• 제목/요약/키워드: Trap density

검색결과 340건 처리시간 0.022초

박막트랜지스터 응용을 위한 SiO2 박막 특성 연구 (Studies for Improvement in SiO2 Film Property for Thin Film Transistor)

  • 서창기;심명석;이준신
    • 한국전기전자재료학회논문지
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    • 제17권6호
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    • pp.580-585
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    • 2004
  • Silicon dioxide (SiO$_2$) is widely used as a gate dielectric material for thin film transistors (TFT) and semiconductor devices. In this paper, SiO$_2$ films were grown by APCVD(Atmospheric Pressure chemical vapor deposition) at the high temperature. Experimental investigations were carried out as a function of $O_2$ gas flow ratios from 0 to 200 1pm. This article presents the SiO$_2$ gate dielectric studies in terms of deposition rate, refrative index, FT-IR, C-V for the gate dielectric layer of thin film transistor applications. We also study defect passivation technique for improvement interface or surface properties in thin films. Our passivation technique is Forming Gas Annealing treatment. FGA acts passivation of interface and surface impurity or defects in SiO$_2$ film. We used RTP system for FGA and gained results that reduced surface fixed charge and trap density of midgap value.

레이저 빔을 이용한 비정질실리콘 전기적 특성의 비파괴 측정 (Nondestructive Measurement on Electrical Characteristics of Amorphous Silicon by Using the Laser Beam)

  • 박남천
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.36-39
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    • 2000
  • A small electrical potential difference which appears on any solid body when subjected to illumination by a modulated light beam generated by laser is called photocharge voltage(PCV)[1,2]. This voltage is proportional to the induced change in the surface electrical charge and is capacitatively measured on various materials such as conductors, semiconductors, ceramics, dielectrics and biological objects. The amplitude of the detected signal depends on the type of material under investigation, and on the surface properties of the sample. In photocharge voltage spectroscopy measurements[3], the sample is illuminated by both a steady state monochromatic bias light and the pulsed laser. The monochromatic light is used to created a variation in the steady state population of trap levels in the surface and space charge region of semiconductor samples which does result in a change in the measured voltage. Using this technique the spatial variation of PCV can be utilized to evaluate the surface conditions of the sample and the variation of the PCV due to the monochromatic bias light are utilized to characterize the surface states. A qualitative analysis of the proposed measurement is present along with experimental results performed on amorphous silicon samples. The deposition temperature was varied in order to obtain samples with different structural, optical and electronic properties and measurements are related to the defect density in amorphous thin film.

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Laser CVD법에 의한 III-V화합물 반도체 표면의 불활성화 (The passivation of III-V compound semiconductor surface by laser CVD)

  • 이한신;이계신;조태훈;허윤종;김성진;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1993년도 하계학술대회 논문집 B
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    • pp.1274-1276
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    • 1993
  • The silicon-nitride films formed by laser CVD method are used for passivating GaAs surfaces. The electrical Properties of metal-insulator-GaAs structure are studied to determined the interfacial characteristics by C-V curves and deep level transient spectroscopy(DLTS). The SiN films are photolysisly deposited from $SiH_4\;and\;NH_3$ in the range of $100^{\circ}C-300^{\circ}C$ on P type, (100) GaAs. The hysteresis is reduced and interface trap density is lowered to $10^{12}-10^{13}$ at $100^{\circ}C-200^{\circ}C$. The surface leakage current is studied too. The passivated GaAs have a little leakage current compared to non passivated GaAs.

