• Title/Summary/Keyword: Upper Plate

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A Study to Improve Temperature Uniformity in Hot Plate Oven for Silicon Wafer Manufacturing (반도체 웨이퍼용 핫 플레이트 오븐에서 온도 균일도 향상을 위한 연구)

  • Lee, Sei-Young;Cho, Hyung-Hee;Lee, Young-Won
    • Proceedings of the KSME Conference
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    • 2000.11b
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    • pp.261-266
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    • 2000
  • Temperature variation during silicon wafer baking is mainly due to natural convection caused by temperature difference between silicon wafer and upper plate. Several cases are tested and calculated numerically to improve temperature uniformity. The temperature difference and velocity magnitude in the flow cell is reduced for a small gap between the wafer and upper plate because the natural convection force is suppressed in the small space. The uniform temperature distribution can be obtained with controling the incoming flow distribution from the upper plate. An alternative method is the adiabatic wall condition on the upper plate to maintain the temperature uniformity within $0.3^{\circ}C$ on the water plate.

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Kinematic Analysis of a Double-Action Link-Type Die Set for the Enclosed Die Forging (폐쇄단조용 복동링크식 다이세트의 기구학적 해석)

  • Park Rae-Hun;Jun Byoung-Yoon;Lee Min-Cheol;Joun Man-Soo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.30 no.10 s.253
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    • pp.1293-1297
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    • 2006
  • In this paper, kinematic analysis of a double-action link-type die set for enclosed die forging is carried out. The structure of the die set and its operational principle during enclosed die forging are introduced in detail. A closed-form solution of the relative velocity of the middle plate with respect to the upper plate after the upper and lower dies are enclosed is given in terms of the link lengths and the distance from the lower pin to the upper pin of the link system. The effect of the link lengths on both strokes and velocities is investigated. It has been shown that the relative velocity of the middle plate with respect to the upper plate varies almost linearly with the stroke of the upper plate.

Tool Design and Numerical Verification for Thick Plate Forming of Hollow-Partitioned Steam Turbine Nozzle Stator (스팀 터빈용 중공 분할형 노즐 정익의 후판 성형을 위한 금형 설계 및 해석적 검증)

  • Kang, B.K.;Kwak, B.S.;Yoon, M.J.;Jeon, J.Y.;Kang, B.S.;Ku, T.W.
    • Transactions of Materials Processing
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    • v.25 no.6
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    • pp.379-389
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    • 2016
  • As a stator for steam turbine diaphragm, hollow-type nozzle stator to substitute for conventional solid one is introduced in this study. This hollowed stator can be separated into two parts such as upper and lower plates with large and curved surface area. This study focuses on thick plate forming process for the upper plate of the hollow-partitioned nozzle stator. First, to reduce forming defects such as under-cut and localized thinning of the deformed plate, and to avoid tool interruption between forming punch and lower die, tool design including the position determination of forming surfaces is performed. Uni-axial tensile tests are carried out using SUS409L steel plate with initial thickness of 5.00mm, and plastic strain ratio (r-value) is also obtained. Due to the asymmetric curved configuration of the upper plate, it is hard to adopt a series of blank holder or draw-bead, so the initial plate during this thick plate forming experiences unstable and non-uniform contact. To easy this forming difficulty and find suitable tool geometry without sliding behavior of the workpiece in the die cavity, two geometric parameters with respect to each shoulder angle of the lower die and the upper punch are adopted. FE models with consideration of 21 combinations for the geometric parameters are built-up, and numerical simulations are performed. From the simulated and predicted results, it is shown that the geometric parameter combinations with ($30^{\circ}$, $90^{\circ}$) and ($45^{\circ}$, $90^{\circ}$) for the shoulder angle of the lower die and the upper punch are suitably applied to this upper plate forming of the hollow-partitioned nozzle stator used for the turbine diaphragm.

[ $H{\infty}$ ] Control of Level Maintaining Device (수평유지장치의 $H{\infty}$ 제어)

  • Oh, Young-Jin;Suh, Young-Soo
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.52 no.2
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    • pp.77-84
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    • 2003
  • This paper is concerned with level control of a upper plate in a vehicle. The objective of control is to maintain the upper plate at level regardless of road slopes. The road slope is detected using an accelerometer-type inclinometer and H infinity control method is used to simultaneously reduce effects of road slopes and sensor noises. By the simulation, it is shown that the upper plate is successfully maintained at level.

Stress Analysis of Blanking Plate Applied by Press (프레스에 의한 블랭킹 판재의 응력 해석)

  • Cho, Jae-Ung;Han, Moon-Sik
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.7 no.2
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    • pp.66-71
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    • 2008
  • The data of the deformation and the stress according to time are studied at upper model of press and lower model of the blanking plate applied by press with the width, length and height of 0.4 m and 0.6 m respectively. The press is pushing downward on the plate fixed at the lower floor. These data are compared and investigated through this study. By using these results, there is the maximum deformation at 4 corners in the lower plate model of aluminium alloy fixed at lower floor. This deformation incase of elapsed time of 0.6 second becomes 4 times as much as in case of elapsed time of 0.2 second. The quantity of deformation at the lower plate model becomes more than at the upper press model to the extent of 10%. At the lower plate model of aluminium alloy, there is the maximum Von-Mises equivalent stress at 4 corners and both sides of middle area on the lower plate model of aluminium alloy. This stress in case of elapsed time of 0.6 second becomes 6 times as much as in case of elapsed time of 0.2 second. The Von-Mises equivalent stress of lower plate model becomes 2 times as much as that of upper press mode.

