• Title/Summary/Keyword: Ultrathin oxide

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STM Investigation of Methanol Adsorption on Al2O3/NiAl(110) Deposited by Pulsed Injection

  • Lee, Youn-Joo;Choi, E.;Lyo, In-Whan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.318-318
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    • 2011
  • Etching of an ultrathin aluminum oxide film on NiAl(110) substrate by methanol is studied by home-built scanning tunneling microscopy at room-temperature. We deposited liquid methanol on thin alumina film by using a high speed solenoid valve suitable for deposition of thermally unstable molecules. It is found that only the reflection domain boundary between two domains was preferentially etched by methanol. Since the reflection domain boundary has many oxygen vacancies and irregular structures, judging from the fact, we assume that oxygen vacancies cause the chemically reactive phenomena of methanol in reflection domain boundary on an alumina film. The reactivity of the reflection domain boundary is attributed to the oxygen vacancies due to irregular structures. Similar reactivity is found on the oxygen deficient alumina produced on top of the intact alumina.

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Material and Electrical Characteristics of Oxynitride Gate Dielectrics prepared in $N_2$O ambient by Rapid Thermal Process (RTP로 $N_2$O 분위기에서 제조한 Oxynitride Gate 절연체의 물질적 전기적 특성)

  • Park, Jin-Seong;Lee, Woo-Sung;Shim, Tea-Earn;Lee, Jong-Gil
    • Korean Journal of Materials Research
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    • v.2 no.4
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    • pp.285-292
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    • 1992
  • Ultrathin(8nm) oxynitride (SiOxNy) film have been formed on Si(100) by rapid thermal processing(RTP) in $O_2$and $N_2$O as reactants. Compared with conventional furnace $O_2$ oxide, the oxynitride dielectrics shows better characteristics of I-V and TDDB, and less flat-band voltage shift. The oxynitride has a behavior of Fowler-Nordheim tunneling in the region of V 〉${\varphi}_0$ simialr to pure Si$O_2$oxide. The relative dielectric constant of oxynitride is higher than that of conventional pure oxide. Excellent diffusion harrier property to dopant(B$F_2$) is also observed. Nitrogen depth profiles by SIMS, AES, and XPS show nitrogen pile - up at Si$O_2$/Si interface, which can explain the improved properties of oxynitride dielectrics.

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Label-free Femtomolar Detection of Cancer Biomarker by Reduced Graphene Oxide Field-effect Transistor

  • Kim, Duck-Jin;Sohn, Il-Yung;Jung, Jin-Heak;Yoon, Ok-Ja;Lee, N.E.;Park, Joon-Shik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.549-549
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    • 2012
  • Early detection of cancer biomarkers in the blood is of vital importance for reducing the mortality and morbidity in a number of cancers. From this point of view, immunosensors based on nanowire (NW) and carbon nanotube (CNT) field-effect transistors (FETs) that allow the ultra-sensitive, highly specific, and label-free electrical detection of biomarkers received much attention. Nevertheless 1D nano-FET biosensors showed high performance, several challenges remain to be resolved for the uncomplicated, reproducible, low-cost and high-throughput nanofabrication. Recently, two-dimensional (2D) graphene and reduced GO (RGO) nanosheets or films find widespread applications such as clean energy storage and conversion devices, optical detector, field-effect transistors, electromechanical resonators, and chemical & biological sensors. In particular, the graphene- and RGO-FETs devices are very promising for sensing applications because of advantages including large detection area, low noise level in solution, ease of fabrication, and the high sensitivity to ions and biomolecules comparable to 1D nano-FETs. Even though a limited number of biosensor applications including chemical vapor deposition (CVD) grown graphene film for DNA detection, single-layer graphene for protein detection and single-layer graphene or solution-processed RGO film for cell monitoring have been reported, development of facile fabrication methods and full understanding of sensing mechanism are still lacking. Furthermore, there have been no reports on demonstration of ultrasensitive electrical detection of a cancer biomarker using the graphene- or RGO-FET. Here we describe scalable and facile fabrication of reduced graphene oxide FET (RGO-FET) with the capability of label-free, ultrasensitive electrical detection of a cancer biomarker, prostate specific antigen/${\alpha}$ 1-antichymotrypsin (PSA-ACT) complex, in which the ultrathin RGO channel was formed by a uniform self-assembly of two-dimensional RGO nanosheets, and also we will discuss about the immunosensing mechanism.

