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http://dx.doi.org/10.6117/kmeps.2020.27.4.113

A Study of Mechanical Property Enhancement of Polymer Nanostructure using IPL Treatment  

Kim, D. (Department of Opto-Mechatronics Engineering, Pusan National University)
Kim, D.I. (Opto-mechatronics Research Institute, Pusan National University)
Jeong, M.Y. (Department of Opto-Mechatronics Engineering, Pusan National University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.27, no.4, 2020 , pp. 113-117 More about this Journal
Abstract
In this paper, We investigated the effect of heat treatment process using photo-thermal effect in order to improve mechanical properties of nanostructure on polymer films made by nanoimprint process with hybrid resin. Nanostructures which have a low refractive characteristic were fabricated by UV nanoimprint and after that heat treatment was performed using IPL (intense pulsed light) under process condition of 550 V voltage, pulse width 5 ms, frequency 0.5 Hz. The transmittance and mechanical property of fabricated nanostructure films were evaluated to observe changes in the pattern transfer rate and mechanical properties of nanostructures. The transmittance of the nanostructure was measured at 97.6% at 550 nm wavelength. Nanoindentation was performed to identify improved anti-scatch properties. Result was compared by the heat source. In case of post treatment with IPL, hardness was 0.51 GPa and in the case of hotplate was 0.27 GPa, resulting the increase of hardness of 1.8 times. Elastic modulus of IPL treated sample was 5.9GPa and Hotplate treated one was 4GPa, showing the 1.4 time increase.
Keywords
organic-inorganic hybrid resin; IPL; UV-NIL;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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