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Nano-scale PMOSFET에서 Plasma Nitrided Oixde에 대한 소자 특성의 의존성 (Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET)

  • 한인식;지희환;구태규;유욱상;최원호;박성형;이희승;강영석;김대병;이희덕
    • 한국전기전자재료학회논문지
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    • 제20권7호
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    • pp.569-574
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    • 2007
  • In this paper, the reliability (NBTI degradation: ${\Delta}V_{th}$) and device characteristic of nano-scale PMOSFET with plasma nitrided oxide (PNO) is characterized in depth by comparing those with thermally nitrided oxide (TNO). PNO case shows the reduction of gate leakage current and interface state density compared to TNO with no change of the $I_{D.sat}\;vs.\;I_{OFF}$ characteristics. Gate oxide capacitance (Cox) of PNO is larger than TNO and it increases as the N concentration increases in PNO. PNO also shows the improvement of NBTI characteristics because the nitrogen peak layer is located near the $Poly/SiO_2$ interface. However, if the nitrogen concentration in PNO oxide increases, threshold voltage degradation $({\Delta}V_{th})$ becomes more degraded by NBT stress due to the enhanced generation of the fixed oxide charges.

The Stable Production of Organic Seed to Distribute Certified Seed of Waxy Corn Hybrid

  • Goh, Byeong-Dae;Park, Jong-Yeol;Jang, Eun-Ha;Park, Ki-Jin;Yoon, Byeong-Sung;Jang, Jin-Sun
    • 한국유기농업학회지
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    • 제19권spc호
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    • pp.6-8
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    • 2011
  • In order to produce the organic foods in accord with international standard, organic seeds should be used in organic farming. This study was conducted to establish the stable production of organic seed of waxy com by examining the growing characteristics, seed yield, and the economy for seed production by organic farming. The optimal sowing timing for organic seed production of waxy com hybrid was within 10 days of the $1^{st}$ of May with yield of 88~90% of conventional seed production. The optimal planting density was 41,600 plants/ha ($80{\times}30$ cm) for organic seed production of waxy com. The weight of 100 seeds and seed productivity increased at the planting ratio of 2:1 mother plant:male plant. Growth and seed production were improved by removing male plant at 7~10 days after silking. Organic fertilizer (mixed oil cake) was applied at a rate of 4~6 Mg/ha before sowing. Black plastic mulching was used for weed control. In addition, sex pheromone trap and bio-control agents were used for safe pest control and low labour cost.

용액공정으로 제작한 PVP-IZO TFT의 UV-O3 처리를 통한 전기적 특성 향상 연구 (Study on Electrical Characteristic Improvement of PVP-IZO TFT Prepared by Solution Process Using UV-O3 Treatment)

  • 김유정;정준교;박정현;정병준;이가원
    • 반도체디스플레이기술학회지
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    • 제16권2호
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    • pp.66-69
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    • 2017
  • In this paper, solution based Indium Zinc Oxide thin film transistors (IZO TFTs) were fabricated with PVP gate dielectric. To enhance the electrical properties, UV-O3 treatment is proposed on solution based IZO TFTs. The gate leakage current and interface trap density is compatible with conventional ZnO-based TFT with inorganic gate insulator. Especially, the UV-treated device shows improved electrical characteristics compared to the untreated device. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which shows that the oxygen vacancy of UV-O3 treatment is higher than that of no treatment.

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Temporal Variation in Tiger Population in a Semi-Arid Habitat in India

  • Singh, Randeep;Pandey, Puneet;Qureshi, Qamar;Sankar, Kalyanasundaram;Krausman, Paul R.;Goyal, Surendra Prakash
    • Proceedings of the National Institute of Ecology of the Republic of Korea
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    • 제3권3호
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    • pp.154-164
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    • 2022
  • Understanding temporal variations in wildlife populations is a prerequisite for conservation planning of wide-ranging species such as tigers (Panthera tigris). We determined the temporal variation in abundance, population growth, and sex ratios at different age and sex stages for a tiger population in Ranthambhore Tiger Reserve, India from November 2007 to February 2011 using motion-sensing cameras. We identified 19 male and 21 female tigers from stripe patterns during 16,110 trap nights within an area covering 233 km2. The annual abundance of the population varied from 34.9 (mean)±3.8 (SE) to 23.9±1.5, with a declining trend in the mean annual change of abundance (-12%). The density of adult females remained stable across the study duration, but the densities of adult males and non-breeding tigers fluctuated. The sex ratio was female-biased (0.58 males/female) for breeding tigers and male-biased (1.74 males/female) for non-breeding tigers. Our results reinforce the importance of long-term studies for monitoring the naturally occurring processes in populations to develop population indicators and identify reliable baseline information for conservation and management planning of populations.

