• 제목/요약/키워드: UV/ozone

검색결과 255건 처리시간 0.024초

in-line XPS와 AFM을 이용한 유기물의 UV/ozone 건식세정과정 연구 (UV/ozone Cleaning Processes for Organic Films on Si Studied by in-line XPS and AFM)

  • 이경우;황병철;손동수;천희곤;김경중;문대원;안강호
    • 한국진공학회지
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    • 제4권3호
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    • pp.261-269
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    • 1995
  • 본 실험에서는 실리콘 웨이퍼 위에 photoresist(PR)와 octadecyltrichlorosilane(OST, CH3((CH2)17SiCI3)를 입혀서 UV/zone 처리를 어떻게 유기물질들이 UV/zone과 반응하여, 어떻게 표면에서 제거되는지를 in-line으로 연결된 XPS로 분석하고 반응시킨 표면들의 거칠기(roughness)를 AFM을 이용하여 관찰하였다. 실험결과 상온에서 UV/zone 처리를 했을 경우, PR과 OTS같은 유기물질이 표면에서 산화되는 것을 알 수 있었으나 이들이 제거되지 않고 표면에 그대로 남아있음을 알 수 있었다. 그러나 가열하면서(PR:$250^{\circ}C$, ORS:$100^{\circ}C$)UV/ozone 처리를 하였을 경우 표면에서 산화됨과 동시에 이들 산화물들이 표면에서 제거됨을 알 수 있었다. XPS 분석으로부터 이들의 산화반응물은 PR과 OTS 모두 -CH2-, -CH2O-, =C=O, -COO-를 가지는 것으로 나타났으며, 열에너지에 의해서 이들이 표면에서 제거되는 것으로 나타났다. AFM 분석결과는 상온에서 UV/ozone 처리를 하였을 경우에 표면의 거칠기가 적은 반면, 가열하면서 UV/o-zone처리를 하였을 경우에는 표면의 거칠기가 다소 증가하였다.

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오존과 자외선을 이용한 유해 환경 개선에 관한 연구 -가정의 유해 세균 및 집먼지진드기 제거를 중심으로- (Ozone and UV Light-mediated Sanitization of Hazardous Environments -Eradication of Pathogens and Ticks -)

  • 조동연;정상원
    • 대한위생학회:학술대회논문집
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    • 대한위생학회 2004년도 심포지움
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    • pp.8-27
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    • 2004
  • 본 연구에서는 가정의 여러 유해 환경 중에서도 세균과 바이러스 그리고 집먼지진드기를 효과적으로 제거할 수 있는 방법으로서 오존과 자외선이 그 대안이 될 수 있음을 실험을 통해 검증하고 있다. 실험을 통해 다음과 같은 사실이 확인되었다. 첫째, 가정과 유사한 실험 공간에서 오존과 자외선을 이용한 멸균 실험을 통해 실제 가정의 유해 세균이 수 십분 이내에 $99.0\%$ 제거되는 조건을 확인하였다. 둘째, 오존과 자외선을 이용하여 바이러스가 거되는 조건을 확인하였다. 셋째, 집먼지진드기가 제거되는 조건을 확인하였다 오존만을 적용한 조건과 오존과 자외선을 동시에 적용한 조건으로 나누어 실험한 결과를 통해 집먼지진드기는 오존과 자외선의 동시 노출 조건에서 사멸 율이 더 높게 나타났으며, 오존만을 이용한 조건만으로 집먼지진드기가 제거됨을 확인할 수 있었다.

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입상 활성탄을 이용한 오존공정의 개선에 관한 연구 (A study on improvement of ozone process by Granular Activated Carbon)

  • 이유미;이동석
    • 산업기술연구
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    • 제28권A호
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    • pp.23-26
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    • 2008
  • Ozone/GAC and ozone-GAC processes were introduced for treatment of humic acid, which is representative refractory organic compound. The treatment efficiencies of humic acid in each process were analyzed in pH variation, DOC removal, and $UV_{254}$ decrease. $UV_{254}$ decrease in all processes was comparatively high with efficiency over 92%. $UV_{254}$ decrease in ozone alone process was 85%. DOC removal in Ozone-GAC process was the highest with 75%. Removal by Ozone/GAC, Ozone alone processes were 71% and 33% respectively.

