• Title/Summary/Keyword: Upper layer thickness

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A Study on Improvement of a-Si:H TFT Operating Speed

  • Hur, Chang-Wu
    • Journal of information and communication convergence engineering
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    • v.5 no.1
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    • pp.42-44
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    • 2007
  • The a-Si:H TFTs decreasing parasitic capacitance of source-drain is fabricated on glass. The structure of a-Si:H TFTs is inverted staggered. The gate electrode is formed by patterning with length of $8{\mu}m{\sim}16{\mu}m$ and width of $80{\sim}200{\mu}m$ after depositing with gate electrode (Cr) $1500{\AA}$ under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photoresistor on gate electrode in sequence, respectively. The thickness of these, thin films is formed with a-SiN:H ($2000{\mu}m$), a-Si:H($2000{\mu}m$) and $n^+a-Si:H$ ($500{\mu}m$). We have deposited $n^+a-Si:H$, NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the $n^+a-Si:H$ layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. The a-Si:H TFTs decreasing parasitic capacitance of source-drain show drain current of $8{\mu}A$ at 20 gate voltages, $I_{on}/I_{off}$ ratio of ${\sim}10^8$ and $V_{th}$ of 4 volts.

A Study on Adhesion and Electro-optical Properties of ITO Films Deposited on Flexible PET Substrates with Deposition of SiO2 Buffer Layers (PET 기판 위에 SiO2 버퍼층 증착에 따른 ITO 박막의 부착 및 전기적 광학적 특성 연구)

  • Kang, Ja-Youn;Kim, Dong-Won;Cho, Kyu-Il;Woo, Byung-Il;Yun, Hwan-Jun
    • Journal of Surface Science and Engineering
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    • v.42 no.1
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    • pp.21-25
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    • 2009
  • Using an evaporation system, $SiO_2$ was deposited as a buffer layer between a PET substrate and a ITO layer and then ITO/$SiO_2$/PET layers were annealed for 1.5 hours at the temperature of $180^{\circ}C$. Adhesion and electro-optical properties of ITO films were studied with thickness variance of a $SiO_2$ buffer layer. As a result of introduction of the $SiO_2$ buffer layer, sheet resistance and resistivity increased and a ITO film with optimum sheet resistance ($529.3{\Omega}/square$) for an upper ITO film of resistive type touch panel could be obtained when $SiO_2$ of $50{\AA}$ was deposited. And it was found that ITO films with $SiO_2$ buffer layer have higher transmittance of $88{\sim}90%$ at 550 nm wavelength than ITO films with no buffer layers and the transmittance was enhanced as $SiO_2$ thickness increased from $50{\AA}$ to $100{\AA}$. Adhesion property of ITO films with $SiO_2$ buffer layers became better than ITO films with no buffer layers and this property was independent of $SiO_2$ thickness variance ($50{\sim}100{\AA}$). By depositing a $SiO_2$ buffer layer of $50{\AA}$ on the PET substrate and sputtering a ITO thin film on the layer, a ITO film with enhanced adhesion, electro-optical properties could be obtained.

Two Layer Modelling with Applications to Exchange Flow and Internal Tide (이층류 모델링의 교환류와 내부조석파 연구에의 적용)

  • Kang, Sok-Kuh;Abbott, Michael-B.;Heung, Jae-Lie;Yum, Ki-Dai
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.9 no.1
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    • pp.9-23
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    • 1997
  • A numerical study of a two-layer, stratified flow is investigated, using the implicit finite difference method in one dimension. The results of computational method have been tested and, in case of lock exchange flow, compared with the results of experimental data. The results of model experiments with various interfacial, bottom friction coefficients along with various time weighting factor of numerical scheme and dissipative interface are shown and discussed. Two-layer model experiment has been also carried out to investigate the generation and propagation characteristics of internal tidal wave over the steep bottom topography under stratified condition. The internal wave seems to well radiate through the downstream boundary under the experiments adopting radiation conditions both at two layers and only at upper layer, confirming the applicability of radiational boundary condition in stratified flows. It is also shown that the internal wave through the downstream boundary propagates more actively with increasing thickness of lower layer in the downstream. This implies that the potential tidal energy in the interface will depend upon the thickness of lower layer for the constant thickness of upper layer.

