• Title/Summary/Keyword: Twin boundary

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태양광급 실리콘 정련을 위한 전자빔 용융 모델링과 실시간 불순물 분석 방법 (Numerical modeling of E-beam melting and impurity detection of metallic Si)

  • 지정은;주정훈;장보윤;안영수
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2009년도 추계학술대회 초록집
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    • pp.241-242
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    • 2009
  • 다결정 실리콘 태양전지는 생산단가가 싸고 대면적화가 가능하여 상용화에 적합한 대안으로 제시되어 활발히 연구되고 있다. 그러나 다결정 실리콘 기관은 단결정에 비하야 B, P를 포함한 불순물이 많고 dialocation, twin, grain boundary 등의 결정 결함이 많아 비저항을 떨어뜨린다. 본 연구에서는 금속실리콘(99.9% Sl)을 태양광 급 고 순도 실리콘정녈하기 위하여 E-beam 용융 시 균일한 열전달 방법을 전산모사 하였다. 또한 소량의 반응성 가스($O_2$, $H_2$, $H_2O$)를 공급하는 경우 B와 P가 휘발성이 강한, BO, PO등으로 변하는 경우 QMS(Quadrupole mass spectrometer)로 검출가능 할 것인지 계산하였다.

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종자결정을 활용한 다결정 규소 잉곳 내의 구조적 결함 규명 (Structural defects in the multicrystalline silicon ingot grown with the seed at the bottom of crucible)

  • 이아영;김영관
    • 한국결정성장학회지
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    • 제24권5호
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    • pp.190-195
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    • 2014
  • 방향성 응고법으로 잉곳을 성장시킬 때 발생하는 온도 구배에 의해 잉곳 내에 결함이 생성되고 잔류 응력이 남게 된다. 이 결함과 잔류 응력은 잉곳의 성장 조건에 따라 달라지며, 웨이퍼의 특성에 큰 영향을 미칠 수 있다. 성장 속도의 변화에 상관 없이 대부분의 잉곳에서는 하부 영역에 비해 상부 영역에서 결정립과 쌍정경계의 크기가 작았으며, 결정립계뿐만 아니라 결정립 내에도 전위 밀도가 높았다. 이것은 상부 영역에서 성장 중에 받는 열 응력이 하부 영역보다 크다는 것을 암시한다. 두 잉곳 간의 차이를 보았을 때에는 성장 속도가 느린 잉곳에서 전위 밀도가 감소하였으며, 웨이퍼의 평탄도, 뒤틀림, 휨, 절단자국이 낮게 측정되었다. 따라서 다결정 성장 공정에서는 냉각 속도가 결함이나 잔류 응력의 발생에 미치는 영향이 크며, 그로 인하여 웨이퍼의 특성이 달라지는 것을 알 수 있었다.

박판 연속 주조과정에 있어서 회전 로울러의 열변형에 관한 연구 (The study on the thermal deformation of the rotating rollers in strip continuous casting process)

  • 백남주;이상매
    • 대한기계학회논문집
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    • 제11권6호
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    • pp.913-922
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    • 1987
  • 본 연구에서는 Sn-15% Pb 재료에 대하여 실험에 의한 쌍 로울식 연속 주조의 주조특성을 구하고 로울러 열팽창과 열응력에 대한 유한요소해석을 통하여 제품 두께 와 로울러 변형과의 관계를 밝히고자 한다.

ABS/PC/POE 열가소성 복합재료의 특성평가 및 시뮬레이션을 통한 물리적 성능 예측 연구 (Characterization of ABS/PC/POE Thermoplastic Composites and Prediction of Mechanical Properties by Geometry Simulation)

  • 유성훈;이종혁;여동현;신용호;박종수;심지현
    • 한국염색가공학회지
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    • 제34권2호
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    • pp.117-126
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    • 2022
  • In this study, thermoplastic composites were manufactured using ABS(acrylonitrile butadiene styrene), PC(polycarbonate), and POE(polyolefin elastomer), which are thermoplastic plastics. Twin screw extruder and injection molding were used to manufacture thermoplastic composites. When the ABS/PC/POE thermoplastic composite material was manufactured, the POE mass fraction was set to 1 to 5 wt.%, and the thermal and mechanical properties according to the POE mass fraction were analyzed. Based on the physical properties of ABS/PC/POE, a 3D model in the form of an e-bike frame was created. After setting the boundary conditions, when an external load is applied, geometry simulation was performed to predict product performance. The ABS/PC/POE thermoplastic composite material exhibited the best physical properties when the mass fraction of POE was 3 wt.%. In the simulation results for the physical properties of the 3D model in the form of an e-bike frame, the best physical properties were shown when the mass fraction of POE was 2 ~ 3 wt.%. As a result, the manufacturing conditions for ABS/PC/POE thermoplastic composite materials were set, and research was conducted to reduce product development costs and development time.