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Electrical Characterization of Ultrathin Film Electrolytes for Micro-SOFCs

  • Shin, Eui-Chol;Ahn, Pyung-An;Jo, Jung-Mo;Noh, Ho-Sung;Hwang, Jaeyeon;Lee, Jong-Ho;Son, Ji-Won;Lee, Jong-Sook
    • Journal of the Korean Ceramic Society
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    • v.49 no.5
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    • pp.404-411
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    • 2012
  • The reliability of solid oxide fuel cells (SOFCs) particularly depends on the high quality of solid oxide electrolytes. The application of thinner electrolytes and multi electrolyte layers requires a more reliable characterization method. Most of the investigations on thin film solid electrolytes have been made for the parallel transport along the interface, which is not however directly related to the fuel cell performance of those electrolytes. In this work an array of ion-blocking metallic Ti/Au microelectrodes with about a $160{\mu}m$ diameter was applied on top of an ultrathin ($1{\mu}m$) yttria-stabilized-zirconia/gadolinium-doped-ceria (YSZ/GDC) heterolayer solid electrolyte in a micro-SOFC prepared by PLD as well as an 8-${\mu}m$ thick YSZ layer by screen printing, to study the transport characteristics in the perpendicular direction relevant for fuel cell operation. While the capacitance variation in the electrode area supported the working principle of the measurement technique, other local variations could be related to the quality of the electrolyte layers and deposited electrode points. While the small electrode size and low temperature measurements increaseed the electrolyte resistances enough for the reliable estimation, the impedance spectra appeared to consist of only a large electrode polarization. Modulus representation distinguished two high frequency responses with resistance magnitude differing by orders of magnitude, which can be ascribed to the gadolinium-doped ceria buffer electrolyte layer with a 200 nm thickness and yttria-stabilized zirconia layer of about $1{\mu}m$. The major impedance response was attributed to the resistance due to electron hole conduction in GDC due to the ion-blocking top electrodes with activation energy of 0.7 eV. The respective conductivity values were obtained by model analysis using empirical Havriliak-Negami elements and by temperature adjustments with respect to the conductivity of the YSZ layers.

Ultrastructural Observations of Some Oral Mucosal Lesions II. Oral Leukoplakia (수종 구강점막질환에 관한 전자현미경적 연구 II. 구강백반증)

  • 정성창
    • Journal of Oral Medicine and Pain
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    • v.8 no.1
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    • pp.33-41
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    • 1983
  • The authors observed the ultrastructure of oral leukoplakia simplex of gingiva, buccal mucosa, tongue and alveolar ridge. For the purpose of clearly defining the lesions under investigation in this study, leukoplakias were cinsidered to be any white patches on the oral mucous membranes that could not be removed by rubbing and could not be classified clinically or microscopically as another diagnosable disease. The tissue to be examined were embedded in paraffin for light microscopic study. The tissue to be examined under the electronomicroscope were fixed in 2.5% glutaraldehyde in 0.1M cacodylate buffer and 1% osmic acid in 0.1M cacodylate buffer, dehydrated with guaded alchol, and treated with propylene oxide, and embedded in Epon.Ultrathin sections were obtained by LKB III ultrotome, stained with uranyl acetate/lead citrate, and examined with Corinth 500EM. The results were as follows : 1. Epithelium of leukoplakia consisted of stratum basale, stratum spinosum, stratum granulosum and stratum corneum. 2. There was hyperorthokerotosis or hyperparakeratosis. 3. Granular cells contained a lot number of membrane coating granule showing lamellar structure, clearing ot codensation, and a lot of keratohyaline granule varied in size. 4. An increased concentration of tonofilaments and an increased number of desmosomes were found in the stratum spinosum. 5. Basal lamina generally showed its continuity, but in some locatoins, its interreption and multiplication appeared.