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Evolution of Wind Storm over Coastal Complex Terrain (연안복합지형에서 바람폭풍의 진화)

  • Choi, Hyo;Seo, Jang-Won;Nam, Jae-Cheol
    • Journal of Environmental Science International
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    • v.11 no.9
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    • pp.865-880
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    • 2002
  • As prevailing synoptic scale westerly wind blowing over high steep Mt. Taegulyang in the west of Kangnung coastal city toward the Sea of Japan became downslope wind and easterly upslope wind combined with both valley wind and sea breeze(valley-sea breeze) also blew from the sea toward the top of the mountain, two different kinds of wind regimes confronted each other in the mid of eastern slope of the mountain and further downward motion of downlsope wind along the eastern slope of the mountain should be prohibited by the upslope wind. Then, the upslope wind away from the eastern slope of the mountain went up to 1700m height over the ground, becoming an easterly return flow in the upper level of the sea. Two kinds of circulations were detected with a small one in the coastal sea and a large one from the coast toward the open sea. Convective boundary layer was developed with a thickness of about 1km over the ground in the upwind side of the mountain in the west, while a thickness of thermal internal boundary layer(TIBL) form the coast along the eastern slope of the mountain was only confined to less than 200m. After sunset, under no prohibition of upslope wind, westerly downslope wind blew from the top of the mountain toward the coastal basin and the downslope wind should be intensified by both mountain wind and land breeze(mountain-land breeze) induced by nighttime radiative cooling of the ground surfaces, resulting in the formation of downslope wind storm. The wind storm caused the development of internal gravity waves with hydraulic jump motion bounding up toward the upper level of the sea in the coastal plain and relatively moderate wind on the sea.

Effects of $WSi_x$, thickness and F concentration on gate oxide characteristics in tungsten polycide gate structure (Tungsten polycide gate 구조에서 $WSi_x$ 두께와 fluorine 농도가 gate oxide 특성에 미치는 영향)

  • 김종철
    • Journal of the Korean Vacuum Society
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    • v.5 no.4
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    • pp.327-332
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    • 1996
  • In this study, the effects of $WSi_x$, thickness and fluorine concentration in tungsten polycide gate structure on gate oxide were investigated. As $WSi_x$, thickness increases, gate oxide thickness increases with fluorine incorporation in gate oxide, and time-to-breakdown($T_{BD,50%}$) of oxide decreases. The stress change with $WSi_x$ thickness was also examined. But it is understood that the dominant factor to degrade gate oxide properties is not the stress but the fluorine, incorporated during $WSi_x$ deposition, diffused into $WSiO_2$ after heat treatment. In order to understand the effect of fluorine diffusion into oxidem fluorine ion implanted gates were compared. The thickness variation and $T_{BD,50%}$ of gate oxide is saturated over 600 $\AA$ thickness of $WSi_x$. The TEM and SIMS studies show the microstructure less than 600 $\AA$ thickness is dense and flat in surface. However, over 600$\AA$, the microstructure of $WSi_x$ is divided into two parts: upper porous phase with rugged surface and lower dense phase with smmoth interface. And this upper phase is transformed into oxygen rich crystalline phase after annealing, and the fluorine is captured in this layer. Therefore, the fluorine diffusion into the gate oxide is saturated.

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Effect of rolling parameters on the evolution of texture during asymmetrical cold rolling of aluminum sheets (알루미늄 판재의 비대칭 냉간압연 시 집합조직 발달에 미치는 압연변수의 영향)

  • Kang, H.G.;Han, Y.H.;Huh, M.Y.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2007.10a
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    • pp.84-86
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    • 2007
  • Aluminum sheets were asymmetrically cold rolled without lubrication by using different roll velocities of upper and lower rolls in order to intensify the shear deformation. During asymmetrical cold rolling of aluminum sheets, a reduction per a rolling pass, initial sheet thickness, roll diameter, roll velocity ratio were varied to investigate the effect of rolling parameters. The formation of through thickness shear texture was related to the ratio of the contact length between the roll and sample($l_c$) to the sheet thickness(d). The strain states associated with asymmetrical rolling were investigated by the finite element method (FEM) simulation. FEM results indicated that the evolution of deformation texture in a thickness layer is strongly governed by integrated values of strain rates $\dot{\varepsilon}_{13}$ and $\dot{\varepsilon}_{11}$ along the streamline in the roll gap.

