• 제목/요약/키워드: Turbo Process

검색결과 149건 처리시간 0.027초

진공펌프 조합에 의한 반도체공정 진공시스템 진공특성 전산모사 (Simulation of Vacuum Characteristics in Semiconductor Processing Vacuum System by the Combination of Vacuum Pumps)

  • 김형택;김대연
    • 한국전기전자재료학회논문지
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    • 제24권6호
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    • pp.449-457
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    • 2011
  • Effect of pump combinations on the vacuum characteristics of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for VacSimMulti simulator was proposed. Simulation results of various pumping combinations showed the possibilities and reliabilities of simulation for the performance of vacuum system in specific semiconductor processing. Simulation of roughing pump presented the expected pumping behaviors based on commercial specifications of employed pumps. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the predictable characteristics of process application of both simulated systems were also acquired.

Optimal battery selection for hybrid rocket engine

  • Filippo, Masseni
    • Advances in aircraft and spacecraft science
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    • 제9권5호
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    • pp.401-414
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    • 2022
  • In the present paper, the optimal selection of batteries for an electric pump-fed hybrid rocket engine is analyzed. A two-stage Mars Ascent Vehicle, suitable for the Mars Sample Return Mission, is considered as test case. A single engine is employed in the second stage, whereas the first stage uses a cluster of two engines. The initial mass of the launcher is equal to 500 kg and the same hybrid rocket engine is considered for both stages. Ragone plot-based correlations are embedded in the optimization process in order to chose the optimal values of specific energy and specific power, which minimize the battery mass ad hoc for the optimized engine design and ascent trajectory. Results show that a payload close to 100 kg is achievable considering the current commercial battery technology.

인베스트먼트법을 이용한 선박용 대형 터보차져 노즐링 개발을 위한 연구 (A Study on the Development of Marine Turbocharger Nozzle Ring using Investment Casting)

  • 황성주;이만길;정진욱;권순국;이춘만
    • 한국정밀공학회지
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    • 제31권8호
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    • pp.671-675
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    • 2014
  • Nozzle ring is an important part of turbocharger which is applied to today's most diesel engines. Turbo charger nozzle ring is difficult to process and takes a high cost and a long time relatively. For this reason, it is largely produced by using a precision casting. Investment method, the representative technology of precision casting, has excellent dimensional accuracy and can produce complex shapes relatively easily. However, it is difficult to avoid the casting defects such as shrinkage cavity and short shot. This study is to predict the casting defects which could be occurred during the investment method by use of finite element analysis software and to design the process and mold of the marine turbocharger nozzle ring.

SiC 휘스커 강화 Al2O3 복합재료의 고인화 (Toughening of SiC Whisker Reinforced Al2O3 Composite)

  • 김연직;송준희
    • 한국재료학회지
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    • 제14권9호
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    • pp.649-654
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    • 2004
  • In this paper, the fracture toughness and mechanisms of failure in a random SiC-whisker/$Al_{2}O_3$ ceramic composite were investigated using in situ observations during mode I(opening) loading. $SiC_{w}/Al_{2}O_3$ composite was obtained by hot press sintering of $Al_{2}O_3$ powder and SiC whisker as the matrix and reinforcement, respectively. The whisker and powder were mixed using a turbo mill. The composite was produced at SiC whisker volume fraction of $0.3\%$. Compared with monolithic $Al_{2}O_3$, fracture toughness enhancement was observed in $SiC_{w}/Al_{2}O_3$ composite. This improved fracture toughness was attributed to SiC whisker bridging and crack deflection. $SiC_{w}/Al_{2}O_3$ composite exhibited typically brittle fracture behavior, but a fracture process zone was observed in this composite. This means that the load versus load-line displacement curve of $SiC_{w}/Al_{2}O_3$ composite from a fracture test may involve a small non-linear region near the peak load.

CFX 와 HEEDS 를 이용한 사류펌프 임펠러-디퓨저 최적화방법 (Mixed-Flow Pump Impeller-Diffuser Optimization Method by Using CFX and HEEDS)

  • 이용갑;박인형;신재혁;김성;이경용;최영석
    • 대한기계학회논문집B
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    • 제39권10호
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    • pp.831-842
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    • 2015
  • 본 논문에서는 사류펌프의 성능을 향상시키는 최적화 방법을 개발하였다. 본 연구에서 개발한 최적화 방법은 유동해석코드인 CFX 와 최적화 소프트웨어인 HEEDS 를 연계하는 프로세스로 이루어진다. CFX 는 유체기계해석 분야에서는 잘 알려진 소프트웨어로 해석결과의 신뢰성은 이미 검증되었으나, 새롭게 소개되고 있는 HEEDS 는 주로 구조해석 분야에서 최적화를 수행한 사례가 보고되어 있다. 이에 본 논문을 통해 유체기계에 적용하여 최적화 결과를 검토하였다. HEEDS 에는 SHERPA 라는 최적화 기법이 탑재되어 있으며, 다수의 설계변수를 설정할 수 있어 변수간의 교호작용 등을 효율적으로 검토할 수 있다. 본 논문에서는 DOE 방법으로 최적화가 이루어진 사류펌프 임펠러에 대해 개발된 방법을 적용하여 최적화 결과의 타당성과 안정성을 검토하였으며, 같은 방법을 디퓨저에 적용하여 최적화 형상을 검토하였다. 본 논문에서 개발된 최적화 방법을 이용하여 사류펌프 최적화를 수행한 결과, DOE 방법을 이용한 설계보다 개선된 결과를 적절한 시간 내에 얻을 수 있음을 확인하였다.

