• 한국정밀공학회지
• /
• 제24권5호
• /
• pp.104-109
• /
• 2007

Photochemical patterning of self-assembled mono layers (SAMs) has been performed by diode pumped solid state (DPSS) 3rd harmonic Nd:$YVO_4$ laser with wavelength of 355 nm. SAMs patternings of parallel lines have subsequently been used either to generate compositional chemical patterns or fabricate microstructures by a wet etching. This paper describes a selective etching process with patterned SAMs of alkanetiolate molecules on the surface of gold. SAMs formed by the adsorption of alkanethiols onto gold substrate employs as very thin photoresists. In this paper, the influence of the interaction between the functional group of SAMs and the etching solution is studied with optimal laser irradiation conditions. The results show that hydrophobic functional groups of SAMs are more effective for selective chemical etching than the hydrophilic ones.

• 대한기계학회논문집A
• /
• 제28권9호
• /
• pp.1270-1275
• /
• 2004

Standard positive photoresist techniques were adapted to generate nano-scale patterns of gold substrate using self-assembled monolayers (SAMs) and femtosecond laser. SAMs formed by the adsorption of alkanethiols onto gold substrate are employed as very thin photoresists, Alkanethiolates formed by the adsorption of alkanethiols are oxidized on exposure to UV light in the presence of air to alkylsulfonates. Specifically, it is known that deep UV light of wavelength less than 200nm is necessary for oxidation to occur. In this study, ultrafast laser of wavelength 800nm and pulse width 200fs is applied for photolithography. Results show that ultrafast laser of visible range wavelength can replace deep UV laser source for photo patterning using thin organic films. Femtosecond laser coupled near-field scanning optical microscopy facilitates not only the patterning of surface chemical structure, but also the creation of three-dimensional nano-scale structures by combination with suitable etching methods.

• 한국정밀공학회지
• /
• 제27권10호
• /
• pp.23-28
• /
• 2010

Resistance trimming and cutting processes of printed circuit board by making use of high power UV laser with nano-second pulse width have been proposed and investigated experimentally. Also laser-based application system with high flexibility and complex has been designed and adopted power controller, auto beam size control, auto-focusing and control program developed for ourselves. The function of each module shows that they can be reliable for industrial equipments. Resistance trimming method used a plunge and double cut process with $20{\mu}m$ spot size beam. Results show that double cut process is more effective to control resistance trimming in precision than plunge cut process.

• 한국레이저가공학회지
• /
• 제11권2호
• /
• pp.26-32
• /
• 2008

Micro lens array (MLA) is widely used in information technology (IT) industry fields, for examples such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method, micro etching, electroplating, micromachining and laser local heating. Laser local thermal-expansion (LLTE) technology demonstrates the formation of microdots on the surface of polymer substrate, in this paper. We have also investigated the new direct fabrication method of placing the MLA on the surface of a SU-8 photoresist layer. We have obtained the 3D shape of the micro lens processed by UV laser irradiation and have experimentally verified the optimal process conditions.

• 조명전기설비학회논문지
• /
• 제28권7호
• /
• pp.13-18
• /
• 2014

On 250.199nm uv-line, witch has the potential to emit as a laser line, from a ccrf-excited He-Zn discharge with overlapped DC was carried out optimization of the discharge parameters and measurement of the optical gain. In this study the optical gain of the 250.199nm uv-line has been optained 4% for the first time. At a rf-power of 400W with the frequency 13.56MHz the optimal He-pressure indicated 2kPa.

• Bulletin of the Korean Chemical Society
• /
• 제33권2호
• /
• pp.597-600
• /
• 2012

Polyynes were formed by laser ablation of a graphite target in deionized water ($H_2O$ and $D_2O$) and various organic solvents such as acetonitrile, n-hexane, and c-hexane and were identified by analyzing ultraviolet (UV) absorption and Raman spectra. We assigned the major UV absorption peaks that coincided with the electronic transitions corresponding to linear polyyne chains. The UV absorption peak intensities of a polyyne solution decreased as the holding temperature of the solution increased. Also, the absorption spectra of polyynes obtained by laser ablation of a graphite target at different volume fractions of $H_2O$ and $D_2O$ were examined.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2004년도 학술대회 논문집 정보 및 제어부문
• /
• pp.478-480
• /
• 2004

다이아몬드 톱날을 이용한 얇은 Si 웨이퍼의 기계적인 다이싱은 chipping, crack 등의 문제점을 발생시킨다. 또한 stacked die 나 multi-chip등과 같은 3D-WLP(wafer level package)에서 via를 생성하기 위해 현재 사용되는 화학적 etching은 공정속도가 느리고 제어가 힘들며, 공정이 복잡하다는 문제점을 가지고 있다. 이러한 문제점을 해결하기 위해 현재 연구되고 있는 분야가 레이저를 이용한 웨이퍼 다이싱 및 드릴링이다. 본 논문에서는 UV 레이저를 이용한 얇은 Si 웨이퍼 다이싱 및 드릴링 시스템에 대해 소개하고, 웨이퍼 다이싱 및 드릴링 실험결과를 바탕으로 적절한 레이저 및 공정 매개변수에 대해 설명한다.

• 한국진공학회지
• /
• 제9권1호
• /
• pp.76-80
• /
• 2000

CF & $CF_2$ radicals in a $C_4F_8$ inductively coupled plasma were observed with laser induced fluorescence. 251.9nm UV laser was used for the $CF_2$ excitation and 265.3nm UV emitted light for the detection which has the maximum intensity among many induced fluorescence lights. In the case of CF radical detection, 232.9nm UV laser was used for the excitation and 247.6nm for the detection. $CF_2$ radical density increased toward substrate, while CF radical had its maximum at about 10nm away from the substrate. The atomic fluorine density which was studied by the actinometry increased as the position moves away from the substrate. This phenomena was thought to have a close relation with the polymer growth on the wafer. When the bias voltage increased, $CF_2$ , CF radicals decreased while the atomic fluorine increased tio some extent and then decreased, which was thought to be due to the change in the ionization and dissociation.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2008년도 춘계학술대회 논문집
• /
• pp.375-376
• /
• 2008

• 한국레이저가공학회지
• /
• 제18권1호
• /
• pp.18-22
• /
• 2015

In this paper, controlling shape of optical fiber tip for endoscope was investigated for eliminating blind spot. The blind spot of endoscope is generated by divergence angle of optical fiber, so it is easy to generate blind spot when tightly focusing. In order to eliminate this region, fiber tip is necessary to be controlled as convex or concave. Illumination simulation of convex and concave type of fiber tip in the endoscope was in progress, so the distance of non- blind region was investigated in each case. As well as the simulation, the tip was fabricated as concave shape by UV laser machining. Then the beam radiation was measured to observe the blind region. The result showed that controlling the fiber tip as convex or concave shape makes the narrow blind region of illumination in endoscope.