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WC Micro-shaft Fabrication Using Electrochemical Etching  

최세환 (서울대학교 기계항공공학부 대학원)
류시형 (전북대학교 기계항공시스템공학)
최덕기 (강릉대학교 정밀기계공학)
주종남 (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.6, 2004 , pp. 172-178 More about this Journal
Abstract
Tungsten carbide microshaft can be used as various micro-tools for MEMS because it has high hardness and high rigidity. In this study, experiments are performed to produce tungsten carbide micro-shaft using electrochemical etching. H$_2$SO$_4$ solution is used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape, good surface quality, and high MRR of workpiece are experimentally found. By controlling the various machining parameters, a straight micro-shaft with 5 ${\mu}{\textrm}{m}$ diameter, 3 mm length, and 0.2$^{\circ}$taper angle was obtained.
Keywords
Electrochemical machining; Micro-shaft; Tungsten carbide; Elecrolyte;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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1 Fotino, M., 'Tip Sharpening by Normal and Reverse Electrochemical Etching,' Review of Scientific Instrments, Vol. 64, No. 1, pp. 159-167, 1993   DOI
2 In, C. H., Kang, M. J., Kim, G. M. and Ghu, C. N., 'Mass Production of Tungsten Needle Tips by Electrochemical Etching,' Proceedings of the KSPE 1999 Fall Annual Meeting, pp. 1345-1350, 1999
3 Human, A. M., Roebuck, B. and Exner, H. E., 'Electrochemical Polarisation and Corrosion Behavior of Cobalt and Co(W,C) Alloys in 1 N Sulphuric Acid,' Materials Science and Engineering, Vol. A241, pp. 202-210, 1998   DOI   ScienceOn
4 Lee, K. H., Electrochemical Machining Behavior of Tungsten-cabide Microshafts, Ph. D. Thesis, Seoul Nat'l Univ., 2001
5 Andersson, K. M. and Bergstrom, L., 'Oxidation and Dissolution of Tungsten Carbide Powder in Water,' Int. Journal of Refractory Metals & Hard Materials, Vol. 18, pp. 121-129, 2000   DOI   ScienceOn
6 Kalpakjian, S., Manufacturing Processes for Engineering Materials, 3rd Ed., Addison Wesley Longman, Inc., 1997
7 Kang, M. J., Production of Tungsten Carbide Microshaft Using Electro-chemical Machining, M.S Thesis, Seoul Nat'l Univ.,, 2001
8 Paik, W. K. and Park, S. M., Electrochemistry: Science and Technology of Electrode Processes, Cheongmoongak, Seoul, 2001
9 Basu, S. and Sarin, V., 'Oxidation Behavior of WCCo,' Materials Science and Engineering, Vol. A 209, pp. 206-212, 1996   DOI   ScienceOn
10 Bard, A. and Faulkner, L., Electrochemical Methods, 2nd Ed., John Wiley & Sons, Inc., 2001
11 Choi, S. H., Ryu, S. H., Choi, D. K. and Chu, C. N., 'Optimal Machining Condition of WC-Microshaft Using Electrochemical Machining,' Proceedings of the KSPE 2002 Fall Annual Meeting, pp. 245-249, 2002   과학기술학회마을
12 Muller, E. W. and Tsong, T. T., Field Ion Microscopy : Principles and Applications, American Elsevier, New York, 1969
13 Sato, T., Nontraditional Machining, Yokendo, Tokyo, 1994
14 Morikawa, H. and Goto, K., 'Reproducible Sharppointed Tip Preparation for Field Ion Microscopy by Controlled AC Polishing,' Review ofScientific Instruments, Vol. 59, No. 10, pp. 2195-2197, 1988   DOI
15 Lim, Y. M., Lim, H. J. and Kim, S. H., 'Shape and Diameter Control of Microshafts in Electrochemical process,' Journal of the Korean Society off Precision Engineering, Vol. 18, No. 5, pp. 50-56, 2001   과학기술학회마을
16 Joo, B. Y., Oh, S. I. and Jeon, B. H., 'Development of Micro Punching System,' Annals of the CIRP, Vol. 50, pp. 191-194, 2001   DOI   ScienceOn