• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.601-602
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• 2008

• 한국재료학회:학술대회논문집
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• 한국재료학회 1997년도 한국재료학회 춘계학술발표회
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• pp.110-110
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• 1997

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2000년도 추계학술발표회 초록집
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• pp.75-76
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• 2000

• Nuclear Engineering and Technology
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• 제52권4호
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• pp.827-834
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• 2020

Damage of tungsten due to helium ions of a PF device was studied. The tungsten was analyzed by SEM and AFM after irradiation. SEM revealed fine bubbles of helium atoms with diameters of a few nanometers, which join and form larger bubbles and blisters on the surface of tungsten. This observation confirmed the results of molecular dynamics simulation. SEM analysis after etching of the irradiated surface indicated cavities with depth range of 35-85 nm. The average fluence of helium ion of the PF device was calculated about 5.2 × 10¹⁵ cm^-2 per shot, using Lee code. Energy spectrum of helium ions was estimated using a Thomson parabola spectrometer as a function of dN/dE ∝ E^-2.8 in the energy range of 10-200 keV. The characteristics of helium ion beam was imported to SRIM code. SRIM revealed that the maximum DPA and maximum helium concentration occur in the depth range of 20-50 nm. SRIM also showed that at depth of 30 nm, all of the tungsten atoms are displaced after 20 shots, while at depth of higher than 85 nm the destruction is insignificant. There is a close match between SRIM results and the measured depths of cavities in SEM images of tungsten after etching.

• 한국정밀공학회지
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• 제22권8호
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• pp.165-173
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• 2005

This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980's for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)s was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 m depending on laser power and scan speed while the width was controlled between 50um using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below $1{\Omega}{\cdotu}um$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.

• 자원환경지질
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• 제18권4호
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• pp.331-342
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• 1985

The Dongbo tungsten-molybdenum deposits are fissure-filling veins emplaced in granites of late Cretaceous age. Integrated field, mineralogic and fluid inclusion studies were undertaken to illuminate the characters and origin of the ore deposits. Mineral paragenesis is complicated by repeated fracturing, but four distinct depositional stages can be recognized; (I) tungsten-molybdenum minerals-quartz-chlorite stage, (II) iron-oxide and sulfides-quartz stage, (III) iron -oxide-base metal sulfides-sulfosalts-quartz-carbonates stage, (IV) barren rhodochrosite-zeolite stage. Fluid inclusion studies were carried out for stage I quartz and stage III quartz, sphalerite and calcite. Fluid inclusion studies reveals highly systematic trends of homogenization temperature and salinity throughout the mineralization. Ore fluids during stage I were complex, NaCl rich brine and salinity reached values as high as 34.4 weight percent equivalent NaCl, but the later ore fluids were more dilute and reached to 9.7 weight percent equivalent NaCl during stage III. Intermittent boiling of ore fluid during stage I is indicated by the fluid inclusions in stage I quartz. Depositional temperatures and pressures during stage I range from $520^{\circ}C$ to $265^{\circ}C$and from 600 to 400 bars. Homogenization temperatures of the stage III quartz, sphalerite and calcite range from $305^{\circ}C$ to $190^{\circ}C$. Fluid inclusion data from the Dongbo mine are nearly similar to those from other hydrothermal tungsten deposits in the Kyeongsang basin. Depositional temperature and salinity of ore fluids during precipitation of tungsten-molybdenum minerals in Dongbo mine were much higher, but $CO_2$ contents were much lower than those from hydrothermal tungsten-molybdenum deposits of late Cretaceous plutonic association in central parts of Korean peninsula.

• 한국분말재료학회지
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• 제25권1호
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• pp.7-11
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• 2018

In this study, we synthesize tungsten oxide thin films by electrodeposition and characterize their electrochromic properties. Depending on the deposition modes, compact and porous tungsten oxide films are fabricated on a transparent indium tin oxide (ITO) substrate. The morphology and crystal structure of the electrodeposited tungsten oxide thin films are investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). X-ray photoelectron spectroscopy is employed to verify the chemical composition and the oxidation state of the films. Compared to the compact tungsten oxides, the porous films show superior electrochemical activities with higher reversibility during electrochemical reactions. Furthermore, they exhibit very high color contrast (97.0%) and switching speed (3.1 and 3.2 s). The outstanding electrochromic performances of the porous tungsten oxide thin films are mainly attributed to the porous structure, which facilitates ion intercalation/deintercalation during electrochemical reactions.

• 자원리싸이클링
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• 제26권6호
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• pp.91-96
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• 2017

알칼리 용융법과 수 침출을 이용하여 탄화텅스텐(WC)으로부터 텅스텐(W) 회수에 관한 연구를 실시하였다. 알칼리 용융 처리는 알칼리염의 종류, 용융온도 및 용융시간을 변화시키면서 실시하였으며, 수 침출은 $25^{\circ}C$, 2시간 및 슬러리 농도 10 g/L로 고정하여 실시하였다. 알칼리염으로 질산나트륨($NaNO_3$)만 단독으로 사용한 경우, W의 수 침출율은 63.3%이었지만, 용융 첨가제인 수산화나트륨(NaOH) 혼합량이 증가할수록 침출율은 증가하였으며, 몰비 $WC:NaNO_3:NaOH=1:2:2$로 혼합한 용융물에서는 97.8%까지 증가하였다. NaOH는 용융 반응의 반응열 증가로 인한 반응 촉진제 역할을 한 것으로 판단된다.

• 한국재료학회지
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• 제8권10호
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• pp.938-944
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• 1998

$MoSi_2$에 W분말을 첨가하여 $MoSi_2$/W 복합재료를 $1600^{\circ}C$에서 3시간 동안 유지하면서 30MPa의 조건하에서 고온진공 가압기를 이용하여 제조하였으며, 텅스텐 분말의 첨가량이 $(Mo)Si_2$의 미세조직과 기계적 성질에 미치는 영향을 조사하였다. 텅스텐은 몰리브덴과 치환하면서 고용체 합금을 이루었으며, 입자의 크기는 텅스텐 분말의 첨가량이 증가할수록 감소하였다. 비커스경도는 텅스텐 분말의 첨가량이 증가할수록 향상되었으나, 반면에 압흔파단 강도는 오히려 감소되었다. 10%정도의 텅스텐 분말을 첨가하였을 때, 압흔파단 강도가 $4.5MPa$\sqrt{m}$로서 순수 $MoSi_2$의 $2.7MPa\sqrt{m}$에 비하여 향상되었음을 알 수 있었다.

• 한국세라믹학회지
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• 제40권3호
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• pp.268-272
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• 2003

직류 마그네트론 스퍼터링법을 이용하여 증착압력과 기판온도변화에 따른 텅스텐 박막의 미세구조 변화에 대하여 연구하였다. 기판온도 40$0^{\circ}C$에서 증착 압력의 감소에 따라 텅스텐 박막의 미세구조가 zone I에서 zone T로 변화하였다. 텅스텐 박막의 미세구조 비저항과 결정배향성은 상관관계를 보였으며. 미세구조가 zone T 영역에서 낮은 비저항(10$\times$$10^{-6}$ $\Omega$-cm) 과 99%의 (110)면 우선 배향성을 나타내었다. zone T 영역에 해당하는 미세구조를 지니는 텅스텐 박막을 이용한 박막형 공진기는 텅스텐 박막의 높은 탄성저항과 매끈한 표면으로 인해 494의 $Q_{s}$와 5.50%의 $K_{eff}$$^{2}$ 값의 우수한 공진특성을 보였다....