed on the carbon is measured by the Form-Talysurf-120L. The error of the form in the spherical wheel which is the value ${\Delta}x$ and $R{^2}{_y}$ inferred from the measured profile data is compensated by the re-truing. Finally, in the aspherical grinding experiment, the WC of the molding die was examined by the parallel grinding method using the resin bonded diamond wheel with a grain size of ＃3000. A form accuracy of 0.16${\mu}m$ P-V and a surface roughness of 0.0067${\mu}m$ Ra have been resulted.