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Changes of the Amount of Forest Floor Organic Matter in Deciduous Forest along the Altitudinal Gradient (낙엽활엽수림에 있어서 표고 경도에 따른 임상유기물량의 변화)

  • Yi, Myong-Jong
    • Journal of Forest and Environmental Science
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    • v.11 no.1
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    • pp.72-80
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    • 1995
  • Altitudinal effects on the accumulation of O layer were examined for deciduous broad-leaved forests in the experimental forest of Kangwon National University. There found a marked increased towards the higher altitudes in the thickness of O layer. These trends could be observed conspicuously on the F2 and H layers. The relation between thickness (X, cm) and dry weight (Y, $kg/m^2$) of O layer was approximated by linear regression equations;Y($kg/m^2$ = aX(cm). The values of coefficient "a" for the F2, H and F2+H layers were 0.43, 0.61 and 0.53, respectively. Bulk densities of the accumulated organic matter estimated nearly to be $45g/dm^2$ in F2 layer, $60g/dm^2$ in H layer and $55g/dm^2$ in F2+H layer. The amount of O layer ranged from 13ton/ha for the forest at 280m in altitude to 41ton/ha for the upper forest at 710m in altitude. Among these total amount of the O layer, F1, F2 and H layer occupied to be 5~10ton/ha, 5~11ton/ha and 13~40ton/ha, respectively.

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Stability assessment of tunnel face in a layered soil using upper bound theorem of limit analysis

  • Khezri, Nima;Mohamad, Hisham;Fatahi, Behzad
    • Geomechanics and Engineering
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    • v.11 no.4
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    • pp.471-492
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    • 2016
  • Underground tunnelling is one of the sustainable construction methods which can facilitate the increasing passenger transportation in the urban areas and benefit the community in the long term. Tunnelling in various ground conditions requires careful consideration of the stability factor. This paper investigates three dimensional stability of a shallow circular tunnel in a layered soil. Upper bound theorem of limit analysis was utilised to solve the tunnel face stability problem. A three dimensional kinematic admissible failure mechanism was improved to model a layered soil and limiting assumptions of the previous studies were resolved. The study includes calculation of the minimum support pressure acting on the face of the excavation in closed-face excavations. The effects of the characteristics of the layers on the minimum support pressure were examined. It was found that the ratio of the thickness of cover layers particularly when a weak layer is overlying a stronger layer, has the most significant influence on the minimum tunnel support pressure. Comparisons have been made with the results of the numerical modelling using FLAC3D software. Results of the current study were in a remarkable agreement with those of numerical modelling.

Determination of dielectric property of subsurface by dispersive guided GPR wave (레이다파의 분산성 가이드 현상을 이용한 지하 물성 계산)

  • Yi, Myeong-Jong;Endres, Anthony L.;Kim, Jung-Ho
    • 한국지구물리탐사학회:학술대회논문집
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    • 2006.06a
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    • pp.25-30
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    • 2006
  • When wet soil overlies dry soil, which can be found in the infiltration test, the radar wave is not attenuated and guided within wet soil layer. This phenomenon is known to be the dispersive guided wave and happens when the thickness of upper wet layer is less than or comparable to the wavelength of radar wave. In this study, we have conducted the FDTD modeling and obtained the velocity dispersion curve to identify the dispersive guided wave through F-K analysis. This guided wave can be explained by modal propagation theory and a simple inversion code was developed to obtain the two layer's dielectric constants as well as layer thickness. By inverting the dispersion curve from synthetic modeling data, we could obtain the accurate dielectric constants and layer thickness. Moreover, we could enhance the accuracy by including the higher mode data. We expect this method will be very useful to get the quantitative property of subsurface when the condition is similar.

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An optimization strategy in wind-driven circulation with uncertain forcing problem off the southeastern coastal waters of Korea (한국 남동해역 취송순환문제에서 바람응력에 대한 최적화 연구)

  • Kim Jong-Kyu;Kim Heon-Tae
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.4 no.2
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    • pp.35-42
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    • 2001
  • We demonstrated the importance of initial estimates of model parameters and the utility of an optimization approach of the uncertain forcing of wind-driven circulation off the southeastern coastal waters of Korea. The wind stress represents the upper boundary condition in this model and enters in the model equation as a forcing term in the numerical formalism. The wind field contributes to maintain the almost time-independent distribution of the upper layer thickness feature in a north-south direction and negative wind stress curl to maintain the formation of warm eddy off the southeastern coastal waters of Korea. Elucidated is the variational characteristics of the East Korean Warm Current due to the variations of the zonally averaged wind stress (southward transport) from the seasonal variations of the meridional transport by the Ekman transport.

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