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Synthesis of Nickel and Copper Nanopowders by Plasma Arc Evaporation

  • Cho, Young-Sang;Moon, Jong Woo;Chung, Kook Chae;Lee, Jung-Goo
    • Journal of Powder Materials
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    • v.20 no.6
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    • pp.411-424
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    • 2013
  • In this study, the synthesis of nickel nanoparticles and copper nanospheres for the potential applications of MLCC electrode materials has been studied by plasma arc evaporation method. The change in the broad distribution of the size of nickel and copper nanopowders is successfully controlled by manifesting proper mixture of gas ambiance for plasma generation in the size range of 20 to 200 nm in diameter. The factors affecting the mean diameter of the nanopowder was studied by changing the composition of reactive gases, indicating that nitrogen enhances the formation of larger particles compared to hydrogen gas. The morphologies and particle sizes of the metal nanoparticles were observed by SEM, and ultrathin oxide layers on the powder surface generated during passivation step have been confirmed using TEM. The metallic FCC structure of the nanoparticles was confirmed using powder X-ray diffraction method.

Dependence of LaAlO3/SrTiO3 Interfacial Conductivity on the Thickness of LaAlO3 Layer Investigated by Current-voltage Characteristics (LaAlO3 두께에 따른 LaAlO3/SrTiO3 계면에서의 전류-전압 특성을 이용한 전도성 변화 연구)

  • Moon, Seon-Young;Baek, Seung-Hyub;Kang, Chong-Yun;Choi, Ji-Won;Choi, Heon-Jin;Kim, Jin-Sang;Jang, Ho-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.8
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    • pp.616-619
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    • 2012
  • Oxides possess several interesting properties, such as ferroelectricity, magnetism, superconductivity, and multiferroic behavior, which can effectively be used oxide electronics based on epitaxially grown heterostructures. The microscopic properties of oxide interfaces may have a strong impact on the electrical transport properties of these heterostructures. It was recently demonstrated that high electrical conductivity and mobility can be achieved in the system of an ultrathin $LaAlO_3$ film deposited on a $TiO_2$-terminated $SrTiO_3$ substrate, which was a remarkable result because the conducting layer was at the interface between two insulators. In this study, we observe that the current-voltage characteristics exhibit $LaAlO_3$ thickness dependence of electrical conductivity in $TiO_2$-terminated $SrTiO_3$. We find that the $LaAlO_3$ layers with a thickness of up 3 unit cells, result in highly insulating interfaces, whereas those with thickness of 4 unit cells and above result in conducting interfaces.

Synthesis and Catalytic Characteristics of Thermally Stable TiO2/Pt/SiO2 Hybrid Nanocatalysts (고온에서 안정적인 TiO2/Pt/SiO2 하이브리드 나노촉매의 제작 및 촉매 특성)

  • Reddy, A. Satyanarayana;Jung, Chan-Ho;Kim, Sun-Mi;Yun, Jung-Yeul;Park, Jeong-Young
    • Journal of Powder Materials
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    • v.18 no.6
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    • pp.532-537
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    • 2011
  • Thermally stable $TiO_2$/Pt/$SiO_2$ core-shell nanocatalyst has been synthesized by chemical processes. Citrated capped Pt nanoparticles were deposited on amine functionalized silica produced by Stober process. Ultrathin layer of titania was coated on Pt/$SiO_2$ for preventing sintering of the metal nanoparticles at high temperatures. Thermal stability of the metal-oxide hybrid catalyst was demonstrated heating the sample up to $600^{\circ}C$ in air and by investigating the morphology and integrity of the structure by transmission electron spectroscopy. The surface analysis of the constituent elements was performed by X-ray photoemission spectroscopy. The catalytic activity of the hybrid catalysts was investigated by CO oxidation reaction with oxygen as a model reaction.