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광섬유 대기오존 모니터 (Optical Fiber Atmospheric Ozone Monitor)

  • 정완영
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2002년도 하계종합학술대회 논문집(5)
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    • pp.201-204
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    • 2002
  • A high accuracy ozone monitor using UV absorption method was developed for ambient ozone monitoring. The system was mainly composed of a high power pulsed xenon lamp as UV source, an optical spectrometer with a high sensitivity linear CCD array as UV detector and signal processing unit. The optical signal from the CCD array that provides unusually high response and excellent optical resolution for ozone concentration was converted to digital signal and the digital signal was displayed on screen using PC interface. The optical signal was propagated using optic fiber to reduce optical loss to increase the accuracy of the measuring system. This paper has been studied a interworking signalling protocol between two hybrid networks by analyzing Satellite B-ISDN architecture, DSS2 Layer 3 Signalling protocol, B-ISUP protocol, S-BISUP protocol stack and so on. Also in the paper, messages and primitives have been defined for B-ISDN's Connection Type, Ownership and each protocol in order to connect point-to-multipoint. The ozone sensing properties of the CCD ozone monitor was compared with those of the photo multiplier ozone monitor.

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부식산 제거율 향상을 위한 오존공정의 개선에 관한 연구 (Improvement of Ozone Process for Removal Rate Elevation of Humic Acid)

  • 이유미;손일호;이동석
    • 산업기술연구
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    • 제27권A호
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    • pp.25-29
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    • 2007
  • Ozone alone, Ozone/GAC, Ozone/$H_2O_2$ and Ozone/GAC/$H_2O_2$ processes were introduced for treatment of humic acid, which is a representative refractory organic compound. $H_2O_2$ and GAC used as catalysts for experiment. The treatment efficiencies of humic acid in each process were analyzed for pH variation, DOC removal, and $UV_{254}$ decrease. $UV_{254}$ decrease in Ozone/GAC and Ozone/GAC/$H_2O_2$ processes were the highest with about 93%, and Ozone alone and Ozone/$H_2O_2$ processes were 88%. DOC removal in Ozone/GAC/$H_2O_2$ process was the highest with 71%. Removal by Ozone/GAC, Ozone alone, and Ozone/$H_2O_2$ processes were 66%, 39%, and 47%, respectively.

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UV/Ozone 조사에 의한 PET 직물의 편면 발수가공 (One-side Water-repellent Finish of PET Fabrics using UV/Ozone)

  • 김수진;장진호
    • 한국염색가공학회지
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    • 제23권2호
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    • pp.100-106
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    • 2011
  • UV-curable water-repellent finish was carried out to impart one-side repellency to the PET fabrics using a formulation of a UV-active fluorocarbon agent and a water soluble photoinitiator. The aqueous formulation was padded on the PET fabrics and it was subsequently UV-cured. The unirradiated side of the cured fabrics was made to wetteable to water by the prolonged UV/ozone irradiation. The influence of photoinitiator concentration, agent concentration and UV energy for photodegradation on the performance of the finished fabrics were investigated. The difference in the functional property of front and back sides was examined by measuring water repellency at each side of the treated fabrics, which resulted in four rating difference between two-side. The UV-cured and photodegraded PET surfaces were characterized by ATR, ESCA and FE-SEM.

염소주입량과 반응시간에 따른 HAAs 생성과 고도산화처리에 의한 전구물질 제거 영향 (HAAs Formation by Chlorine Dose and Reaction Time and The Removal Effect of Precursors by The Advanced Oxidation Processes)

  • 김경숙;오병수;주설;강준원
    • 한국물환경학회지
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    • 제20권2호
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    • pp.145-150
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    • 2004
  • This study investigated the effect of chlorine dose and chlorine reaction time for the formation of haloacetic acids (HAAs). According to the results, HAA formation was highly affected by chlorine dose and chlorine reaction time. HAA formation reached a plateau value at 30 mg/L of chlorine dose and 24 hr of chlorine reaction time. For the speciation of formed HAAs in the test water, the concentration of brominated-HAAs was significantly lower than that of chlorinated-HAAs because of low level of bromide ion concentration in the test water. It also investigated the removal efficiency of HAA precursors by several unit processes, such as ozone alone, UV alone, and combined ozone/UV system. Of them, ozone/UV system was proved as the best process to control the HAAs formation. The increase of the brominated-HAAs was observed during ozonation with and without UV irradiation showing the slight increase of total HAA concentrations.

