Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester (초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가)
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- Journal of Sensor Science and Technology
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- v.28 no.1
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- pp.58-63
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- 2019