Improved Contact property in low temperature process via Ultrathin Al2O3 layer (Al2O3 층을 이용한 저온공정에서의 산화물 기반 트랜지스터 컨택 특성 향상)

  • Jeong, Seong-Hyeon;Sin, Dae-Yeong;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.55-55
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    • 2018
  • Recently, amorphous oxides such as InGaZnO (IGZO) and InZnO (IZO) as a channel layer of an oxide TFT have been attracted by advantages such as high mobility, good uniformity, and high transparency. In order to apply such an amorphous oxide TFTs to a display, the stability in various environments must be ensured. In the InGaZnO which has been studied in the past, Ga elements act as a suppressor of oxygen vacancy and result in a decreased mobility at the same time. Previous studies have been showed that the InZnO, which does not contain Ga, can achieve high mobility, but has relatively poor stability under various instability environments. In this study, the TFTs using $IZO/Al_2O_3$ double layer structure were studied. The introduction of an $Al_2O_3$ interlayer between source/drain and channel causes superior electrical characteristics and electrical stability as well as reduced contact resistance with optimally perfect ohmic contact. For the IZO and $Al_2O_3$ bilayer structures, the IZO 30nm IZO channels were prepared at $Ar:O_2=30:1$ by sputtering and the $Al_2O_3$ interlayer were depostied with various thickness by ALD at $150^{\circ}C$. The optimal sample exhibits considerably good TFT performance with $V_{th}$ of -3.3V and field effect mobility of $19.25cm^2/Vs$, and reduced $V_{th}$ shift under positive bias stress stability, compared to conventional IZO TFT. The enhanced TFT performances are closely related to the nice ohmic contact properties coming from the defect passivation of the IZO surface inducing charge traps, and we will provide the detail mechanism and model via electrical analysis and transmission line method.

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Layer-by-Layer Self-Assembled Multilayer Film Composed of Polyaniline, Graphene Oxide, and Phytic Acid for Supercapacitor Application (슈퍼커패시터 활용성 자가조립된 폴리아닐린, 그래핀 옥사이드 그리고 피트산으로 구성된 다층 초박막)

  • Lee, Myungsup;Hong, Jong-Dal
    • Journal of the Korean Chemical Society
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    • v.59 no.1
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    • pp.36-44
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    • 2015
  • This article describes synthesis and electrochemical properties of layer-by-layer self-assembled multilayer film composed of polyaniline (PANi), graphene oxide (GO) and phytic acid (PA), whereby the GO was electrochemically reduced to ERGO, resulting in $(PANi/ERGO/PANi/PA)_{10}$ film electrode. Especially, we examined the possibility to improve the volumetric capacitive property of $(PANi/ERGO)_{20}$ film electrode via combining a spherical hexakisphosphate PA nanoparticle into the multilayer film that would dope PANi properly and also increase the porosity and surface area of the electrode. The electrochemical performances of the multilayer film electrodes were investigated using a three-electrode configuration in 1 M $H_2SO_4$ electrolyte. As a result, the $(PANi/ERGO)_{20}$ electrode showed the volumetric capacitance of $666F/cm^3$ at a current density of $1A/cm^3$, which was improved to the volumetric capacitance of $769F/cm^3$ for the $(PANi/ERGO/PANi/PA)_{10}$ electrode, in addition to the cycling stability maintained to 79.3% of initial capacitance after 1000 cycles. Thus, the electrochemical characteristics of the $(PANi/ERGO)_{20}$ electrode, which was densely packed by ${\pi}-{\pi}$ stacking between the electron-rich conjugate components, could have been improved through structural modification of the multilayer film via combining a spherical hexakisphosphate PA nanoparticle into the multilayer film.