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http://dx.doi.org/10.5695/JKISE.2009.42.1.021

A Study on Adhesion and Electro-optical Properties of ITO Films Deposited on Flexible PET Substrates with Deposition of SiO2 Buffer Layers  

Kang, Ja-Youn (Department of Advanced Materials Engineering, Kyonggi University)
Kim, Dong-Won (Department of Advanced Materials Engineering, Kyonggi University)
Cho, Kyu-Il (Department of Advanced Materials Engineering, Kyonggi University)
Woo, Byung-Il (Department of Advanced Materials Engineering, Kyonggi University)
Yun, Hwan-Jun (Samhan Electronics)
Publication Information
Journal of the Korean institute of surface engineering / v.42, no.1, 2009 , pp. 21-25 More about this Journal
Abstract
Using an evaporation system, $SiO_2$ was deposited as a buffer layer between a PET substrate and a ITO layer and then ITO/$SiO_2$/PET layers were annealed for 1.5 hours at the temperature of $180^{\circ}C$. Adhesion and electro-optical properties of ITO films were studied with thickness variance of a $SiO_2$ buffer layer. As a result of introduction of the $SiO_2$ buffer layer, sheet resistance and resistivity increased and a ITO film with optimum sheet resistance ($529.3{\Omega}/square$) for an upper ITO film of resistive type touch panel could be obtained when $SiO_2$ of $50{\AA}$ was deposited. And it was found that ITO films with $SiO_2$ buffer layer have higher transmittance of $88{\sim}90%$ at 550 nm wavelength than ITO films with no buffer layers and the transmittance was enhanced as $SiO_2$ thickness increased from $50{\AA}$ to $100{\AA}$. Adhesion property of ITO films with $SiO_2$ buffer layers became better than ITO films with no buffer layers and this property was independent of $SiO_2$ thickness variance ($50{\sim}100{\AA}$). By depositing a $SiO_2$ buffer layer of $50{\AA}$ on the PET substrate and sputtering a ITO thin film on the layer, a ITO film with enhanced adhesion, electro-optical properties could be obtained.
Keywords
ITO(Indium-Tin-Oxide); PET; $SiO_2$ buffer layer; Adhesion; Touch screen;
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1 W. C. Song, J. of KIEEME (in Korean), 17 (2004) 1277
2 J. E. Gray, P. R. Norton, and K. Griffiths, Thin Solid Film, 484 (2005) 196   DOI   ScienceOn
3 Y. Zhinong, L. Yuqiong, F. Xia, Z. Zhao, and W. Xue, Thin Solid Film, Available online (2009)
4 Y. S. Huang, W. Q. Qiu, and C. P. Luo, Thin Solid Film, 472 (2005) 20   DOI   ScienceOn
5 T. Wu, W. Xiaolong, W. Yutao, and D. Longjiang, RARE METALS, 25 (2006) 65   DOI   ScienceOn
6 M. R. Kreke, A. S. Badami, and J. B. Brady, Biomater, 26 (2005) 2975   DOI   ScienceOn
7 W. F. Wu and B. Shiou, Thin Solid Film, 298 (1997) 221   DOI   ScienceOn
8 A. K. Kulkarni, T. S. Lim, M. Khan, and K. H. Schulz, J. Vac. Sci. Technol., A16(3) (1998) 1636
9 K. Y. Hwan, 홍익대학교과학기술연구논문집, 12 (2001) 1169   PUBMED
10 A. K. Kulkarni, K. H. Schulz, T. S. Lim, and M. Khan, Thin Solid Film, 270 (1997) 1   DOI   ScienceOn
11 B. S. Chiou, S. T. Hsieh, and W. F. Wu, J. Am. Ceram. Soc., 77 (1994) 1740   DOI   ScienceOn
12 T. Minami, H. Sonohara, T. Kakumu, and S. Takata, Thin Solid Film, 270 (1995) 37   DOI   ScienceOn