Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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WC Micro-shaft Fabrication Using Electrochemical Etching

전해 가공을 이용한 WC 미세축 제작

  • 최세환 (서울대학교 기계항공공학부 대학원) ;
  • 류시형 (전북대학교 기계항공시스템공학) ;
  • 최덕기 (강릉대학교 정밀기계공학) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Published : 2004.06.01
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Abstract

Tungsten carbide microshaft can be used as various micro-tools for MEMS because it has high hardness and high rigidity. In this study, experiments are performed to produce tungsten carbide micro-shaft using electrochemical etching. H$_2$SO$_4$ solution is used as electrolyte because it can dissolve tungsten and cobalt simultaneously. Optimal electrolyte concentration and machining voltage satisfying uniform shape, good surface quality, and high MRR of workpiece are experimentally found. By controlling the various machining parameters, a straight micro-shaft with 5 ${\mu}{\textrm}{m}$ diameter, 3 mm length, and 0.2$^{\circ}$taper angle was obtained.

Keywords

References

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