다이어프램형 방식의 파일럿 액추에이터 개발 (Development of a diaphragm type actuator)

  • 이중엽;정대성;한상엽
    • 항공우주기술
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    • 제13권2호
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    • pp.160-166
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    • 2014
  • 액체로켓 엔진용 개폐밸브는 파일럿 공압으로 포핏을 열고 스프링 힘에 의해 닫음으로써 로켓엔진의 추진제 유량을 제어한다. 현재 개발 중인 엔진용 개폐밸브는 다이어프램 액추에이터에서 압력을 제거하면 닫히도록 설계되어 있다. 다이어프램을 설계하고 개발하기 위해 밸브가 열리고 닫히는 특성에 따라 수명을 분석할 필요가 있다. 밸브가 닫히기 시작하는 시점의 작동 유체의 압력을 결정하고, 포핏이 열리는 시점의 압력을 결정되어 힘평형이 설계되어 있다. 수명시험은 상온 유동에서 다이어프램부의 크랙에 의한 누설은 용접 부위에서 발생했다. 다이어프램 액추에이터의 작동 수명은 헬륨 파일럿 압력의 22 MPa 시험에서 61회이다.

UBM 마그네트론 스퍼터 시스템을 이용한 구리 타겟의 이온전류밀도 향상 연구 (Development of UBMS(Unbalanced Magnetron Sputtering) System and Ion Current Density Measurement of Copper Target)

  • 강충현;주정훈
    • 한국표면공학회지
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    • 제50권3호
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    • pp.192-197
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    • 2017
  • A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper target and graphite target were fabricated using MDX-1.5K from Advanced Energy Industries, Inc as a DC power supply. Ion current density of copper target and graphite target was measured by unbalanced magnetron sputtering. The basic pressure condition was $6.3{\times}10^{-7}mbar$ and the process pressure was Ar 50 sccm at $1.0{\times}10^{-2}mbar$ (7.5 mTorr) in the Ar atmosphere. Therefore, the relative density of copper ions reaching the substrate with the measured ion current density was derived.

폴리머의 레이저 투과접합 시 접합부의 기계적 성질에 관한 연구 (A Study on the Mechanical Properties of Joints in Laser Transmission Joining of Polymers)

  • 차상우;김진범;윤석환;나석주
    • Journal of Welding and Joining
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    • 제25권2호
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    • pp.43-48
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    • 2007
  • Laser Transmission Joining (LTJ) of plastics is a process in which light of suitable wavelength is transmitted through a transparent substrate that is in contact with an absorbing one. In this paper, LTJ is investigated by preliminary experiments from the viewpoint of mechanical engineering. To understand transmitting characteristics of each polymer substrate, transmission rate, reflection rate and absorption coefficient of polymer are measured by using a laser power-meter. Characteristics of joining in the spot welding and seam welding are investigated by measuring the fracture load. Fracture load increases in accordance to the laser power and irradiation time. However, when the laser power is over 60W and irradiation time over 4seconds, fracture load decreases. This phenomenon is probably due to heat-softening of materials. Besides, cavities are generated at a joint by evaporation of water molecules, which can be suppressed by introduction of a gap between two substrates.

CAD/CAPP 인터페이스를 위한 형상특징의 자동인식시스템 개발 (Development of Automatic Feature Recognition System for CAD/CAPP Interface)

  • 오수철;조규갑
    • 대한기계학회논문집
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    • 제16권1호
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    • pp.31-40
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    • 1992
  • 본 연구에서는 CAD 시스템의 테이터구조로 부터 특성을 추출하여 CAPP 시스템 의 입력으로 사용되는 형상특징을 자동적으로 인식하고 형상특징의 관련정보를 생성하 는 형상특징인식시스템을 개발하는데 있다. X.Y.Z 축에 수직인 평면들로 구성되는 비회전형상부품을 대상으로 하여, 주로 밀링작업과 연관이 있는 관통슬롯, 막힌슬롯, 관통스텝, 막힌스텝, 포켓의 5가지 형상특징을 자동적으로 인식하는데 특히 X.Y.Z축에 수직인 평면들로 구성되고 내부에 볼록 부위가 업는 형상 특징을 대상으로 한다. CAD시스템은 AutoCAD를 사용하여 퍼스널 컴퓨터에서 시스템을 개발한다.

치과용 고속 에어터빈 핸드피스의 공급관로 분석 및 성능평가 (Supply Route Analysis and Performance Evaluation of Dental High-Speed Air Turbine Handpiece)

  • 한명철;김정관;최명욱
    • 한국정밀공학회지
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    • 제28권1호
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    • pp.80-88
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    • 2011
  • The dental high-speed air turbine handpiece is one of the most popular devices that have been widely used as the main means of cutting tooth structure and restorative material in dentistry. In consideration of usage and marketability of the dental handpiece, it is obviously worthy of investigating it. The goal of this paper is to establish the relationship between the air turbine speed and the supply route inside the handpiece. To do this, the Computational Fluid Dynamics(CFD) tool, Fine$^{TM}$/Turbo is used and the optimal supply route position is suggested from the simulation results. In addition, as an attempt for domestic product, the reverse engineering process of a high speed dental handpiece by 3D X-Ray CT equipment and wire cutting is presented for the Mark II model in NSK. In doing so, the 3D modeling of the handpiece parts is carried out with CATIA V5, and the interference between parts is examined. Finally, the result of performance test for the prototype produced in this research is presented.