• 한국생산제조학회지
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• 제24권5호
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• pp.475-480
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• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• 비파괴검사학회지
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• 제29권4호
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• pp.293-298
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• 2009

본 연구에서는 나노 표면층의 특성 평가를 위해 원자현미경에 초음파 특성을 결합하여 초음파 원자 현미경을 개발하였다. 초음파 원자 현미경은 기존의 나노 표면층에 대한 토포그래프 이미지뿐만 아니라 국부적인 이종부분으로 이루어진 표면에서의 물리적 특성차이에 의한 표면의 탄성 특성 이미지를 얻을 수 있다. 본 연구에서는 프로토타입의 UAFM 장치를 구성하고 이를 몇몇 응용분야에 적용하였다. 구축한 프로토타입의 UAFM 시스템을 이용하여 증착 실리콘 박막층과 냉간 압조용 강의 구상화 그리고 탄소 섬유 강화 복합재료의 표면에 대한 탄성 이미지를 성공적으로 얻을 수 있었다.

• 한국생산제조학회지
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• 제23권5호
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• pp.478-484
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• 2014

Ultrasonic atomic force microscopy(Ultrasonic-AFM) can be used to obtain images of the elastic properties of a subsurface and to evaluate the elastic properties by measuring the contact resonance frequency. When a tip is in contact with the sample, it is necessary to understand the cantilever behavior and the tip-sample interaction for the quantitative and reliable analysis. Therefore, precise analysis models that can accurately simulate the tip-sample contact are required; these can serve as good references for predicting the contact resonance frequency. In this study, modal analyses of the first four modes were performed to calculate the contact resonance frequency by using a spring model, and the deformed shapes of the cantilever were visualized at each mode. We presented the contact characteristics of the cantilever with a variety of contact conditions by applying the contact area, contact material thickness, and material properties as the parameters for the FEM analysis.

• 한국정밀공학회지
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• 제30권2호
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• pp.148-153
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• 2013

This study demonstrates a novel hybrid surface polishing process combining non-traditional electrochemical polishing(ECP) with external artificial ultrasonic vibration. ECP, typical noncontact surface polishing process, has been used to improve surface quality without leaving any mechanical scratch marks formed by previous mechanical processes, which can polish work material by electrochemical dissolution between two electrodes surfaces. This research suggests vibration electrochemical polishing(VECP) assisted by ultrasonic vibration for enhancing electrochemical reaction and surface quality compared to the conventional ECP. The localized roughness of work material is measured by atomic force microscopy(AFM) for detailed information on surface. Besides roughness, overall surface quality, material removal rate(MRR), and productivity etc. are compared with conventional ECP.

• 비파괴검사학회지
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• 제30권2호
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• pp.132-138
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• 2010

본 연구에서는 접촉역학 특성에 의한 캔틸레버 탑의 접촉-진동을 연구하고 나노스케일의 표면에서 탄성특성을 이미지화 하였다. 스프링-질량 모텔과 Herzian 이론을 이용하여 접촉공진주파수를 이론적으로 계산하고 초음파원자현미경을 이용하여 캔틸레버의 자유공진주파수와 접촉공진주파수의 변화를 분석하였다. 또한, 프로토타입의 초음파원자현미경을 이용하여 구상화 열처리된 시험편의 탄성 이미지를 위상과 진폭 신호를 이용하여 성공적으로 얻을 수 었었다.

• 한국생산제조학회지
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• 제22권5호
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• pp.795-799
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• 2013

This paper describes a novel hybrid surface polishing process combining non-traditional electrochemical polishing (ECP) with external artificial ultrasonic vibration. The purpose of this study is to develop an easier method for improving stainless steel surfaces. To this end, vibration electrochemical polishing (VECP), a novel ultrasonic manufacturing process, for enhancing electrochemical reaction and surface quality compared with that achieved using conventional ECP is suggested. In addition, for finding the optimized experimental conditions, the two methods are compared under various current densities. Localized roughness of the work material is measured with atomic force microscopy (AFM) and scanning electron microscopy (SEM) for obtaining detailed surface information.

