• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.11
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• pp.6464-6471
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• 2014

The UV curing method is a popular process for lens molding on a unit wafer. This process, however, has several drawbacks including wafer adhesion during the ejection process after curing, errors in lens shape and wafer warpage due to material shrinkage during the curing process, and lens centering errors on both sides of a wafer. Among these, the lens shape error and warpage are influenced directly by the UV curing process due to factors including the UV radiation uniformity, the degree of cure according to UV intensity, and the shrinkage characteristics of the material. Therefore, a theory is needed not only to understand the change in the material characteristics, such as the shrinkage rate due to the curing reaction, but also to establish a model. In addition, an analysis system is needed to realize the model. This study proposes a new analysis method for the wafer lens molding process by Comsol modeling. This method was verified by comparing the results with those of the actual process.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1332-1336
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• 2003

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 8 ${\mu}m$ and 96 ${\mu}m$ were fabricated by the present method, and the replication quality and the optical properties of the replicated microlens were measured and analyzed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.3
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• pp.450-454
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• 2003

It is important to control the processing conditions to maximize the replication quality of UV-molded microstructure. In the present study, the tip radius anil surface roughness of V-groove structure were measured to quantify the replication quality. UV-curing dose and the applied pressure were experimentally selected as the governing Processing conditions that affect the replication quality of the UV-molded part. Finally. an experimental optimization technique combining central composite design and desirability function approach was used to maximize the replication quality of UV-molded structure.

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.91-95
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• 2006

High-density image sensors rave microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using UV transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.17-21
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• 2005

High-density image sensors have microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using W transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.761-768
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• 2011

The large surface micro machining system includes the equipments and processes for manufacturing the ultra precision micro patterned products with large surface through the mechanical machining. Recent major issue on the micro machining technology may be the development of optical parts for the back light unit of display which has the largest market. This special issue makes up with three parts; the large surface micro machining system and machine, machining process and forming process. In this paper, the state-of-the-art and core technology of large surface micro machining system is introduced with focus on the manufacturing technology for the back light unit of LCD TV. Then, some research results on the development of a roll die lathe is introduced which involves the concept of machine design, improvement of thermal characteristics in the spindle system, improvement of relative parallelism and straightness between spindle system and long stroke feed table, machining of micro pitch patterns. Finally, the direct forming process is introduced as the future work in the large surface micro machining field.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.840-843
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• 2004

UV molding is a process for integrating micro/nano polymeric optical components on optoelectronic modules. In the present study, a microlens array for vertical cavity surface emitting laser(VCSEL) to fiber coupling was designed, integrated and tested. At the design stage, design variables ware optimized to maximize the coupling efficiency, and tolerance analysis was carried out. At the integration stage, the UV transparent mold was fabricated and the microlens array on VCSEL array was integrated by UV molding process. Finally the coupling efficiency of VCSEL to fiber was measured and analyzed.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.83-86
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• 2005

In this study, SAM (self-assembled monolayer) was applied as an anti-adhesion layer in the nano molding process, to reduce the surface energy between the nano-stamper and the moldeded polymeric nano patterns. Before depositing SAM on the stamper, the nickel stamper was pretreated to remove oxide on the nickel stamper surface. Then, using the solution deposition method, alkanethiol SAM as an anti-adhesion layer was deposited on nickel surface. To examine the effectiveness of the SAM deposition on the metallic nano stamper, the contact angle and the lateral friction force were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. The surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the high hydrophobic quality of SAM on the nickel stamper maintained under the actual molding environments.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.79-82
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• 2005

Fresnel lens has number of applications in the optical systems because of its advantages. It is nearly flat lens that has small weight. It is conventionally used in lighthouse beacons, condensing unit of overhead projector and etc. Recently, demands of small size optical systems such as display units, information storage systems, optical detecting units had increased. Conventional manufacturing process of high quality Fresnel lens is direct machining. But it is not suitable for mass production because of high cost and long cycle time. Replication process is more suitable for mass production. But the Fresnel lens has number of sharp blade shape prism. In the replication process, this blade shape causes defects that can affect optical efficiency. In this study, replication process of blade shape pattern that has maximum height of $280{\mu}m$, aspect ratio 1.4 for Fresnel lens application.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.113-117
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• 2020

In this paper, We investigated the effect of heat treatment process using photo-thermal effect in order to improve mechanical properties of nanostructure on polymer films made by nanoimprint process with hybrid resin. Nanostructures which have a low refractive characteristic were fabricated by UV nanoimprint and after that heat treatment was performed using IPL (intense pulsed light) under process condition of 550 V voltage, pulse width 5 ms, frequency 0.5 Hz. The transmittance and mechanical property of fabricated nanostructure films were evaluated to observe changes in the pattern transfer rate and mechanical properties of nanostructures. The transmittance of the nanostructure was measured at 97.6% at 550 nm wavelength. Nanoindentation was performed to identify improved anti-scatch properties. Result was compared by the heat source. In case of post treatment with IPL, hardness was 0.51 GPa and in the case of hotplate was 0.27 GPa, resulting the increase of hardness of 1.8 times. Elastic modulus of IPL treated sample was 5.9GPa and Hotplate treated one was 4GPa, showing the 1.4 time increase.