Nimonic 80A 초내열합금의 경도와 전기화학적부식에 미치는 시효열처리의 효과 (The Effects of Aging Heat Treatments on the Hardness and Electrocemical Corrosion for the Nimonic 80A Superalloy)

  • 나은영
    • Journal of Advanced Marine Engineering and Technology
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    • 제22권5호
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    • pp.660-669
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    • 1998
  • In this paper the Hardness and Electro-chemical corrosion of the Nimonic 80A superalloy were studied. It aging heat treatments was carried out at $650^{\circ}C$, $700^{\circ}C$, $750^{\circ}C$,$800^{\circ}C$ and $850^{\circ}C$ with different time of 20min , 30min 1hour, 2hours, 4hours, and 16hours additionally 64hours and 128hours at $650^{\circ}C$. The obtained results were as follows; 1. As aging temperature increased the time for the maximum hardness was reduced from 128hours at $650^{\circ}C$ to 30min at $850^{\circ}C$ whereas the highest hardness was reduced from Hv 381 at $650^{\circ}C$ to Hv 321 at $850^{\circ}C$. 2. In the Electro-chemical corrosion test as a function of aging heat treatment time and tem-perature the corrosion potential was reversely proportional to Hardness which indicated the effects of ${\gamma}/{\gamma}'$ coherency of base material and precipitate. 3. Initiation point of the pitting was observed at grain boundary twin boundary and near${\gamma}'$ pre-cipitates. The results of composition analysis by EDS at this point indicated that sulphur originat-ed from 1N $H_2SO_4$ solution was found in depletion at the grain boundaries and the pit which arouse in the near precipitates were lack of Al Ti and Ni which are the main element of ${\gamma}'$ The depletion of such element was cause breakdown of passive film.

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ULSI용 Cu 박막의 미세조직 연구 (Microstructural Investigation of the of the Cu Thin Films for ULSI Application))

  • 박윤창
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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    • pp.121-121
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    • 2000
  • 반도체 산업의 발달에 따라 소자의 보다 빠른 동작 속도와 큰 집적도를 갖은 ULSI 구조를 얻기 위해, 새로운 금속배선 재료가 요구되고 있다. 기존의 금속 배선인 Al 및 Al 합금은 비교적 낮은 비저항과 박막형성의 용이함으로 인하여 현재까지 금속배선 재료로 사용되고 있으나, 고집적화에 따라 RC Time Delay와 Electromigration의 문제점을 들어내었다. 이러한 문제를 해결할 새로운 배선 재료로 Al보다 낮은 비저항을 가지며, electromigration 저항성을 갖는 Cu 금속배선 재료가 활발히 연구되고 있다. 본 실험에서는 (100) Si 웨이퍼를 기판으로 사용하였으며, 각층은 SiO2/Si3N4/EP Cu/Seed Cu/ TaN/SiO2/Si wafer 상태로 증착하였다. 확산방지막으로 TaN을 사용하였고, seed Cu는 sputtering 으로 증착하였으며, seed Cu 만으로 된 박막과 seed Cu + electro plating Cu로 구성된 박막을 제작하였다. 제작 완료된 박막은 N2 분위기에서 20$0^{\circ}C$ 120 min, 45$0^{\circ}C$ 60min 동안 열처리하여 Cu 박막의 조직 변화를 TEM 및 여러 분석방법을 이용하여 분석하였다. Plan-view TEM결과, 45$0^{\circ}C$, 60min 열처리함에 따라 결정립 성장이 일어난 것을 확인 할 수 있었다. 그러나, 성장후에도 twin boundary, stacking fault, dislocation, small defect 등은 여전히 남아 있음이 관찰된다. 그림 1(a)는 as-deposit 상태이며, 그림 1(b)는 45$0^{\circ}C$, 60min 열처리한 plan-view TEM 사진이다.