• 센서학회지
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• 제13권1호
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• pp.66-71
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• 2004

Pt-doped zinc oxide (ZnO:Pt) films were deposited by ultrasonic spray pyrolysis. Resistivity variation with Pt concentration was measured. The Pt distribution in ZnO:Pt films was studied through Auger Electron Spectroscopy (AES). The ZnO:Pt films were annealed in the ambient of air, water vapor and ozone, respectively. The variation in crystallographic properties and surface morphologies with respect to the annealing condition was observed by X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM). The resistivity variation of the films with the annealing condition was measured. Finally, Atomic Force Microscopy (AFM) measurements were carried out to study the effects of the annealing on the roughness of ZnO:Pt films.

• 비파괴검사학회지
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• 제32권2호
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• pp.142-148
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• 2012

본 연구에서는 초음파원자현미경 캔틸레버의 접촉 공진주파수를 이용하여 실리콘 웨이퍼와 나노 스케일의 폴리머 박막 패턴의 접합면 사이에서 나타나는 접합 특성을 UAFM 이미지를 통해 평가하였다. 이를 위해 실리콘 웨이퍼의 표면 처리 공정을 다르게 하였고 리소그래피 공정을 통해 300 nm의 폴리머 박막 패턴을 제작하였다. 제작된 시험편의 접합 상태를 광학현미경 이미지를 통해 서로 비교하였고 나노 스크래치 시험의 임계하중 값을 통하여 나노 패턴의 접합 상태를 검증하였다. 각각의 시험편에 대해 UAFM을 이용하여 $1{\mu}m{\times}1{\mu}m$ 크기의 표면 이미지와 표층부의 접합 상태이미지를 각각 얻었고 접촉 공진주파수의 진폭과 위상의 변화로 인한 접합부의 이미지 콘트라스트 차이로 접합 상태를 평가하였다.

• 한국표면공학회지
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• 제54권6호
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• pp.315-323
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• 2021

In general, surface treatments of electroless Ni-P coating are extensively applied in the industry due to their excellent properties for considerable wear resistance, hardness, corrosion resistance. This study aims to determine the effect of ultrasonic conditions on the morphology, alumina content, roughness, hardness, and corrosion resistance of electroless Ni-P-Al₂O₃ composite coatings. The characteristics were analyzed by Energy-dispersive X-ray spectroscopy (EDX), x-ray diffractions (XRD), and atomic force microscopy (AFM), etc. In this study, the effect of ultrasonic condition uniformly distributed alumina within Ni-P solution resulting in a smoother surface, lower surface roughness. Furthermore, the corrosion resistance behavior of the coating was analyzed using tafel polarization curves in a 3.5 wt.% NaCl solution at 25 ℃. Under ultrasonic, Al₂O₃ content in Ni-P composite solution increased from 0.5 to 5.0 g/L, Al₂O₃ content at 3.0 g/L was showed a significantly enhanced corrosion resistance. These results suggested that ultrasonic condition was an effective method to improve the properties of the composite coating.

• 비파괴검사학회지
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• 제31권2호
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• pp.174-180
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• 2011

본 연구에서는 초음파원자현미경을 이용하여 비파괴적인 표면탄성이미지 분석과 나노표면에서의 기계적 물성 평가를 연구하였다. 이를 위해 접촉역학 특성에 따른 캔틸레버의 공진주파수 변화를 이론적으로 해석하고 실험적으로 측정하였다. 스프링-질량 모델과 Herzian 이론을 이용하여 계산한 이론적인 접촉공천주파수는 초음파원자현미경 캔틸레버의 실험적인 접촉 공진주파수의 변화와 매우 유사하였다. 결과적으로, 초음파원자현미경의 표면 높이 이미지와 진폭이미지를 성공적으로 얻을 수 있었고 진폭신호를 통하여 시료표면에서의 탄성특성을 정성적으로 평가하였다.