Journal of the Korean Society for Nondestructive Testing (비파괴검사학회지)

The Korean Society for Nondestructive Testing (한국비파괴검사학회)
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Vibro-Contact Analysis of Ultrasonic Atomic Force Microscopy Tip and It's Application to Nano Surface

UAFM(초음파원자현미경) 팁의 진동-접촉 해석과 나노 표면에의 응용

  • 박태성 (서울산업대학교 기계공학과) ;
  • 곽동열 (서울산업대학교 기계공학과) ;
  • 박익근 (서울산업대학교 기계공학과) ;
  • 김정석 (한양대학교 자동차공학과)
  • Received : 2010.01.05
  • Accepted : 2010.04.16
  • Published : 2010.04.30
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Abstract

Vibro-contact of cantilever tip is studied with respect to contact mechanics and an elastic characteristic of nanoscale surface is imaged. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian models, and the variation of resonance frequency of cantilever was analyzed when the cantilever was free and contact. The elasticity imaging was also achieved successfully using phase and amplitude signals obtained from the spheroidized steel specimens by prototype ultrasonic AFM.

본 연구에서는 접촉역학 특성에 의한 캔틸레버 탑의 접촉-진동을 연구하고 나노스케일의 표면에서 탄성특성을 이미지화 하였다. 스프링-질량 모텔과 Herzian 이론을 이용하여 접촉공진주파수를 이론적으로 계산하고 초음파원자현미경을 이용하여 캔틸레버의 자유공진주파수와 접촉공진주파수의 변화를 분석하였다. 또한, 프로토타입의 초음파원자현미경을 이용하여 구상화 열처리된 시험편의 탄성 이미지를 위상과 진폭 신호를 이용하여 성공적으로 얻을 수 었었다.

Keywords

Acknowledgement

Supported by : 한국연구재단

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