• Journal of Powder Materials
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• v.22 no.5
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• pp.309-314
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• 2015

Tungsten trioxide thin films are successfully synthesized by a sol-gel method using tungsten hexachloride as precursors. The structural, chemical, and optical properties of the prepared films are characterized by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, and UV-Vis spectrophotometry. The electrochemical and electrochromic properties of the films before and after heat treatment are also investigated by cyclic voltammetry, chronoamperometry, and in situ transmittance measurement system. Compared to as-prepared films, heat-treated tungsten trioxide thin films exhibit a higher electrochemical reversibility of 0.81 and superior coloration efficiency of $65.7cm^2/C$, which implies that heat treatment at an appropriate temperature is a crucial process in a sol-gel method for having a better electrochromic performance.

• Interaction and multiscale mechanics
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• v.4 no.3
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• pp.207-217
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• 2011

International efforts have focused recently on the development of tungsten surfaces that can intercept energetic ionized and neutral atoms, and heat fluxes in the divertor region of magnetic fusion confinement devices. The combination of transient heating and local swelling due to implanted helium and hydrogen atoms has been experimentally shown to lead to severe surface and sub-surface damage. We present here a computational model to determine the relationship between the thermo-mechanical loading conditions, and the onset of damage and failure of tungsten surfaces. The model is based on thermo-elasticity, coupled with a grain boundary damage mode that includes contact cohesive elements for grain boundary sliding and fracture. This mechanics model is also coupled with a transient heat conduction model for temperature distributions following rapid thermal pulses. Results of the computational model are compared to experiments on tungsten bombarded with energetic helium and deuterium particle fluxes.

• Progress in Superconductivity and Cryogenics
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• v.22 no.2
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• pp.17-20
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• 2020

Comprehensive utilization of tungsten tailings resources not only solves environmental problems but also creates huge economic benefits. The high content of iron impurity in tungsten tailings will have adverse effect on the downstream comprehensive utilization, whether flotation or pickling. In this paper, the Superconducting High Gradient Magnetic Separation(S-HGMS) is used to remove of Fe impurities from tungsten tailings. The optimal experimental parameters are as follows: background magnetic induction intensity is 3.0T, slurry flow velocity is 500ml/min. The Fe removal rate of Fe was 68.8% and the recovery rate was 59.53%.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.4
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• pp.49-57
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• 1992

Tungsten film was deposited on the TiN surface in a low pressure chemical vapor deposition reactor and chemical reaction mechanism between TiN surface and ($WF_{6}\;and\;SiH_{4}$ was studied. Interaction of ($WF_{6}\;or\;SiH_{4}$ with TiN surface and tungsten was deposited more easily. $WF_6$ reacted with TiN activated the TiN surface to form volatile TiF_4$ and tungsten nuclei were formed. ($SiH_{4}$ was dissociated on the TiN surface to form silicon nuclei. From RBS and AES analysis, we could not detect the impurities(such as Si or TiF$_x$)at the interface between tungsten and TiN. The adhesion at the W/TiN interface became poor when the deposition temperature was below 275$^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1994.11a
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• pp.160-163
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• 1994

Tungsten and Tungsten Nitride thin films deposited by RF and DC sputtering and the resistivity of these films was measured. We deposited tungsten and tungsten nitride films by RF and DC sputtering at various conditions and derived equations that determines the resistivity and sheet resistivity by stabilizing the basic theory. We investigated properties of the resistivity and sheet resistivity of theme films under various conditions like temperature of substrate, flow rate of the argon gas and content of nitrogen from nitrogen-argon mixtures

• Journal of the Korean institute of surface engineering
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• v.27 no.2
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• pp.83-90
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• 1994