PCR법에 의한 박테리아의 동정 및 오존과 UV에 의한 제거 연구 (Monitoring of Bacteria using PCR Method and Inactivation with Ozone and UV)

  • 오병수;주설;김경숙;강태희;이지영;이혜영;강준원
    • 한국물환경학회지
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    • 제20권2호
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    • pp.170-175
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    • 2004
  • The purpose of this study was to monitor bacteria present in raw water and to investigate the effect of ozone, UV and combined ozone/UV processes for inactivating bacteria. Both polymerase chain reaction (PCR)-fragment length polymorphic analysis (PRA) and PCR-sequence analysis (PSA) were applied for the simultaneous analysis of numerous bacteria species present in each tested water, such as drinking water (DRW), drinking water source (DRWS) and sewage effluent water (SEW). According to the result, the number of detected bacteria species was zero in DRW, 58 in DRWS and 13 in SEW. After treatment of the each process, the ozone/UV process was the most successful for inactivating almost all bacteria. However, it was found that Flavobacterium sp., Pseudomonas sp. and Beta proteobacterium sp. had strong resistant to all tested processes, requiring further detailed study.

Relationship between Stratospheric Ozone and Solar Ultraviolet B Irradiance in Taegu, Korea

  • Suh, Kye-Hong;Cho, Young-Joon
    • The Korean Journal of Ecology
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    • 제24권2호
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    • pp.117-119
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    • 2001
  • Solar ultraviolet-B (UV-B) irradiances incident on a horizontal surface at Taegu, Korea during 1996-1998 were calculated with 5 minute averages of measurements taken every 30 seconds by a broadband UV-B sensor. The average, maximum and minimum of daily UV-B dose were 11.31, 22.04 and 3.20kJ m$^{-2}$ day$^{-1}$ , respectively, for the measuring period. Variations in stratospheric ozone concentration measured from space explain 85% of changes in the daily UV-B dose. It was expected that decrease of 50 Du in stratospheric ozone cause increase of 24.1% in daily UV-B dose in this study.

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Effects of ozone, ultraviolet and an organic acid-based disinfectant against porcine reproductive and respiratory syndrome virus

  • Yoon, Yong-Dae;Kim, Won-Il
    • 한국동물위생학회지
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    • 제36권3호
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    • pp.157-162
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    • 2013
  • A good level of biosecurity practice is important for efficient porcine reproductive and respiratory syndrome (PRRS) control. In the current study, disinfecting ability of ozone against PRRS virus (PRRSV) was evaluated in comparison with ultraviolet (UV) and an organic acid-based disinfectant to assess the possible use of ozone for disinfecting farm vehicles, equipments, and materials to reduce the risk of new virus introduction. For in vitro evaluation, the levels of infectious virus and viral RNA were determined on the swabs collected from the floor surface of each room treated with either ozone, UV or the disinfectant up to 30 min after contamination with 100 mL of VR2332 ($10^5\;TCID_{50}/mL$). For in vivo evaluation, 3, 4-week old, PRRS-free pigs were housed into those rooms right after the last swab collection. Then the pigs in each room were injected intramuscularly with the corresponding swab samples collected at the last time point and pooled per each room. Although ozone, UV, and the disinfectant significantly reduced the levels of PRRSV RNA contamination, ozone was most effective in removing the viral RNA. In addition, the virus collected after at least 10 min exposure to ozone failed to replicate in pigs while the virus collected after treatment with UV and the disinfectant for 30 min still replicated in pigs. Based on the results, it was concluded that ozone is more effective in inactivating PRRSV as compared with UV and the organic acid-based disinfectant.