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AN EXPERIMENTAL STUDY ON AIR-WATER COUNTERCURRENT FLOW LIMITATION IN THE UPPER PLENUM WITH A MULTI-HOLE PLATE

  • NO HEE CHEON;LEE KYUNG-WON;SONG CHUL-HWA
    • Nuclear Engineering and Technology
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    • v.37 no.6
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    • pp.557-564
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    • 2005
  • Air-water countercurrent flow limitation at perforated plates with four holes was investigated in a vertical tank to see the effects of the plate thickness, the number of hole, and the diameter of the hole on the onset of CCFL. The thickness of plates was 1 cm and 4 cm, with a relatively large hole diameter of 5 cm. The collapsed water level formed on the perforated plate and its distribution in the upper plenum were measured. The gas flow rate in the multi-hole plate is relatively higher than one in the single tube because some of holes in the multi-hole plate provide a flow path fur liquid with less air-liquid resistance than in the single tube. The onset of CCFL occurred at nearly the same air flow rate regardless of the plate thickness. The negligible effect of the plate thickness on CCFL means that the flooding is initiated at the top of the plate rather than at its bottom. It turns out that $j_k$ and $K_k$ better fit the data than $H_k$ when hole diameter is greater than 2.86 cm. In our experimental ranges, the collapsed water levels at the onset of CCFL ranged from 7.5 cm to 10.5 cm. There was no three dimensional distribution of water level before and after the onset of CCFL.

Effects of Corner Radius on the Stress Strength Safety of LPG Steel Cylinder (LPG 강재용기의 응력강도 안전성에 미치는 코너반경의 영향)

  • Kim, Chung Kyun
    • Journal of the Korean Institute of Gas
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    • v.19 no.1
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    • pp.18-22
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    • 2015
  • This paper presents the stress strength safety of LPG steel cylinder for various corner radiuses of upper round end plate and lower round end plate by using a finite element method. The FEM analyzed results indicate that the most influential elements is a corner radius of upper round end plate and lower round end plate rather than a thickness of LPG cylinder. But, the thickness of a steel cylinder is an important design element considering for a weight reduction of a cylinder. Thus, this paper recommends that the LPG steel cylinder thickness is 2.3~2.6mm and the corner radius of upper round end plate and lower round end plate is over 157mm as an optimum design for the maximum testing pressure of 3.04MPa.

The Effect of Duct Inlet Condition on Flow Characteristics of Fan (덕트의 입구조건이 팬의 특성에 미치는 영향)

  • Kim, J.S.;Cho, K.R.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.7 no.2
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    • pp.217-224
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    • 1995
  • The effects of duct inlet conditions on fan characteristics and upper wind velocity fields were investigated for two kinds of impellers. As the duct inlet condition, the relative positions between duct inlet and fan impeller and the size of baffle plate mounted on a duct inlet were selected. The 3-dimensional velocity components in flow fields were measured by a 5-holes pitot tube. From the results of measurements, it was found that the size of baffle plate scarecely effect on upper wind flow fields and characteristics of fan. It was also confirmed that the upper wind velocity distributions can be estimated by the potential flow field with large baffle plate at duct inlet.

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The Performance of Insulation of Noise by Air between Floors According to Structure Systems of Apartment (공동주택 구조형태별 층간 공기전달음 차단 성능)

  • Lee, Byung-Kwon
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2007.05a
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    • pp.1152-1155
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    • 2007
  • Lately concerns about structure have been increased by advantages of floor impact noise, poilitical induction and changeability. Hence, Flat Plate Structure has been constructed increasingly. This study shows the comparison of the performance of sound insulation of Flat Plate Structure System and the existing Wall Structure. For this study, taking the same level organization of Daelim Architectural Environmental Research Center, I found the performance of sound insulation between the upper and lower floors about Wall Structure and Flat Plate Structure. Consequently, the performance of sound insulation between upper and lower floors of Flat Plate Structure was 3-5dB higher was approximately 3-5dB higher than one of Wall Structure. Especially, the performance of sound insulation on the upper floor was 1-3dB higher than on the lower floor. In addition, as the result of comparing radiation sound which radiates from the wall of lower floors with each structure system, Flat Plate Structure was about 4dB higher with Rw than Wall Structure. As we see totally, the performance of sound insulation of Flat Plate Structure is highter than one of the Wall Structure. It is 3-5dB higher and the main reason for this result depends on the existence of the wall which can radiate sound and nonexistence.

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Operation of PCR chip by micropump (마이크로펌프를 이용한 PCR Chip의 구동)

  • 최종필;반준호;장인배;김헌영;김병희
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.10a
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    • pp.463-467
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    • 2004
  • This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

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