We have investigated the mechanism for the abnormal oxide growth occuring during oxidation of the crystalline tungsten silicide. TEM and XPS analysis reveal the abnormaly grown oxide layer consisting of crystalline $Wo_3$ and amorphous $SiO_2$. The presence of crystalline $Wo_3$ provides a rapid diffusion of oxygen through the oxide layer. The abnormal oxide growth is mainly due to the poor quality of initial oxide layer growth on tungsten silicide. Two species such as tungsten and silicon from decomposition fo tungsten silicide as well as silicon supplied from the underlying polysilicon are the main contributors sto abnormal oxide forma-tion. Consequently, the abnormal oxidation results in the disintegration of tungsten silicide and thinning of polysilicon as well.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.288-288
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• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• Economic and Environmental Geology
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• v.11 no.4
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• pp.143-167
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• 1978

The Sangdong tungsten (mostly scheelite) mine is located on the southern limb of a major syncline, the Hambaeg syncline, in a thick sequence of lower Paleozoic sedimentary rocks in the mideastern part of south Korea. Productive scheelite mineralization in Sangdong area is confined to one single formation, the Myobong Slate. Four major ore beds, which have an lateral extension over than 1 km and were not heavily subjected to spatial disturbance, are developed in the Myobong Formation. The original materials of the ore-comprising horizones were probably of either calcareous or silceous sediments. The four ore beds, especially in the case of Main ore bed, display both lateral and vertical zoning. Association quartz-mica-scheelite is predominant in the central, while association hornblende-quartz-diopside-scheelite, diopside-garnet and wollastonite-garnet are developed in this order towards the periphery of the ore beds. Petrologically, two phases of thermometamorphism are recognized. The first phase is represented by the association wollastonite-garnet and diopside-garnet, while the second phase by the association hornblende-quartz-diopside-scheelite and quartz-mica-scheelite. The associations of the second phase do constitute prodctive ore. The high background value of tungsten in the area surrounding the Sangdong mine reveals that the area can be considered a geochemical zone enriched in tungsten. Studies on the trace element patterns were carried out to draw useful criteria for the purpose of future geochemical exploration in the area. The increasing trend of the ratio Rb $({\times}1000)/K_2O$ of the Myobong Slate towards the known mineralization area proved to be indicative for the presence of tungsten mineralization.

• Economic and Environmental Geology
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• v.7 no.2
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• pp.63-78
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• 1974

Daehwa tungsten-molybdenum deposits is fissure filled quartz veins occurring in Precambrian granite gneiss adjacent to the contact with Mesozoic biotite granite mass. Essential ore minerals are molybdenum and wolframite accompaning scheelite, cassiterite, chalcopyrite, pyrrhotite, pyrite and bismuthinites. Gangue minerals are quartz and little muscovte, fluorite, beryl and Carbonate minerals. Fluid inclusions in quartz, fluorite, beryl, scheelite and calcite have filling temperature ranges of $170-353^{\circ}C$. According to the studies of mineral paragenesis and filling temperature of fluid inclusion indicate that main tungsten and molybdnum mineralization have taken place with the minerals whose filling temperature ranges 205 to $353^{\circ}C$. Liquid $CO_2$ bearing fluid inclusions are characteristic in the quartz and early fluorite of tungsten and tungsten bearing molybdenum veins but hardly recognized from molybdemun veins. Estimated $CO_2$ concentration according to diagram proposed by the Takenouchi ranges from 10 to 20wt%. These facts suggest that tungsten mineralization may be related to the $CO_2$ content of the hydrothermal solution during the mineralizing period.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.163-166
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• 2006

The dishing and the erosion were evaluated on the tungsten CMP process with conventional and new developed slurry. The tungsten thin film was polished by orbital polishing equipment. Commercial pattern wafer was used for the evaluation. Both slurries were pre tested on the oxide region on the wafer surface and the removal rate was not different very much. At the pattern density examination, the erosion performance was increased at all processing condition due to the reduction of thickness loss in new slurry. However, the dishing thickness was not remarkably changed at high pattern density despite of the improvement at low pattern density. At the large pad area, the reduction of dishing thickness was clearly found at new tungsten slurry.