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고규소철 강판의 자기적 특성에 미치는 3차 재결정의 영향 (Effect of the Tertiary Recrystallization on the Magnetic Properties of High Silicon Iron)

  • 구자명
    • 열처리공학회지
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    • 제10권4호
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    • pp.246-254
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    • 1997
  • The 6.5wt %Si-Fe alloy sheets were made by the twin roll process. The magnetic properties and microstructures of sheets annealed in the sulfur atmosphere were studied. In the as-prepared sheet, non-oriented columnar grains about $10{\mu}m$ in diameter were observed, which grew from the surface to the inner part of the sheet. When the annealing temperature was around $700^{\circ}C$, the primary recrystallization was formed around the middle part of the sheet thickness, and the grain size increased with increasing annealing temperature. At the annealing temperature of $900^{\circ}C$, the grain size became $30{\sim}40{\mu}m$. Around the annealing temperature, the motive force of the grain growth is the grain boundary energy. However, above $1000^{\circ}C$ the surface energy played an important role in the observed grain growth. When the sheet were annealed at $1200^{\circ}C$, the grains whose (100) planes were paralled to the thin plate surface grew, and all sheet surfaces were covered with these grains after 1 hour annealing. This phenomenon is called tertiary recrystallization. A difference in surface energy between (100) and (110) surfaces provides a driving force for growth of tertiary grains. The coercive force was 0.27 mOe and the AC core loss $W_{12/50}$ was 0.38w/kg for the 6.5wt%Si-Fe alloy.

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Verification of a tree canopy model and an example of its application in wind environment optimization

  • Yang, Yi;Xie, Zhuangning;Tse, Tim K.T.;Jin, Xinyang;Gu, Ming
    • Wind and Structures
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    • 제15권5호
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    • pp.409-421
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    • 2012
  • In this paper, the method of introducing additional source/sink terms in the turbulence and momentum transport equations was applied to appropriately model the effect of the tree canopy. At first, the new additional source term for the turbulence frequency ${\omega}$ equation in the SST k-${\omega}$ model was proposed through theoretical analogy. Then the new source/sink term model for the SST k-${\omega}$ model was numerically verified. At last, the proposed source term model was adopted in the wind environment optimal design of the twin high-rise buildings of CABR (China Academy of Building Research). Based on the numerical simulations, the technical measure to ameliorate the wind environment was proposed. Using the new inflow boundary conditions developed in the previous studies, it was concluded that the theoretically reasonable source term model of the SST k-${\omega}$ model was applicable for modeling the tree canopy flow and accurate numerical results are obtained.

ULSI용 Electroplating Cu 박막의 미세조직 연구 (Microstructural investigation of the electroplating Cu thin films for ULSI application)

  • 박윤창;송세안;윤중림;김영욱
    • 한국진공학회지
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    • 제9권3호
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    • pp.267-272
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    • 2000
  • electroplating(EP)법을 이용하여 ULSI용 Cu 박막을 제조하였다. seed Cu는 sputtering으로 증착하였으며, 확산방지막으로 TaN를 사용하였다. 제작된 EP Cu 박막은 seed Cu의 영향으로 열처리 조건에 관계없이 Cu(111)방향으로 강하게 우선 배향 하였다. 열처리 온도와 시간이 증가함에 따라 Cu박막의 미세조직이 non-columnar structure에서 약 2배 이상 결정립 성장하여 columnar structure로 바뀌었으며, 또한 as-deposit시 관찰되었던 stacking fault, twin, dislocation들이 상당히 줄어드는 것이 관찰되었다. Cu의 확산에 의하여 생기는 copper-silicide는 관찰할 수 없었으며, 이것은 두께 45nm의 TaN막이 $450^{\circ}C$, 30분 열처리시 확산방지막으로 충분한 역할을 한 것으로 판단된다. Cu(111)우선 배향과 열처리에 의한 결정립 성장 및 defect감소는 Cu 박막의 결정립계에서 발생하는 electromigration 현상을 상당히 줄일 수 있을 것으로 판단된다.

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소성인장변형 몇 아연도금된 Fe-Mn-C계 TWIP 강의 전기화학적 수소투과거동 (Electrochemical Hydrogen Permeation Behaviors of Pre-Strained Fe-Mn-C TWIP Steel With or Without Zn Coating)

  • 김성진
    • Corrosion Science and Technology
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    • 제22권4호
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    • pp.297-303
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    • 2023
  • This study aimed to evaluate hydrogen permeation behaviors of pre-strained twinning-induced plasticity steel with or without Zn coating using electrochemical permeation technique. In contrast to un-strained and 30% strained samples, permeation current density was measured in the 60% strained sample. Tensile pre-straining at 60% involved microstructural modifications, including a high level of dislocation density and stacking fault with a semi-coherent twin boundary, which might provide a high diffusion path for hydrogen atoms. However, reproducibility of measurements of hydrogen permeation current was low due to non-uniform deformation and localized stress concentration. On the other hand, the permeation current was not measured in pre-strained TWIP steel with Zn coating. Instead, numerous blisters with some cracks were observed on the surface of the coating layer. In locally damaged Zn coating under tensile straining, hydrogen atoms could relatively easily permeate through the coating layer. However, they were trapped at the interface between the coating layer and the substrate, which might delay hydrogen penetration into the steel substrate.