Preliminary conceptual design of a small high-flux multi-purpose LBE cooled fast reactor

  • Xiong, Yangbin;Duan, Chengjie;Zeng, Qin;Ding, Peng;Song, Juqing;Zhou, Junjie;Xu, Jinggang;Yang, Jingchen;Li, Zhifeng
    • Nuclear Engineering and Technology
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    • 제54권8호
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    • pp.3085-3094
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    • 2022
  • The design concept of a Small High-flux Multipurpose LBE(Lead Bismuth Eutectic) cooled Fast Reactor (SHMLFR) was proposed in the paper. The primary cooling system of the reactor is forced circulation, and the fuel element form is arc-plate loaded high enrichment MOX fuel. The core is cylindrical with a flux trap set in the center of the core, which can be used as an irradiation channel. According to the requirements of the core physical design, a series of physical design criteria and constraints were given, and the steady and transient parameters of the reactor were calculated and analyzed. Regarding the thermal and hydraulic phenomena of the reactor, a simplified model was used to conduct a preliminary analysis of the fuel plates at special positions, and the temperature field distribution of the fuel plate with the highest power density under different coolant flow rates was simulated. The results show that the various parameters of SHMLFR meet the requirements and design criteria of the physical design of the core and the thermal design of the reactor. This implies that the conceptual design of SHMLFR is feasible.

저온 중수소 어닐링을 활용한 Enclosed-Layout Transistors (ELTs) 소자의 제작 및 전기적 특성분석 (Fabrication of Enclosed-Layout Transistors (ELTs) Through Low-Temperature Deuterium Annealing and Their Electrical Characterizations)

  • 왕동현;김동호;길태현;연지영;김용식;박준영
    • 한국전기전자재료학회논문지
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    • 제37권1호
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    • pp.43-47
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    • 2024
  • The size of semiconductor devices has been scaled down to improve packing density and output performance. However, there is uncontrollable spreading of the dopants that comprise the well, punch-stop, and channel-stop when using high-temperature annealing processes, such as rapid thermal annealing (RTA). In this context, low-temperature deuterium annealing (LTDA) performed at a low temperature of 300℃ is proposed to reduce the thermal budget during CMOS fabrication. The LTDA effectively eliminates the interface trap in the gate dielectric layer, thereby improving the electrical characteristics of devices, such as threshold voltage (VTH), subthreshold swing (SS), on-state current (ION), and off-state current (IOFF). Moreover, the LTDA is perfectly compatible with CMOS processes.

고압수소 저장용 Cr-Mo계 저합금강의 수소취성에 미치는 템퍼링 온도의 영향 (Effect of Tempering Temperature on Hydrogen Embrittlement of Cr-Mo Low Alloy Steels for High-pressure Gaseous Hydrogen Storage)

  • 정민섭;신희창;김상규;황병철
    • 소성∙가공
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    • 제33권3호
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    • pp.185-192
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    • 2024
  • This study examined how varying tempering temperatures affect the susceptibility of Cr-Mo low alloy steels to hydrogen embrittlement. A slow strain-rate test (SSRT) was carried out on the steels electrochemically pre-charged with hydrogen in order to examine the hydrogen embrittlement behavior. The results showed that the hydrogen embrittlement resistance of the Cr-Mo low alloy steels improved with increasing tempering temperature. Thermal desorption analysis (TDA) revealed that diffusible hydrogen content decreased with increasing tempering temperature, accompanied by a slight increase in the peak temperature. This decrease in hydrogen content was likely due to a reduction in dislocation density which served as reversible hydrogen trap sites. These findings underline the significant role of tempering temperature in enhancing the hydrogen embrittlement resistance of Cr-Mo low alloy steels.