• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.19 no.3
• /
• pp.370-375
• /
• 2010

Tungsten carbide microshaft is used as micro punch, electrode of micro electro discharge machining, and micro tool because of its high hardness and rigidity. In this research, tungsten carbide microshaft was fabricated using electrochemical machining. $H_2SO_4$ solution was used as the electrolyte because it can dissolve tungsten carbide and cobalt simultaneously. Experimentally studied were the effects of electrolyte concentration, machining time, and machining voltage on material removal rate and the shape of the microshaft. To eliminate the effects of bubbles and metal corrosion layer on microshaft shape, the machining was performed below the electrolysis voltage. Three step electrochemical process was suggested to fabricate the straight tungsten carbide microshaft. As a result, a straight tungsten carbide microshaft of $30{\mu}m$ in diameter and $500{\mu}m$ in length was obtained through the proposed three step electrochemical process.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.3
• /
• pp.80-87
• /
• 2002

Tungsten carbide microshaft is used as micro-punch, electrode of MEDM (micro-electro-discharge machining), and micro-tool because it has high hardness and high rigidity. In this study, the tungsten carbide microshaft was fabricated using electrochemical machining. Concentration of material removal at the sharp edge and metal corrosion layer affect the shape of the microshaft. Control of microshaft shape was possib1e through conditioning the machining voltage and electrolyte concentration. By applying periodic voltage, material removal rate increased and surface roughness improved. The fabricated microshaft in $H_2 SO_4$ electrolyte maintained sharper end edge and better surface finish than those fabricated by other electrolytes.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.245-249
• /
• 2002

Tungsten carbide microshaft is used as various micro-tools in MEMS because it has high hardness and good rigidity. In this study, experiments were performed to produce tungsten carbide microshaft using electrochemical machining. $H_2SO_4$solution was used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape and large MRR of workpiece were found. For one-step machining, the immersion depth over 1 mm was selected for avoidance of concentration of electric charge at the tip of the microshaft. The limit diameter with good straightness was shown and an empirical formula for WC-microshaft machining was suggested. By controlling the various machining parameters, a straight microshaft with 30 $\mu\textrm{m}$ diameter, over 1 mm length and under 0.5$^{\circ}$ taper angle was obtained.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.6
• /
• pp.172-178
• /
• 2004

Tungsten carbide microshaft can be used as various micro-tools for MEMS because it has high hardness and high rigidity. In this study, experiments are performed to produce tungsten carbide micro-shaft using electrochemical etching. H$_2$SO$_4$ solution is used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape, good surface quality, and high MRR of workpiece are experimentally found. By controlling the various machining parameters, a straight micro-shaft with 5 ${\mu}{\textrm}{m}$ diameter, 3 mm length, and 0.2$^{\circ}$taper angle was obtained.